Abstract

The future needs of space-based, observational planetary and astronomy missions include low mass and small volume radiometric instruments that can operate in high-radiation and low-temperature environments. Here, we focus on a central spectroscopic component, the bandpass filter. We model the bandpass response of the filters to target the wavelength of the resonance peaks at 20, 40, and 60 µm and report good agreement between the modeled and measured response. We present a technique of using standard micromachining processes for semiconductor fabrication to make compact, free-standing, resonant, metal mesh filter arrays with silicon support frames. The process can be customized to include multiple detector array architectures, and the silicon frame provides lightweight mechanical support with low form factor.

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2010

J. Adams, T. Herter, G. Gull, J. Schoenwald, C. Henderson, L. Keller, J. De Buizer, G. Stacey, and T. Nikola, “FORCAST: a first light facility instrument for SOFIA,” Proc. SPIE 7735, 77351U (2010).
[CrossRef]

N. Jethava, J. Chervenak, A. Brown, D. Benford, G. Kletetschka, V. Mikula, and K. U-yen, “Development of superconducting transition edge sensors based on electron-phonon decoupling,” Proc. SPIE 7741, 774120 (2010).
[CrossRef]

2008

J. Wei, D. Olaya, B. Karasik, S. Pereverzev, A. Sergeev, and M. Gershenson, “Ultrasensitive hot-electron nanobolometers for terahertz astrophysics,” Nat. Nanotechnol. 3, 496–500 (2008).
[CrossRef]

C. Tang, E. Lennon, G. Fredrickson, E. Kramer, and C. Hawker, “Evolution of block copolymer lithography to highly ordered square arrays,” Science 322, 429–432 (2008).
[CrossRef]

A. Melo, M. Kornberg, P. Kaufmann, M. Piazzetta, E. Bortolucci, M. Zakia, O. Bauer, A. Poglitsch, and A. Alves da Silva, “Metal mesh resonant filters for terahertz frequencies,” Appl. Opt. 47, 6064–6069 (2008).
[CrossRef]

2007

C. Chen, M. Tsai, T. Chuang, Y. Tsung, and S. Lee, “Extraordinary transmission through a silver film perforated with cross shaped hole arrays in a square lattice,” Appl. Phys. Lett. 91, 063108 (2007).
[CrossRef]

E. Wollack, D. Fixsen, A. Kogut, M. Limon, P. Mirel, and J. Singal, “Radiometric waveguide calibrators,” IEEE Trans. Instr. Meas. 56, 2073–2078 (2007).
[CrossRef]

2006

G. Pisano, P. Ade, and S. Weaver, “Polarization effects investigations in quasi-optical metal grid filters,” Infrared Phys. Technol. 48, 89–100 (2006).
[CrossRef]

P. Ade, G. Pisano, C. Tucker, and S. Weaver, “A review of metal mesh filters,” Proc. SPIE 6275, 62750U (2006).
[CrossRef]

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

2001

J. Fortin and T. Lu, “Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films,” Thin Solid Films 397, 223–228 (2001).
[CrossRef]

1999

1994

1990

B. Patt, R. Dolin, T. Devore, J. Markakis, J. Iwanczyk, N. Dorri, and J. Trombka, “Radiation damage resistance in mercuric iodide X-ray detectors,” Nucl. Instr. Meth. Phys. Res. A 299, 176–181 (1990).
[CrossRef]

1989

J. Iwanczyk, Y. Wang, J. Bradley, J. Conley, A. Albee, and T. Economou, “Performance and durability of HgI2 X-ray detectors for space missions,” IEEE Trans. Nucl. Sci. 36, 841–845 (1989).
[CrossRef]

1987

G. Wang, G. Pan, L. Dou, R. Yu, T. Zhang, S. Jiang, and Q. Dai, “Proton beam modification of isotactic polypropylene,” Nucl. Instrum. Methods Phys. Res. Sect. B 27, 410–416 (1987).
[CrossRef]

1984

1983

1981

1968

1967

1962

1946

H. Booker, “Slot aerials and their relation to complementary wire aerials (Babinet’s principle),” J. Inst. Elect. Eng. 93, 620–626 (1946).
[CrossRef]

Adams, J.

J. Adams, T. Herter, G. Gull, J. Schoenwald, C. Henderson, L. Keller, J. De Buizer, G. Stacey, and T. Nikola, “FORCAST: a first light facility instrument for SOFIA,” Proc. SPIE 7735, 77351U (2010).
[CrossRef]

Ade, P.

P. Ade, G. Pisano, C. Tucker, and S. Weaver, “A review of metal mesh filters,” Proc. SPIE 6275, 62750U (2006).
[CrossRef]

G. Pisano, P. Ade, and S. Weaver, “Polarization effects investigations in quasi-optical metal grid filters,” Infrared Phys. Technol. 48, 89–100 (2006).
[CrossRef]

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Akgun, U.

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

Albayrak, E.

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

Albee, A.

J. Iwanczyk, Y. Wang, J. Bradley, J. Conley, A. Albee, and T. Economou, “Performance and durability of HgI2 X-ray detectors for space missions,” IEEE Trans. Nucl. Sci. 36, 841–845 (1989).
[CrossRef]

Alexander, R.

Alves da Silva, A.

Ayan, A.

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

Bauer, O.

Bell, R.

Bell, S.

Benford, D.

N. Jethava, J. Chervenak, A. Brown, D. Benford, G. Kletetschka, V. Mikula, and K. U-yen, “Development of superconducting transition edge sensors based on electron-phonon decoupling,” Proc. SPIE 7741, 774120 (2010).
[CrossRef]

Beyer, J.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Boldt, J.

J. Boldt, “Overview of JEO model payload,” presented at the Europa Jupiter System Mission 2nd Instrument Workshop, Baltimore, Maryland, 15–17July2009.

Booker, H.

H. Booker, “Slot aerials and their relation to complementary wire aerials (Babinet’s principle),” J. Inst. Elect. Eng. 93, 620–626 (1946).
[CrossRef]

Bortolucci, E.

Bradley, J.

J. Iwanczyk, Y. Wang, J. Bradley, J. Conley, A. Albee, and T. Economou, “Performance and durability of HgI2 X-ray detectors for space missions,” IEEE Trans. Nucl. Sci. 36, 841–845 (1989).
[CrossRef]

Brown, A.

N. Jethava, J. Chervenak, A. Brown, D. Benford, G. Kletetschka, V. Mikula, and K. U-yen, “Development of superconducting transition edge sensors based on electron-phonon decoupling,” Proc. SPIE 7741, 774120 (2010).
[CrossRef]

Bruecken, P.

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

Bruijn, M.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Chase, S.

Chen, C.

C. Chen, M. Tsai, T. Chuang, Y. Tsung, and S. Lee, “Extraordinary transmission through a silver film perforated with cross shaped hole arrays in a square lattice,” Appl. Phys. Lett. 91, 063108 (2007).
[CrossRef]

Chervenak, J.

N. Jethava, J. Chervenak, A. Brown, D. Benford, G. Kletetschka, V. Mikula, and K. U-yen, “Development of superconducting transition edge sensors based on electron-phonon decoupling,” Proc. SPIE 7741, 774120 (2010).
[CrossRef]

Chuang, T.

C. Chen, M. Tsai, T. Chuang, Y. Tsung, and S. Lee, “Extraordinary transmission through a silver film perforated with cross shaped hole arrays in a square lattice,” Appl. Phys. Lett. 91, 063108 (2007).
[CrossRef]

Clarke, K.

K. Clarke, T. Magner, and C. Erd, “Europa Jupiter Systems mission overview,” presented at the Europa Jupiter System Mission 4th Instrument Workshop, Pasadena, California, 27–29July2010.

Conley, J.

