Thermal stability studies of short period Sc/Cr and Sc/B₄C/Cr multilayers

Fit Parameters for Sc/Cr and $\mathsf{Sc}/{\mathsf{B}}_{\mathsf{4}}\mathsf{C}/\mathsf{Cr}$ Multilayers Annealed at Different Temperatures and for Different Times

^a ${\mathrm{\Lambda }}_{\text{init}}=\text{initial}$ period.
^b ${\mathrm{\Lambda }}_T=\text{period}$ after annealing.

Relative Intensity of the First Bragg Peak as Compared to the Intensity of the First Bragg Peak in the As-Deposited Multilayer

Measured Near-Normal Incidence Reflectivity (R) and Wavelength ($\mathsf{\lambda }$) in Sc/Cr and $\mathsf{Sc}/{\mathsf{B}}_4\mathsf{C}/\mathsf{Cr}$ Multilayers as a Function of Annealing Temperature^a

^a Each measurement is from a different sample.

RMS Surface Roughness (${\mathsf{R}}_{\mathsf{q}}$) Calculated from Atomic Force Micrographs ($\mathsf{1}\mathsf{\mu m}\times \mathsf{1}\mathsf{\mu m}$)

Table 1.

Fit Parameters for Sc/Cr and $\mathsf{Sc}/{\mathsf{B}}_{\mathsf{4}}\mathsf{C}/\mathsf{Cr}$ Multilayers Annealed at Different Temperatures and for Different Times

^a ${\mathrm{\Lambda }}_{\text{init}}=\text{initial}$ period.
^b ${\mathrm{\Lambda }}_T=\text{period}$ after annealing.

Table 2.

Relative Intensity of the First Bragg Peak as Compared to the Intensity of the First Bragg Peak in the As-Deposited Multilayer

Table 3.

Measured Near-Normal Incidence Reflectivity (R) and Wavelength ($\mathsf{\lambda }$) in Sc/Cr and $\mathsf{Sc}/{\mathsf{B}}_4\mathsf{C}/\mathsf{Cr}$ Multilayers as a Function of Annealing Temperature^a

^a Each measurement is from a different sample.

Table 4.

RMS Surface Roughness (${\mathsf{R}}_{\mathsf{q}}$) Calculated from Atomic Force Micrographs ($\mathsf{1}\mathsf{\mu m}\times \mathsf{1}\mathsf{\mu m}$)