Abstract

The factors limiting the resolution of displacement sensors based on the extrinsic Fabry–Perot interferometer were studied. An analytical model giving the dependency of extrinsic Fabry–Perot interferometric (EFPI) resolution on the parameters of an optical setup and a sensor interrogator was developed. The proposed model enables one to either estimate the limit of possible resolution achievable with a given setup, or derive the requirements for optical elements and/or a sensor interrogator necessary for attaining the desired sensor resolution. An experiment supporting the analytical derivations was performed, demonstrating a large dynamic measurement range (with cavity length from tens of microns to 5 mm), a high baseline resolution (from 14 pm), and good agreement with the model.

© 2014 Optical Society of America

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