Abstract

This paper presents the design and analysis of a Si-based tunable flattop photodetector realized by the introduction of a stepped Fabry–Perot cavity, which can be thermally tuned via applying tuning power on its tuning electrode. By using a transfer matrix method, the spectral response of the photodetector is simulated in detail, indicating a flattop line shape can be achieved with an optimum step height. A trade-off residing in this device between the free spectrum range and the ease of fabrication of step height is also revealed and analyzed. In the final design of the photodetector, 1dB linewidth of 0.5nm, 3dB linewidth of 0.8nm, 6dB linewidth of 1.2nm, peak quantum efficiency of 40%, tuning efficiency of 91mW/nm are theoretically obtained. We discuss the epitaxial growth and fabrication of the photodetector in the end, exhibiting the mature technique available for this device.

© 2012 Optical Society of America

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