#### Table 1.

Resultant Partial Pressures of ${\mathrm{O}}_{2}$ and ${\mathrm{N}}_{2}$ in Sputter Chamber for Given Influx While Vacuum Pumps Are Running

Gas Flow in SCCM | Partial Pressure in Pa |

4 | $6\xb7{10}^{-2}$ |

2 | $3\xb7{10}^{-2}$ |

1.8 | $2.6\xb7{10}^{-2}$ |

1.6 | $2.3\xb7{10}^{-2}$ |

1.4 | $2.0\xb7{10}^{-2}$ |

#### Table 2.

Brendel Oscillator Parameters for Silicon Dioxide with the Resulting MSE (${\nu}_{0j}$, ${\nu}_{\tau j}$, ${\nu}_{pj}$, ${\sigma}_{j}$ are in ${\mathrm{cm}}^{-1}$)

Sample | ${\u03f5}_{1}(\infty )$ | ${\nu}_{01}$ | ${\nu}_{\tau 1}$ | ${\nu}_{p1}$ | ${\sigma}_{1}$ | ${\nu}_{02}$ | ${\nu}_{\tau 2}$ | ${\nu}_{p2}$ | ${\sigma}_{2}$ | ${\nu}_{03}$ | ${\nu}_{\tau 3}$ | ${\nu}_{p3}$ | ${\sigma}_{3}$ | ${\nu}_{04}$ | ${\nu}_{\tau 4}$ | ${\nu}_{p4}$ | ${\sigma}_{4}$ | ${\nu}_{05}$ | ${\nu}_{\tau 5}$ | ${\nu}_{p5}$ | ${\sigma}_{5}$ | MSE |

SO14-200 | 2.09 | 1046 | 1.55 | 575 | 76 | 1167 | 0.51 | 288 | 125 | 1058 | 10.57 | 459 | 63 | 798 | 55.30 | 415 | 170 | | | | | 1.036 |

SO16-200 | 2.09 | 1046 | 0.59 | 579 | 78 | 1167 | 1.23 | 290 | 125 | 1058 | 8.52 | 457 | 62 | 798 | 54.95 | 406 | 180 | | | | | 1.261 |

SO18-200 | 2.08 | 1046 | 7.20 | 589 | 77 | 1167 | 1.20 | 287 | 123 | 1058 | 2.24 | 436 | 67 | 798 | 54.16 | 401 | 147 | | | | | 1.200 |

SO20-200 | 2.10 | 1046 | 3.37 | 572 | 81 | 1167 | 0.91 | 299 | 127 | 1058 | 0.93 | 456 | 64 | 225 | 53.76 | 443 | 297 | 799 | 9.10 | 234 | 128 | 1.448 |

SO40-200 | 2.09 | 1046 | 15.53 | 544 | 63 | 1167 | 4.43 | 309 | 122 | 1058 | 0.42 | 466 | 67 | 434 | 54.14 | 427 | 316 | 799 | 12.94 | 223 | 85 | 1.382 |

#### Table 3.

Brendel Oscillator Parameters for Silicon Nitride with the Resulting MSE (${\nu}_{0j}$, ${\nu}_{\tau j}$, ${\nu}_{pj}$, ${\sigma}_{j}$ are in ${\mathrm{cm}}^{-1}$)

Sample | ${\u03f5}_{1}(\infty )$ | ${\nu}_{01}$ | ${\nu}_{\tau 1}$ | ${\nu}_{p1}$ | ${\sigma}_{1}$ | ${\nu}_{02}$ | ${\nu}_{\tau 2}$ | ${\nu}_{p2}$ | ${\sigma}_{2}$ | ${\nu}_{03}$ | ${\nu}_{\tau 3}$ | ${\nu}_{p3}$ | ${\sigma}_{3}$ | ${\nu}_{04}$ | ${\nu}_{\tau 4}$ | ${\nu}_{p4}$ | ${\sigma}_{4}$ | ${\nu}_{05}$ | ${\nu}_{\tau 5}$ | ${\nu}_{p5}$ | ${\sigma}_{5}$ | MSE |

SN14-300 | 5.68 | 697 | 57 | 54 | 12 | 810 | 2 | 792 | 157 | 941 | 3 | 556 | 152 | 1062 | 211 | 40 | 207 | 1208 | 1917 | 772 | 1045 | 0.797 |

SN16-300 | 3.90 | 826 | 6 | 920 | 205 | 925 | 10 | 522 | 208 | 1060 | 6 | 450 | 825 | 1189 | 3253 | 2428 | 32,235 | 17,873 | 0 | 22,377 | 0 | 0.692 |

SN18-300 | 3.06 | 826 | 20 | 1247 | 294 | 925 | 201 | 433 | 440 | 1063 | 2 | 100 | 781 | 1185 | 0 | 191 | 355 | 22128 | 0 | 37,337 | 0 | 0.923 |

SN20-300 | 6.12 | 826 | 2 | 1240 | 283 | 925 | 4 | 1 | 44 | 1063 | 36 | 63 | 3468 | 1185 | 57 | 702 | 592 | 7931 | 1 | 0 | 2987 | 0.916 |

