Abstract

Collinear calibration is a typical and common method for a laser (heterodyne) interferometer, but it usually suffers from the influence of the tilt of the target retroreflectors and the dissymmetry of the optical paths during the calibration. This paper mainly analyzes and models the calibration error caused by the tilt error of the target retroreflectors and reveals the error source that is the disturbance from the rotary error of the guideway slider pair. Experimental results prove the validity of the analysis and model of the calibration error. The calibration error is up to 0.5 μm when the tilt error is 0.36°, which is large enough to equal the maximum tolerance of laser interferometer (0.5 μm) in use.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Error analysis of a plane mirror interferometer based on geometric optical paths

Shanzhi Tang, Zhao Wang, Lihong Zhong, Jianmin Gao, and Junjie Guo
Opt. Express 20(5) 5108-5118 (2012)

Measurement by multidirectional interferometers of the position and orientation of a positioning stage

Jie Zhang, Tetsuya Yamaguchi, Koichi Iwata, Hisao Kikuta, and Choong Sik Park
Appl. Opt. 42(28) 5661-5669 (2003)

Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters

Benyong Chen, Bin Xu, Liping Yan, Enzheng Zhang, and Yanna Liu
Opt. Express 23(7) 9052-9073 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription