Optical emission spectroscopy (OES) and spectroscopic temperature determination were carried out to study flames used for diamond deposition with and without an excitation by a wavelength-tunable laser. Strong emissions from and CH radicals were observed in the visible range in all the acquired OES spectra. When the flames were irradiated by using a continuous-wave (CW) laser at a wavelength of , the emission intensities of the and CH radicals in the flames increased owing to the laser excitation. The laser was also tuned to a wavelength of to precisely match the resonant frequency of the -wagging vibrational mode of the molecules. OES spectroscopy of the and CH radicals were performed at different laser powers. The rotational temperatures of CH radicals in the flames were determined by analyzing the spectra of the R branch of the electronic transition near . The deposited diamond thin-films were characterized by scanning electron microscopy, stylus profilometry, and Raman spectroscopy. The deposition mechanism with and without the laser excitation was discussed based on the OES spectral results.
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