Abstract

A laser confocal radius measurement (LCRM) method is proposed for high-accuracy measurement of the radius of curvature (ROC). The LCRM uses the peak points of confocal response curves to identify the cat eye and confocal positions precisely. It then accurately measures the distance between these two positions to determine the ROC. The LCRM also uses conic fitting, which significantly enhances measurement accuracy by restraining the influences of environmental disturbance and system noise on the measurement results. The experimental results indicate that LCRM has a relative expanded uncertainty of less than 10 ppm for both convex and concave spheres. Thus, LCRM is a feasible method for ROC measurements with high accuracy and concise structures.

© 2014 Optical Society of America

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2013

W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013).
[CrossRef]

2012

2011

2010

2009

2004

W. Zhao, J. Tan, and L. Qiu, “Bipolar absolute differential confocal approach to higher spatial resolution,” Opt. Express 12, 5013–5021 (2004).
[CrossRef]

U. Griesmann, J. Soons, and Q. Wanga, “Measuring form and radius of spheres with interferometry,” CIRP Ann. 53, 451–454 (2004).
[CrossRef]

2001

T. L. Schmitz, A. D. Davies, and C. J. Evans, “Uncertainties in interferometric measurements of radius of curvature,” Proc. SPIE 4451, 432–447 (2001).
[CrossRef]

Y. Xiang, “Focus retrocollimated interferometry for long-radius-of-curvature measurement,” Appl. Opt. 40, 6210–6214 (2001).
[CrossRef]

1994

A. J. Leistner and W. J. Giardini, “Fabrication and sphericity measurements of single-crystal silicon spheres,” Metrologia 31, 231–243 (1994).
[CrossRef]

1992

L. A. Selberg, “Radius measurement by interferometry,” Opt. Eng. 31, 1961–1967 (1992).
[CrossRef]

1987

Born, M.

M. Born and E. Wolf, Principle of Optics (Cambridge University, 1999).

Davies, A. D.

T. L. Schmitz, A. D. Davies, and C. J. Evans, “Uncertainties in interferometric measurements of radius of curvature,” Proc. SPIE 4451, 432–447 (2001).
[CrossRef]

Evans, C. J.

T. L. Schmitz, A. D. Davies, and C. J. Evans, “Uncertainties in interferometric measurements of radius of curvature,” Proc. SPIE 4451, 432–447 (2001).
[CrossRef]

Gao, D.

W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013).
[CrossRef]

Giardini, W. J.

A. J. Leistner and W. J. Giardini, “Fabrication and sphericity measurements of single-crystal silicon spheres,” Metrologia 31, 231–243 (1994).
[CrossRef]

Griesmann, U.

U. Griesmann, J. Soons, and Q. Wanga, “Measuring form and radius of spheres with interferometry,” CIRP Ann. 53, 451–454 (2004).
[CrossRef]

Guo, J.

W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013).
[CrossRef]

Hao, Q.

Hu, Y.

Imanaka, R.

Leistner, A. J.

A. J. Leistner and W. J. Giardini, “Fabrication and sphericity measurements of single-crystal silicon spheres,” Metrologia 31, 231–243 (1994).
[CrossRef]

Malacara, Z.

Z. Malacara, “Angle, prisms, curvature, and focal length measurements,” in Optical Shop Testing, D. Malacara, ed. (Wiley, 2007), Chap. 17, pp. 808–825.

Masui, J.

Meng, J.

W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013).
[CrossRef]

Murao, T.

Okino, Y.

Qiu, L.

Schmitz, T. L.

T. L. Schmitz, A. D. Davies, and C. J. Evans, “Uncertainties in interferometric measurements of radius of curvature,” Proc. SPIE 4451, 432–447 (2001).
[CrossRef]

Selberg, L. A.

L. A. Selberg, “Radius measurement by interferometry,” Opt. Eng. 31, 1961–1967 (1992).
[CrossRef]

Sha, D.

Soons, J.

U. Griesmann, J. Soons, and Q. Wanga, “Measuring form and radius of spheres with interferometry,” CIRP Ann. 53, 451–454 (2004).
[CrossRef]

Sun, R.

Tan, J.

Wang, Y.

W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013).
[CrossRef]

Wanga, Q.

U. Griesmann, J. Soons, and Q. Wanga, “Measuring form and radius of spheres with interferometry,” CIRP Ann. 53, 451–454 (2004).
[CrossRef]

Wilson, T.

T. Wilson, “Confocal microscopy,” in Confocal Microscopy, T. Wilson, ed. (Academic, 1990), Chap. 1, pp. 1–64.

Wolf, E.

M. Born and E. Wolf, Principle of Optics (Cambridge University, 1999).

Xiang, Y.

Yang, J.

Yang, L.

Ye, H.

Yoshizumi, K.

Zhao, W.

Zhu, Q.

Appl. Opt.

Chin. Opt. Lett.

CIRP Ann.

U. Griesmann, J. Soons, and Q. Wanga, “Measuring form and radius of spheres with interferometry,” CIRP Ann. 53, 451–454 (2004).
[CrossRef]

Metrologia

A. J. Leistner and W. J. Giardini, “Fabrication and sphericity measurements of single-crystal silicon spheres,” Metrologia 31, 231–243 (1994).
[CrossRef]

Opt. Commun.

W. Zhao, J. Guo, L. Qiu, Y. Wang, J. Meng, and D. Gao, “Low transmittance ICF capsule geometric parameters measurement using laser differential confocal technique,” Opt. Commun. 292, 62–67 (2013).
[CrossRef]

Opt. Eng.

L. A. Selberg, “Radius measurement by interferometry,” Opt. Eng. 31, 1961–1967 (1992).
[CrossRef]

Opt. Express

Opt. Lett.

Proc. SPIE

T. L. Schmitz, A. D. Davies, and C. J. Evans, “Uncertainties in interferometric measurements of radius of curvature,” Proc. SPIE 4451, 432–447 (2001).
[CrossRef]

Other

T. Wilson, “Confocal microscopy,” in Confocal Microscopy, T. Wilson, ed. (Academic, 1990), Chap. 1, pp. 1–64.

M. Born and E. Wolf, Principle of Optics (Cambridge University, 1999).

Z. Malacara, “Angle, prisms, curvature, and focal length measurements,” in Optical Shop Testing, D. Malacara, ed. (Wiley, 2007), Chap. 17, pp. 808–825.

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