Abstract

A modified planetary rotation system has been developed to obtain high uniformity optical coatings on large substrates in an ion beam sputter coater. The system allows the normally fixed sun gear to rotate, thus allowing an extra degree of freedom and permitting more complex motions to be used. By moving the substrate platen between two fixed positions around the sun axis, averaging of the distributions at these two positions takes place and improved uniformity can be achieved. A peak-to-valley radial uniformity of 0.15% (0.07%rms) on a single layer film on a 400mm diameter substrate has been achieved without the aid of masking.

© 2011 Optical Society of America

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References

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2009 (1)

2007 (1)

2006 (1)

2005 (1)

2000 (2)

Abzalova, G. I.

Akiyama, T.

Badoil, B.

Cathelinaud, M.

Clarke, G. A.

Dobrowolski, J. A.

Flaminio, R.

Franc, J.

Howe, L.

Lemarchand, F.

Lequime, M.

Macleod, H. A.

H. A. Macleod, “The Essential Macleod,” software by Thin Film Center Inc.

Martínez, A.

Michel, C.

Mikhailov, A. V.

Montorio, J.-L.

Morgado, N.

Oliver, J. B.

Osborne, N.

Pinard, L.

Ranger, M.

Regalado, L. E.

Sabirov, R. S.

Sassolas, B.

Sullivan, B. T.

Talbot, D.

Tikhonravov, A. V.

A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer Thin Film” (OptiLayer Consulting Ltd., software copyright 2010).

Trubetskov, M. K.

A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer Thin Film” (OptiLayer Consulting Ltd., software copyright 2010).

Villa, F.

Appl. Opt. (5)

J. Opt. Technol. (1)

Other (3)

H. A. Macleod, “The Essential Macleod,” software by Thin Film Center Inc.

TFCalc by Software Spectra, Inc., 14025 N. W. Harvest Lane, Portland, Ore. 97229, USA.

A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer Thin Film” (OptiLayer Consulting Ltd., software copyright 2010).

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Figures (10)

Fig. 1
Fig. 1

Basic concept of a conventional planetary rotation mount. The substrate platen is attached to the planet gear.

Fig. 2
Fig. 2

Modified planetary with driven sun gear. Servo motors enable both gears to move independently.

Fig. 3
Fig. 3

The two-dimensional plume shape approximation: calculated rings of constant thickness superimposed on a false color image of the source distribution.

Fig. 4
Fig. 4

Photograph of the interference pattern of an 1 μm thick tantala film deposited on a stationary glass plate.

Fig. 5
Fig. 5

Horizontal and vertical line thickness measurements (symbols) through the film thickness maximum, together with model profiles determined by adjusting the parameters to fit these points.

Fig. 6
Fig. 6

Fixed angle positions of the rotating planet to the horizontal axis of the plume center.

Fig. 7
Fig. 7

Measured and calculated uniformity over a 200 mm radius of a simple rotating substrate located at fixed angles to the horizontal axis of the source plume. The symbols represent measured values, while the solid curves are the model predictions.

Fig. 8
Fig. 8

Modeled thickness uniformity obtained by adding the deposition profiles obtained at 3 ° substrate angle to that obtained at 77 ° in the ratio 1 21 (by maximum thickness).

Fig. 9
Fig. 9

Measured thickness uniformity of an 250 nm thick tantala film on a silica substrate over a 200 mm radius of a rotating planet oscillating between optimized fixed angles to the horizontal axis of the source plume. The uniformity is 0.15 % p–v.

Fig. 10
Fig. 10

Optimized Hi and Lo angles for best modeled thickness uniformity (including effect of expected transition time. The uniformity is 0.1 % p–v.

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