SN40-300 | 3.55 | 826 | 12 | 902 | 171 | 925 | 0 | 664 | 163 | 1063 | 58 | 379 | 145 | 1185 | 44 | 172 | 104 | 2577 | 0 | 235 | 588 | 1.975 |

#### Table 4.

Brendel Oscillator Parameters for Titanium Dioxide with the Resulting MSE (${\nu}_{0j}$, ${\nu}_{\tau j}$, ${\nu}_{pj}$, ${\sigma}_{j}$ are given in ${\mathrm{cm}}^{-1}$)

Sample | ${\u03f5}_{1}(\infty )$ | ${\nu}_{01}$ | ${\nu}_{\tau 1}$ | ${\nu}_{p1}$ | ${\sigma}_{1}$ | ${\nu}_{02}$ | ${\nu}_{\tau 2}$ | ${\nu}_{p2}$ | ${\sigma}_{2}$ | MSE |

TO16-200 | 6.15 | 23 | 78 | 2020 | 410 | 10,983 | 2 | 180 | 65 | 0.705 |

TO20-200 | 5.83 | 46 | 18 | 1878 | 732 | 10,815 | 160 | 4590 | 387 | 0.765 |

TD00-600 | 5.47 | 90 | 16 | 1827 | 829 | 14,030 | 1 | 8985 | 146 | 0.773 |

#### Table 5.

Brendel Oscillator Parameters for Aluminum Oxide with the Resulting MSE (${\nu}_{0j}$, ${\nu}_{\tau j}$, ${\nu}_{pj}$, ${\sigma}_{j}$ are in ${\mathrm{cm}}^{-1}$)

Sample | ${\u03f5}_{1}(\infty )$ | ${\nu}_{01}$ | ${\nu}_{\tau 1}$ | ${\nu}_{p1}$ | ${\sigma}_{1}$ | ${\nu}_{02}$ | ${\nu}_{\tau 2}$ | ${\nu}_{p2}$ | ${\sigma}_{2}$ | ${\nu}_{03}$ | ${\nu}_{\tau 3}$ | ${\nu}_{p3}$ | ${\sigma}_{3}$ | MSE |

AO18-200 | 2.08 | 601 | 2.26 | 824 | 957 | 744 | 5.7 | 524 | 202 | 224,363 | 0 | 43,887 | 0 | 1.388 |

AO20-200 | 2.11 | 190 | 18 | 735 | 1286 | 715 | 0 | 726 | 254 | 221,086 | 0 | 43,193 | 0 | 1.331 |

AO40-200 | 2.12 | 79 | 1 | 921 | 843 | 784 | 47 | 581 | 179 | 217,457 | 1 | 43,199 | 0 | 1.212 |

#### Table 6.

Brendel Oscillator Parameters for Aluminum Nitride with the Resulting MSE (${\nu}_{0j}$, ${\nu}_{\tau j}$, ${\nu}_{pj}$, ${\sigma}_{j}$ are given in ${\mathrm{cm}}^{-1}$)

Sample | ${\u03f5}_{1}(\infty )$ | ${\nu}_{01}$ | ${\nu}_{\tau 1}$ | ${\nu}_{p1}$ | ${\sigma}_{1}$ | ${\nu}_{02}$ | ${\nu}_{\tau 2}$ | ${\nu}_{p2}$ | ${\sigma}_{2}$ | ${\nu}_{03}$ | ${\nu}_{\tau 3}$ | ${\nu}_{p3}$ | ${\sigma}_{3}$ | ${\nu}_{04}$ | ${\nu}_{\tau 4}$ | ${\nu}_{p4}$ | ${\sigma}_{4}$ | ${\nu}_{05}$ | ${\nu}_{\tau 5}$ | ${\nu}_{p5}$ | ${\sigma}_{5}$ | MSE |

AN18-300 | 5.72 | 588 | 0 | 2847 | 22.3 | 1207 | 0 | 1025 | 365 | 769 | 0 | 123 | 13.4 | 2648 | 392 | 4260 | 1009 | 10,690 | 10,587 | 25,970 | 487 | 1.299 |

Sample | ${\u03f5}_{1}(\infty )$ | ${\nu}_{01}$ | ${\nu}_{\tau 1}$ | ${\nu}_{p1}$ | ${\sigma}_{1}$ | ${\nu}_{02}$ | ${\nu}_{\tau 2}$ | ${\nu}_{p2}$ | ${\sigma}_{2}$ | ${\nu}_{03}$ | ${\nu}_{\tau 3}$ | ${\nu}_{p3}$ | ${\sigma}_{3}$ | MSE |

AN20-300 | 4.15 | 797 | 39 | 467 | 178 | 662 | 10 | 989 | 189 | 215 | 54 | 323 | 229 | 3.142 |

AN20-200 | 2.95 | 824 | 38 | 400 | 290 | 592 | 10 | 1093 | 120 | 257 | 54 | 312 | 203 | 3.142 |

AN40-200 | 2.89 | 620 | 0 | 1030 | 428 | | | | | | | | | 2.072 |