J. Iwanczyk, Y. Wang, J. Bradley, J. Conley, A. Albee, and T. Economou, “Performance and durability of HgI2 X-ray detectors for space missions,” IEEE Trans. Nucl. Sci. 36, 841–845 (1989).
[CrossRef]

Crowe, T.

Dai, Q.

G. Wang, G. Pan, L. Dou, R. Yu, T. Zhang, S. Jiang, and Q. Dai, “Proton beam modification of isotactic polypropylene,” Nucl. Instrum. Methods Phys. Res. Sect. B 27, 410–416 (1987).
[CrossRef]

De Buizer, J.

J. Adams, T. Herter, G. Gull, J. Schoenwald, C. Henderson, L. Keller, J. De Buizer, G. Stacey, and T. Nikola, “FORCAST: a first light facility instrument for SOFIA,” Proc. SPIE 7735, 77351U (2010).
[CrossRef]

De Korte, P.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Densing, R.

Devore, T.

B. Patt, R. Dolin, T. Devore, J. Markakis, J. Iwanczyk, N. Dorri, and J. Trombka, “Radiation damage resistance in mercuric iodide X-ray detectors,” Nucl. Instr. Meth. Phys. Res. A 299, 176–181 (1990).
[CrossRef]

Dolin, R.

B. Patt, R. Dolin, T. Devore, J. Markakis, J. Iwanczyk, N. Dorri, and J. Trombka, “Radiation damage resistance in mercuric iodide X-ray detectors,” Nucl. Instr. Meth. Phys. Res. A 299, 176–181 (1990).
[CrossRef]

Dorri, N.

B. Patt, R. Dolin, T. Devore, J. Markakis, J. Iwanczyk, N. Dorri, and J. Trombka, “Radiation damage resistance in mercuric iodide X-ray detectors,” Nucl. Instr. Meth. Phys. Res. A 299, 176–181 (1990).
[CrossRef]

Dou, L.

G. Wang, G. Pan, L. Dou, R. Yu, T. Zhang, S. Jiang, and Q. Dai, “Proton beam modification of isotactic polypropylene,” Nucl. Instrum. Methods Phys. Res. Sect. B 27, 410–416 (1987).
[CrossRef]

Dragovan, M.

Duru, F.

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

Economou, T.

J. Iwanczyk, Y. Wang, J. Bradley, J. Conley, A. Albee, and T. Economou, “Performance and durability of HgI2 X-ray detectors for space missions,” IEEE Trans. Nucl. Sci. 36, 841–845 (1989).
[CrossRef]

Edewaard, D.

Eliseev, V.

S. Kuznetsov, V. Kubarev, P. Kalinin, B. Goldenberg, V. Eliseev, E. Petrova, and N. Vinokurov, “Development of metal mesh based quasi-optical selective components and their applications in high-power experiments at Novosibirsk terahertz FEL,” in Proceedings of FEL 2007 (2007), pp. 89–92.

Erd, C.

K. Clarke, T. Magner, and C. Erd, “Europa Jupiter Systems mission overview,” presented at the Europa Jupiter System Mission 4th Instrument Workshop, Pasadena, California, 27–29July2010.

Fixsen, D.

E. Wollack, D. Fixsen, A. Kogut, M. Limon, P. Mirel, and J. Singal, “Radiometric waveguide calibrators,” IEEE Trans. Instr. Meas. 56, 2073–2078 (2007).
[CrossRef]

Fortin, J.

J. Fortin and T. Lu, “Ultraviolet radiation induced degradation of poly-para-xylylene (parylene) thin films,” Thin Solid Films 397, 223–228 (2001).
[CrossRef]

Fredrickson, G.

C. Tang, E. Lennon, G. Fredrickson, E. Kramer, and C. Hawker, “Evolution of block copolymer lithography to highly ordered square arrays,” Science 322, 429–432 (2008).
[CrossRef]

Gao, J.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Genzel, L.

Gershenson, M.

J. Wei, D. Olaya, B. Karasik, S. Pereverzev, A. Sergeev, and M. Gershenson, “Ultrasensitive hot-electron nanobolometers for terahertz astrophysics,” Nat. Nanotechnol. 3, 496–500 (2008).
[CrossRef]

Gillan, P.

Glowaca, D.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Goldenberg, B.

S. Kuznetsov, V. Kubarev, P. Kalinin, B. Goldenberg, V. Eliseev, E. Petrova, and N. Vinokurov, “Development of metal mesh based quasi-optical selective components and their applications in high-power experiments at Novosibirsk terahertz FEL,” in Proceedings of FEL 2007 (2007), pp. 89–92.

Goldie, D.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Goldsmith, P.

P. Goldsmith, Quasi-Optical Systems: Gausian Beam Quasioptical Propagation and Applications (IEEE, 1998).

Goller, K.

Griffin, D.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Griffin, M.

P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

Gull, G.

J. Adams, T. Herter, G. Gull, J. Schoenwald, C. Henderson, L. Keller, J. De Buizer, G. Stacey, and T. Nikola, “FORCAST: a first light facility instrument for SOFIA,” Proc. SPIE 7735, 77351U (2010).
[CrossRef]

Gulmez, E.

U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
[CrossRef]

Hawker, C.

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B. Patt, R. Dolin, T. Devore, J. Markakis, J. Iwanczyk, N. Dorri, and J. Trombka, “Radiation damage resistance in mercuric iodide X-ray detectors,” Nucl. Instr. Meth. Phys. Res. A 299, 176–181 (1990).
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J. Wei, D. Olaya, B. Karasik, S. Pereverzev, A. Sergeev, and M. Gershenson, “Ultrasensitive hot-electron nanobolometers for terahertz astrophysics,” Nat. Nanotechnol. 3, 496–500 (2008).
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N. Jethava, J. Chervenak, A. Brown, D. Benford, G. Kletetschka, V. Mikula, and K. U-yen, “Development of superconducting transition edge sensors based on electron-phonon decoupling,” Proc. SPIE 7741, 774120 (2010).
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S. Kuznetsov, V. Kubarev, P. Kalinin, B. Goldenberg, V. Eliseev, E. Petrova, and N. Vinokurov, “Development of metal mesh based quasi-optical selective components and their applications in high-power experiments at Novosibirsk terahertz FEL,” in Proceedings of FEL 2007 (2007), pp. 89–92.

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C. Chen, M. Tsai, T. Chuang, Y. Tsung, and S. Lee, “Extraordinary transmission through a silver film perforated with cross shaped hole arrays in a square lattice,” Appl. Phys. Lett. 91, 063108 (2007).
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B. Patt, R. Dolin, T. Devore, J. Markakis, J. Iwanczyk, N. Dorri, and J. Trombka, “Radiation damage resistance in mercuric iodide X-ray detectors,” Nucl. Instr. Meth. Phys. Res. A 299, 176–181 (1990).
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P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

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Mestvirishvili, A.

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E. Wollack, D. Fixsen, A. Kogut, M. Limon, P. Mirel, and J. Singal, “Radiometric waveguide calibrators,” IEEE Trans. Instr. Meas. 56, 2073–2078 (2007).
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J. Adams, T. Herter, G. Gull, J. Schoenwald, C. Henderson, L. Keller, J. De Buizer, G. Stacey, and T. Nikola, “FORCAST: a first light facility instrument for SOFIA,” Proc. SPIE 7735, 77351U (2010).
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P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

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U. Akgun, P. Bruecken, A. Ayan, F. Duru, J. Olson, E. Albayrak, E. Gulmez, A. Mestvirishvili, Y. Onel, and I. Schmidt, “Radiation damage and light transmission studies on air core light guides,” IEEE Trans. Nucl. Sci. 53, 1547–1550 (2006).
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E. Wollack, D. Fixsen, A. Kogut, M. Limon, P. Mirel, and J. Singal, “Radiometric waveguide calibrators,” IEEE Trans. Instr. Meas. 56, 2073–2078 (2007).
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J. Adams, T. Herter, G. Gull, J. Schoenwald, C. Henderson, L. Keller, J. De Buizer, G. Stacey, and T. Nikola, “FORCAST: a first light facility instrument for SOFIA,” Proc. SPIE 7735, 77351U (2010).
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P. Mauskopf, P. Ade, J. Beyer, M. Bruijn, J. Gao, D. Glowaca, D. Goldie, D. Griffin, M. Griffin, F. Hoevers, P. Khosropanah, P. Kooijma, P. De Korte, D. Morozov, A. Murphy, C. O’Sullivan, M. Ridder, N. Trappe, H. Van Weers, J. Van Der Kuur, and S. Withington, “TES focal plane for SPICA-SAFARI,” in Proceedings of the 21st International Symposium on Space Terahertz Technology (National Radio Astronomy Observatory, 2010) pp. 246–255.

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S. Kuznetsov, V. Kubarev, P. Kalinin, B. Goldenberg, V. Eliseev, E. Petrova, and N. Vinokurov, “Development of metal mesh based quasi-optical selective components and their applications in high-power experiments at Novosibirsk terahertz FEL,” in Proceedings of FEL 2007 (2007), pp. 89–92.

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Figures (6)

Fig. 1.
Fig. 1.

Left: Modeling topology for the square tiling of crosses with perfect-E and perfect-H boundary conditions and thickness t. Right: Hexagonally close-packed circular filter with master boundaries (M1, M2, and M3), slave boundaries (S1, S2, and S3), and Floquet ports (F1 and F2). Bottom: The dimension parameters of the cross-shaped filter.

Fig. 2.
Fig. 2.

(a) Scanning electron microscope (SEM) image of an electroplated copper mesh filter. The filter consists of a copper sheet with hexagonally close-packed circular holes. (b) SEM image of a linear filter array, in which each filter has cross-shaped holes. The dimensions of one aperture are 240μm×480μm. Also visible in this image is the 400 µm thick silicon frame region which mechanically supports the filters. The apparent gaps between the silicon and copper are comprised of Parylene-C.

Fig. 3.
Fig. 3.

Cross-section schematic diagram of the fabrication flow.

Fig. 4.
Fig. 4.

FTS measurement of transmission spectra for a representative sampling of bandpass filters fabricated on a single 4” wafer. Shown in (a) and (b) are filters with cross-shaped holes, indicated by the X, arranged in a square lattice. (c) Filters with square holes, indicated by the S, arranged in a square lattice. (d) Circular holes with a hexagonally close packed lattice, indicated by CS. The number in the legend corresponds to the design peak frequency. The hole dimensions are (a) G=31.5, K=20.5, J=6μm; (b) G=47, K=30.5, J=9μm; (c) G=52.5, K=34μm; and (d) G=58.5, K=39μm. The measured mesh thickness is t=8μm. The horizontal line on each plot is the ratio of the aperture area over the unit cell area for each filter. This corresponds to transmittance in the geometric optics limit and agrees in magnitude with the average of the modeled transmittance. The observed structure in the modeled transmittance is expected at frequencies above the design band due to the excitation of higher order modes. These details are not observed in the measured data due to diffractive losses and the effective average over the finite angular acceptance by the focused beam in the FTS.

Fig. 5.
Fig. 5.

(a) Shows the transmittance for the 20 µm cross-shaped filter. The scale has been changed to highlight the passband features. The realized geometry, which is a perturbation of the original design, exhibits rounding due to lithographic effects, shown in (b), which caused the filter bandpass response to deviate significantly from the initial modeled response. The included simulation of the bandpass response with rounded and tapered cross features gives improved agreement with measurement. The horizontal line in (a) is the ratio of the aperture area over the unit cell area for each filter.

Fig. 6.
Fig. 6.

(a) Micrograph of SU-8 posts without using a low pass filter during UV light exposure. (b) Picture of the SU-8 posts, in which the same lithography mask as in (a) was used with the inclusion of an SU-8 low pass filter (Omega Optical). The resulting structures are much more precisely defined.

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