Laser direct writing of rotationally symmetric high-resolution structures

Abstract

We present a laser direct writing system for the efficient fabrication of high-resolution axicon structures. The setup makes use of scanning beam interference lithography incorporated with a fringe locking scheme for tight fringe phase control and allows us to fabricate large area structures with a period down to $450\mathrm{nm}$.

© 2011 Optical Society of America

Direct laser writing defects in holographic lithography-created photonic lattices

Hong-Bo Sun, Atsushi Nakamura, Koshiro Kaneko, Satoru Shoji, and Satoshi Kawata
Opt. Lett. 30(8) 881-883 (2005)

Fabrication of two-dimensional photonic crystals with controlled defects by use of multiple exposures and direct write

Lin Pang, Wataru Nakagawa, and Yeshaiahu Fainman
Appl. Opt. 42(27) 5450-5456 (2003)

Rapid fabrication of 3D terahertz split ring resonator arrays by novel single-shot direct write focused proximity field nanopatterning

Jonathan P. Singer, Jae-Hwang Lee, Steven E. Kooi, and Edwin L. Thomas
Opt. Express 20(10) 11097-11108 (2012)

High-photosensitive resin for super-resolution direct-laser-writing based on photoinhibited polymerization

Yaoyu Cao, Zongsong Gan, Baohua Jia, Richard A. Evans, and Min Gu
Opt. Express 19(20) 19486-19494 (2011)

Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing

W. X. Yu, X. -C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and V. Koudriachov
Opt. Express 10(10) 443-448 (2002)