Abstract

Fluorine-doped tin oxide (FTO) films have been deposited by pulsed DC magnetron sputtering with an Sn target. Various ratios of CF4/O2 gas were injected to enhance the optical and electrical properties of the films. The extinction coefficient was lower than 1.5×103 in the range from 400 to 800nm when the CF4/O2 ratio was 0.375. The resistivity of fluorine-doped SnO2 films (1.63×103Ωcm) deposited at 300°C was 27.9 times smaller than that of undoped SnO2 (4.55×102Ωcm). Finally, an FTO film was consecutively deposited for protecting the oxidation of indium tin oxide films. The resistivity of the double-layered film was 2.68×104Ωcm, which increased by less than 39% at a 450°C annealing temperature for 1h in air.

© 2011 Optical Society of America

Full Article  |  PDF Article
Related Articles
Transparent conducting indium doped ZnO films by dc reactive S-gun magnetron sputtering

Zhi-Zheng Ye and Jin-Fa Tang
Appl. Opt. 28(14) 2817-2819 (1989)

Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation

Kevin Füchsel, Ulrike Schulz, Norbert Kaiser, and Andreas Tünnermann
Appl. Opt. 47(13) C297-C302 (2008)

Influence of hydrogen on the properties of Al and Ga-doped ZnO films at room temperature

Meng-Chi Li, Chien-Cheng Kuo, Ssu-Hsiang Peng, Sheng-Hui Chen, and Cheng-Chung Lee
Appl. Opt. 50(9) C197-C200 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription