Abstract

We present a diffractive phase variable attenuator for femtosecond laser radiation control. It allows the control of beam power up to 0.75·1013W/cm2 without introducing serious distortions in spectra and beam shape while it operates in zero order diffraction. The attenuator can operate with wavelengths from DUV to IR.

© 2009 Optical Society of America

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References

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  1. J. L. Speidell, D. P. Pulaski, and R. S. Patel, “Masks for laser ablation technology: new requirements and challenges,” IBM J. Res. Dev. 41, 143-150 (1997).
    [CrossRef]
  2. Variable attenuator, www.newport.com.
  3. K. Bennett and R. L. Byer, “Computer-controllable wedged-plate optical variable attenuator,” Appl. Opt. 19, 2408-2412(1980).
    [CrossRef] [PubMed]
  4. J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
    [CrossRef]
  5. http://www.gentec-eo.com/en/products/diffractive-optics.53.htm.
  6. A. G. Poleshchuk, “Diffractive light attenuators with variable transmission,” J. Mod. Opt. 45, 1513-1522 (1998).
    [CrossRef]
  7. A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.
  8. Z. Bor, “Distorsion of femtosecond laser pulses in lenses and lens systems,” J. Mod. Opt. 35, 1907-1918 (1988).
    [CrossRef]
  9. A. G. Poleshchuk, E. G. Churin, V. P. Koronkevich, V. P. Korolkov, A. A. Kharissov, V. V. Cherkashin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, and A. G. Verhoglyad, “Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure,” Appl. Opt. 38, 1295-1301 (1999).
    [CrossRef]
  10. S. A. Akhmanov, V. A. Vysloukh, and A. S. Chirkin, Optic of Femtosecond Laser Pulse (American Institute of Physics, 1992).

1999

1998

A. G. Poleshchuk, “Diffractive light attenuators with variable transmission,” J. Mod. Opt. 45, 1513-1522 (1998).
[CrossRef]

1997

J. L. Speidell, D. P. Pulaski, and R. S. Patel, “Masks for laser ablation technology: new requirements and challenges,” IBM J. Res. Dev. 41, 143-150 (1997).
[CrossRef]

1994

J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
[CrossRef]

1988

Z. Bor, “Distorsion of femtosecond laser pulses in lenses and lens systems,” J. Mod. Opt. 35, 1907-1918 (1988).
[CrossRef]

1980

Akhmanov, S. A.

S. A. Akhmanov, V. A. Vysloukh, and A. S. Chirkin, Optic of Femtosecond Laser Pulse (American Institute of Physics, 1992).

Bennett, K.

Bennoin, Ian

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

Bor, Z.

Z. Bor, “Distorsion of femtosecond laser pulses in lenses and lens systems,” J. Mod. Opt. 35, 1907-1918 (1988).
[CrossRef]

Byer, R. L.

Cherkashin, V. V.

A. G. Poleshchuk, E. G. Churin, V. P. Koronkevich, V. P. Korolkov, A. A. Kharissov, V. V. Cherkashin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, and A. G. Verhoglyad, “Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure,” Appl. Opt. 38, 1295-1301 (1999).
[CrossRef]

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

Chirkin, A. S.

S. A. Akhmanov, V. A. Vysloukh, and A. S. Chirkin, Optic of Femtosecond Laser Pulse (American Institute of Physics, 1992).

Churin, E. G.

Collischon, M.

J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
[CrossRef]

Dubov, M. V.

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

Geiger, M.

J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
[CrossRef]

Hutfless, J.

J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
[CrossRef]

Kharissov, A. A.

Kiryanov, A. V.

Kiryanov, V. P.

Kokarev, S. A.

Korolkov, V. P.

Koronkevich, V. P.

Mezentsev, V. M.

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

Nasyrov, R. K.

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

Patel, R. S.

J. L. Speidell, D. P. Pulaski, and R. S. Patel, “Masks for laser ablation technology: new requirements and challenges,” IBM J. Res. Dev. 41, 143-150 (1997).
[CrossRef]

Poleshchuk, A. G.

A. G. Poleshchuk, E. G. Churin, V. P. Koronkevich, V. P. Korolkov, A. A. Kharissov, V. V. Cherkashin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, and A. G. Verhoglyad, “Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure,” Appl. Opt. 38, 1295-1301 (1999).
[CrossRef]

A. G. Poleshchuk, “Diffractive light attenuators with variable transmission,” J. Mod. Opt. 45, 1513-1522 (1998).
[CrossRef]

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

Pulaski, D. P.

J. L. Speidell, D. P. Pulaski, and R. S. Patel, “Masks for laser ablation technology: new requirements and challenges,” IBM J. Res. Dev. 41, 143-150 (1997).
[CrossRef]

Rebhan, T.

J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
[CrossRef]

Speidell, J. L.

J. L. Speidell, D. P. Pulaski, and R. S. Patel, “Masks for laser ablation technology: new requirements and challenges,” IBM J. Res. Dev. 41, 143-150 (1997).
[CrossRef]

Verhoglyad, A. G.

Vysloukh, V. A.

S. A. Akhmanov, V. A. Vysloukh, and A. S. Chirkin, Optic of Femtosecond Laser Pulse (American Institute of Physics, 1992).

Appl. Opt.

IBM J. Res. Dev.

J. L. Speidell, D. P. Pulaski, and R. S. Patel, “Masks for laser ablation technology: new requirements and challenges,” IBM J. Res. Dev. 41, 143-150 (1997).
[CrossRef]

J. Mod. Opt.

A. G. Poleshchuk, “Diffractive light attenuators with variable transmission,” J. Mod. Opt. 45, 1513-1522 (1998).
[CrossRef]

Z. Bor, “Distorsion of femtosecond laser pulses in lenses and lens systems,” J. Mod. Opt. 35, 1907-1918 (1988).
[CrossRef]

Proc. SPIE

J. Hutfless, T. Rebhan, M. Geiger, M. Collischon, “Applications of diffractive optical elements for high power lasers,” Proc. SPIE 2246, 146-155 (1994).
[CrossRef]

Other

http://www.gentec-eo.com/en/products/diffractive-optics.53.htm.

Variable attenuator, www.newport.com.

A. G. Poleshchuk, R. K. Nasyrov, V. V. Cherkashin, M. V. Dubov, V. M. Mezentsev, and Ian Bennoin, “Diffractive attenuator for femtosecond laser radiation control,” in Diffractive Optics, EOS Topical Meeting (European Optical Society, 2007), pp. 36-37.

S. A. Akhmanov, V. A. Vysloukh, and A. S. Chirkin, Optic of Femtosecond Laser Pulse (American Institute of Physics, 1992).

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Figures (6)

Fig. 1
Fig. 1

Attenuator operating principle.

Fig. 2
Fig. 2

Diffractive grating profile.

Fig. 3
Fig. 3

Dependence of DVA zero order diffractive efficiency on duty cycle and wavelength.

Fig. 4
Fig. 4

DVA transmission error.

Fig. 5
Fig. 5

Measured spectra of fs pulse for different duty-cycles.

Fig. 6
Fig. 6

Measured DVA damage treshold.

Equations (5)

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A = A 0 [ 1 + e i φ T 2 rect ( x d x ) rect ( y d y ) comb ( x T ) comb ( y T ) ] ,
rect ( t ) = { 1 , | t | < 0.5 0 , | t | > 0.5 ,
comb ( t ) = n δ ( t n ) ,
η = | FT 0 ( A ) | 2 | A 0 | 2 = | e i φ d x d y T 2 + T 2 d x d y T 2 | 2 = Q x 2 Q y 2 + ( 1 Q x Q y ) 2 + 2 cos ( φ ) Q x Q y ( 1 Q x Q y ) .
Δ τ ( | k 2 | / τ 0 ) L ,

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