Abstract
The temperature dependence (from 25°C to 350°C) of laser-induced micro/nanostructures for multiple linearly polarized femtosecond laser pulse (pulse duration , wavelength ) irradiation of silicon in air is studied experimentally. Distinct micro/nanostructures are fabricated at elevated temperature. Low spatial frequency, laser-induced periodic ripple structures (LSFL), which are perpendicular to the polarization of the laser beam, are formed at all temperatures. Micrometer-size grooves, which are oriented perpendicular to the LSFL ripples, have been observed in the central part of the irradiated area above 150°C. The threshold to fabricate the LSFL ripples goes from 1.65 to while the temperature of the substrate increases from 25°C to 350°C. The possible mechanism of the temperature dependence of the micro/nanostructure generation is also discussed. These results demonstrate that temperature is an important parameter to be tuned to tailor the micro/nanostructure fabrication.
© 2014 Optical Society of America
Full Article | PDF ArticleMore Like This
Mochou Yang, BingYi Li, and Guoliang Deng
Opt. Express 30(22) 40756-40767 (2022)
Guoliang Deng, Guoying Feng, and Shouhuan Zhou
Opt. Express 25(7) 7818-7827 (2017)
Yuchan Zhang, Qilin Jiang, Kaiqiang Cao, Tianqi Chen, Ke Cheng, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, and Jianrong Qiu
Photon. Res. 9(5) 839-847 (2021)