Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Variable angle of incidence spectroscopic autocollimating ellipsometer

Not Accessible

Your library or personal account may give you access

Abstract

We present a spectroscopic, autocollimating ellipsometer capable of operating at arbitrary angles of incidence. Linearly polarized light incident on a sample is circularly polarized on reflection, ensuring that the retroreflected beam is orthogonal to the input polarization state. In order to achieve this at arbitrary angles of incidence, a Soleil–Babinet compensator (SBC) is introduced with its fast axis fixed horizontally. Nulling is achieved by varying the SBC delay and the azimuthal angle of the input linear polarization. A single calibration equation at a fixed wavelength and a knowledge of the wavelength dependence of the compensator birefringence enables the delay to be accurately calculated at any wavelength. Single- wavelength, variable angle of incidence measurements made on a thick gold film are in excellent agreement with those obtained with a traditional null ellipsometer. Spectroscopic measurements at a fixed angle of incidence of a silicon dioxide film on a silicon substrate yield thicknesses that are in excel lent agreement with independent measurements made with a null ellipsometer and a commercial instrument.

© 2010 Optical Society of America

Full Article  |  PDF Article
More Like This
Spectroscopic null ellipsometer using a variable retarder

Lionel R. Watkins and Sophie S. Shamailov
Appl. Opt. 50(1) 50-52 (2011)

Spectroscopic ellipsometer based on direct measurement of polarization ellipticity

Lionel R. Watkins
Appl. Opt. 50(18) 2973-2978 (2011)

White-light ellipsometer with geometric phase shifter

Lionel R. Watkins and Maxime Derbois
Appl. Opt. 51(21) 5060-5065 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (7)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved