Zirconia-coated carbonyl-iron-particle-based magnetorheological fluid for polishing optical glasses and ceramics

Shai N. Shafrir; Henry J. Romanofsky; Michael Skarlinski; Mimi Wang; Chunlin Miao; Sivan Salzman; Taylor Chartier; Joni Mici; John C. Lambropoulos; Rui Shen; Hong Yang; Stephen D. Jacobs

doi:10.1364/AO.48.006797

Applied Optics
Vol. 48,
Issue 35,
pp. 6797-6810
(2009)
•https://doi.org/10.1364/AO.48.006797

Zirconia-coated carbonyl-iron-particle-based magnetorheological fluid for polishing optical glasses and ceramics

Shai N. Shafrir, Henry J. Romanofsky, Michael Skarlinski, Mimi Wang, Chunlin Miao, Sivan Salzman, Taylor Chartier, Joni Mici, John C. Lambropoulos, Rui Shen, Hong Yang, and Stephen D. Jacobs

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Shai N. Shafrir, Henry J. Romanofsky, Michael Skarlinski, Mimi Wang, Chunlin Miao, Sivan Salzman, Taylor Chartier, Joni Mici, John C. Lambropoulos, Rui Shen, Hong Yang, and Stephen D. Jacobs, "Zirconia-coated carbonyl-iron-particle-based magnetorheological fluid for polishing optical glasses and ceramics," Appl. Opt. 48, 6797-6810 (2009)

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Abstract

We report on magnetorheological finishing (MRF) spotting experiments performed on glasses and ceramics using a zirconia-coated carbonyl-iron (CI)-particle-based magnetorheological (MR) fluid. The zirconia-coated magnetic CI particles were prepared via sol-gel synthesis in kilogram quantities. The coating layer was $\sim 50 - 100 nm$ thick, faceted in surface structure, and well adhered. Coated particles showed long-term stability against aqueous corrosion. “Free” nanocrystalline zirconia polishing abrasives were cogenerated in the coating process, resulting in an abrasive-charged powder for MRF. A viable MR fluid was prepared simply by adding water. Spot polishing tests were performed on a variety of optical glasses and ceramics over a period of nearly three weeks with no signs of MR fluid degradation or corrosion. Stable material removal rates and smooth surfaces inside spots were obtained.

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Component	Density ( $g / {cm}^{3}$ )	Mass (g)	Vol. (mL)	Vol. %	Mass %
$Zr O_{2}$ coated CI	6.7	2345	350	35	78
DI water	1	650	650	65	22
Total		2995	1000	100	100

Mat. ID	Source	Dimensions, $Ø \times h$ (mm)	ρ ( $g / {cm}^{3}$ )	Tg ( $° C$ )	E (GPa)	Poisson’s Ratio v	Vickers Hardness at $200 gf$ (GPa)^b	Fracture Toughness $K_{c}$ (MPa $m^{1 / 2}$ )^b	Initial Areal rms (nm)^c	Initial Line rms (nm)^d
S-FPL 53	OHARA (FCD 100 HOYA Equiv.)	$47.3 \times 7.7$	3.63	436	69.4	0.302	3.75	0.52	$1.13 \pm 0.03$	$0.28 \pm 0.02$
KzFS N4	SCHOTT	$48.9 \times 7.8$	3.2	492	60	0.29	3.8		$1.26 \pm 0.04$	$0.29 \pm 0.02$
LHG 8	HOYA	$38.8 \times 11.1$	2.83	485	62	0.26	4.01	0.5	$0.89 \pm 0.08$	$0.22 \pm 0.02$
S-PHM 52	OHARA (PCD 4 HOYA Equiv.)	$50.3 \times 9.3$	3.67	587	71.5	0.292	4.4	0.49	$0.80 \pm 0.05$	$0.20 \pm 0.01$
PBM 2Y	OHARA	$50.2 \times 7.7$	3.61	436	57.1	0.223	4.6	0.66	$2.12 \pm 0.44$	$0.48 \pm 0.07$
S-NPH 2	OHARA	$50.3 \times 7.8$	3.58	650	99.1	0.249	5.1	0.58	$2.19 \pm 0.15$	$0.37 \pm 0.10$
S-FSL 5	OHARA (FK 5 SCHOTT Equiv./FC 5 HOYA Equiv.)	$50.3 \times 9.5$	2.46	500	62.3	0.227	5	0.63	$4.11 \pm 1.50$	$0.74 \pm 0.90$
S-LAL 10	OHARA (LaK 10 SCHOTT Equiv./LaC 10 HOYA Equiv.)	$50.2 \times 7.8$	3.98	674	103.9	0.288	5.5	0.8	$0.74 \pm 0.04$	$0.18 \pm 0.01$
S-NBM 51	OHARA	$50.3 \times 7.9$	2.93	554	81.7	0.243	6.25	0.84	$1.13 \pm 0.07$	$0.25 \pm 0.02$
S-TIH 6	OHARA (SF L6 SCHOTT Equiv./FD 60 HOYA Equiv.)	$50.2 \times 7.8$	3.37	604	93.1	0.261	6.3	0.63	$1.53 \pm 0.22$	$0.31 \pm 0.40$
S-BAL 35	OHARA (SK five SCHOTT Equiv./BaCD five HOYA Equiv.)	$49.9 \times 7.9$	3.31	669	83.2	0.25	6.7	0.86	$1.14 \pm 0.06$	$0.25 \pm 0.03$
S-BSL 7	OHARA (BK 7 SCHOTT Equiv./BSC 7 HOYA Equiv.)	$60.1 \times 11.8 (50.2 \times 7.9)$	2.52	576	80	0.205	6.9	0.86	$0.79 \pm 0.01$	$0.21 \pm 0.01$
S-LAH 64	OHARA (LaF N 21 SCHOTT Equiv./TaF 4 HOYA Equiv.)	$50.3 \times 9.6$	4.3	685	122.4	0.294	8.5	1.08	$0.68 \pm 0.06$	$0.44 \pm 0.02$
BK 7	SCHOTT	$39.9 \times 19.6$	2.51	559	81	0.208	8.58	0.8	$1.05 \pm 0.04$	$0.25 \pm 0.01$
FS	CORNING	$50.0 \times 9.6$	2.201	1090	72.7	0.16	9.45	0.7	$0.74 \pm 0.02$	$0.21 \pm 0.00$
TAFD 5	HOYA	$52.2 \times 11.1$	4.92	670	125.9	0.3	11.27	1.54	$0.62 \pm 0.08$	$0.15 \pm 0.00$

Mat. ID	Source	Dimensions	ρ ( $g / {cm}^{3}$ )	Grain Size ( $μm$ )	E (GPa)	Poisson’s Ratio v	Vickers Hardness at $500 gf$ (GPa)	Fracture Toughness $K_{c}$ (MPa $m^{1 / 2}$ )	Areal rms (nm)	Line rms (nm)
CVD ZnS^f	NA	$40.4 \times 6.5$	4.09	$\sim 3.8$	96.5	0.41	3.47	0.8	$1.22 \pm 0.12$	$0.26 \pm 0.03$
Spinel	TA & Optical Ceramics Div.	$35.1 \times 2.1$	3.58	$100 - 200$	273	0.26	13.63	2.07	$1.78 \pm 0.67$	$0.22 \pm 0.03$
ALON	SURMET	$46.1 \times 10$	3.681^e	$150 - 250$ ^e	334	0.24	15.77^e	2.837^e	$2.83 \pm 0.48$	$0.39 \pm 0.06$
PCA^g	CERANOVA	$38.0 \times 2.1$	3.99^e	$\sim 0.3$ ^e	400	-	21.84^e	3.3^e	$2.90 \pm 0.10$	$0.65 \pm 0.05$
CVC SiC^h	Trex	$39.7 \times 40.8 \times 12.7$	$\sim 3.2$	$5 - 15$	456	0.21	27.9585	3.39	$2.88 \pm 0.13$	$0.49 \pm 0.04$

	Material ID	Fluid pH	Viscosity (cP)	MRR ( $μm$ /min)	Areal rms (nm)	Line rms (nm)	No. of Spots
Day 1	S-BSL 7	7.3	97	1.95	$1.06 \pm 0.10$	$0.25 \pm 0.02$	1
	S-BSL 7	7.3	87	1.845	$1.17 \pm 0.12$	$0.25 \pm 0.01$	1
	S-BSL 7	7.2	72	$1.59 \pm 0.04$	$1.15 \pm 0.09$	$0.26 \pm 0.03$	4
	FS	7.2	72	$0.73 \pm 0.03$	$0.97 \pm 0.08$	$0.25 \pm 0.01$	2
Day 2	S-BSL 7	7.2	53	$1.62 \pm 0.05$	$1.40 \pm 0.37$	$0.26 \pm 0.02$	4
Day 2	FS	7.2	53	0.765	$0.90 \pm 0.06$	$0.23 \pm 0.01$	1
Day 3	BSL7	8.3	51	$2.06 \pm 0.04$	$2.21 \pm 1.38$	$0.37 \pm 0.29$	2
Day 4	BSL7	8.4	51	$2.06 \pm 0.11$	$1.71 \pm 0.86$	$0.28 \pm 0.03$	2
Day 9	S-BSL7	8.3	51	1.965	$1.35 \pm 0.22$	$0.25 \pm 0.02$	1
	BK 7		51	2.22	$1.95 \pm 0.52$	$0.27 \pm 0.03$	1
	BK 7		70	2.835	$2.54 \pm 0.58$	$0.77 \pm 0.50$	1
	FS		70	1.365	$1.47 \pm 0.17$	$0.35 \pm 0.02$	1
Day 10 ^b	S-BSL7	8.4	51	2.1	$1.67 \pm 0.94$	$0.37 \pm 0.23$	1
	BK 7		51	2.445	$1.11 \pm 0.09$	$0.25 \pm 0.02$	1
	S-BSL7		70	2.61	$1.23 \pm 0.31$	$0.23 \pm 0.01$	1
	BK 7		70	$2.88 \pm 0.17$	MISSING	MISSING	2
	FS		70	1.275	$1.04 \pm 0.14$	$0.30 \pm 0.06$	1
Day 11	S-BSL7		70	$2.89 \pm 0.16$	$1.11 \pm 0.06$	$0.42 \pm 0.35$	2
	S-BK7		70	2.96	$1.40 \pm 0.24$	$0.24 \pm 0.01$	1
	FS		70	1.47	$1.06 \pm 0.11$	$0.25 \pm 0.03$	1
Day 16	S-BSL7	8.3	70	3.20	$1.30 \pm 0.21$	$0.25 \pm 0.01$	1
Day 16	S-BSL7		90	3.96	$1.11 \pm 0.04$	$0.26 \pm 0.02$	1
Day 17 ^c	S-BSL7	8.3	90	$4.10 \pm 0.10$	$1.21 \pm 0.22$	$0.26 \pm 0.03$	5
Day 17 ^c	FS		90	$1.92 \pm 0.06$	$1.07 \pm 0.21$	$0.24 \pm 0.02$	5
Day 18	S-BSL7	8.2	90	3.75	$1.04 \pm 0.07$	$0.24 \pm 0.01$	1
	FS		90	1.95	$0.88 \pm 0.04$	$0.24 \pm 0.02$	1
	S-BSL7		70	3.36	$1.09 \pm 0.13$	$0.24 \pm 0.01$	1
	FS		70	1.68	$0.86 \pm 0.04$	$0.23 \pm 0.03$	1
	S-BSL7		50	2.72	$1.08 \pm 0.26$	$0.22 \pm 0.00$	1
	FS		50	1.28	$0.88 \pm 0.04$	$0.24 \pm 0.01$	1

	Day 1—Viscosity $\sim 72 cP$ , $pH \sim 7.3$				Day 2—Viscosity $\sim 53 cP$ , $pH \sim 7.4$
Material ID	MRR ( $μm$ /min)	Areal rms (nm)	Line rms (nm)	# of Spots	MRR ( $μm$ /min)	Areal rms (nm)	Line rms (nm)	# of Spots
S-FPL 53	12.84	$1.87 \pm 0.53$	$0.26 \pm 0.01$	1	$13.44 \pm 1.19$	$1.70 \pm 0.48$	$0.27 \pm 0.00$	2
KzFS N4	6.24	$1.86 \pm 0.08$	$0.36 \pm 0.07$	1	5.73	$1.73 \pm 0.24$	$0.29 \pm 0.02$	1
LHG8	3.012	$1.69 \pm 0.34$	$0.21 \pm 0.05$	1	3.9	$1.21 \pm 0.40$	$0.21 \pm 0.02$	1
S-PHM 52	7.68	$1.14 \pm 0.06$	$0.20 \pm 0.01$	1	6.48	$1.06 \pm 0.21$	$0.20 \pm 0.01$	1
PBM 2Y	2.976	$1.94 \pm 0.22$	$0.33 \pm 0.04$	1	2.85	$2.43 \pm 1.23$	$0.32 \pm 0.03$	1
S-FSL 5	2.112	$1.18 \pm 0.07$	$0.26 \pm 0.02$	1	1.92	$1.36 \pm 0.40$	$0.27 \pm 0.02$	1
S-NPH 2	7.68	$1.71 \pm 0.06$	$0.25 \pm 0.01$	1	6.87	$2.95 \pm 1.00$	$0.33 \pm 0.04$	1
S-LAL10	4.272	$1.98 \pm 0.14$	$0.37 \pm 0.06$	1	3.795	$1.33 \pm 0.08$	$0.33 \pm 0.08$	1
S-NBM 51	2.82	$1.63 \pm 0.12$	$0.29 \pm 0.02$	1	2.715	$1.33 \pm 0.08$	$0.26 \pm 0.02$	1
S-TiH 6	3.276	$1.77 \pm 0.12$	$0.32 \pm 0.03$	1	3.27	$1.60 \pm 0.06$	$0.32 \pm 0.05$	1
BAL 35	3.072	$1.45 \pm 0.13$	$0.31 \pm 0.04$	1	3.015	$1.26 \pm 0.23$	$0.26 \pm 0.04$	1
S-LAH 64	3.024	$1.36 \pm 0.18$	$0.26 \pm 0.04$	1	2.715	$0.99 \pm 0.04$	$0.20 \pm 0.03$	1
TAFD5	2.832	$1.58 \pm 0.07$	$0.29 \pm 0.06$	1	2.52	$0.92 \pm 0.10$	$0.19 \pm 0.01$	1

	Material ID	Fluid pH	Viscosity (cP)	MRR ( $μm$ /min)	Areal rms (nm)	Line rms (nm)	No. of Spots
Day 11	ZnS	8.4	70	$0.10 \pm 0.01$	$4.50 \pm 0.38$	$3.55 \pm 1.09$	2
	Spinel			$0.02 \pm 0.00$	$56.74 \pm 20.89$	$5.18 \pm 2.97$	2
	ALON			$0.03 \pm 0.00$	$19.05 \pm 4.29$	$2.56 \pm 0.52$	2
Day 17 ^b	Spinel	8.3	90	$0.65 \pm 0.21$	$105.27 \pm 19.08$	$5.36 \pm 3.14$	4
Day 17 ^b	ALON			$0.62 \pm 0.09$	$488.3 \pm 189.8$	$20.34 \pm 13.14$	2
Day 18	Spinel	8.2	90	0.62	$18.68 \pm 4.19$	$1.11 \pm 0.41$	1
	ALON			$0.71 \pm 0.03$	$16.09 \pm 3.11$	$1.31 \pm 0.39$	2
	PCA			0.25	$3.87 \pm 0.08$	$0.95 \pm 0.07$	1
	CVC SiC			0.12	$12.94 \pm 1.55$	$2.22 \pm 0.34$	1
	Spinel	8.2	70	0.68	$26.44 \pm 9.44$	$1.84 \pm 0.86$	1
	ALON			0.56	$28.96 \pm 9.28$	$2.29 \pm 0.58$	1
	PCA			0.21	$5.08 \pm 0.11$	$1.18 \pm 0.19$	1
	CVC SiC			0.09	$13.70 \pm 0.53$	$2.19 \pm 0.46$	1
	Spinel	8.2	50	0.39	$20.32 \pm 4.58$	$1.50 \pm 0.86$	1
	ALON			0.45	$22.80 \pm 2.96$	$1.84 \pm 0.63$	1
	PCA			0.14	$5.04 \pm 0.18$	$0.98 \pm 0.09$	1
	CVC SiC			0.06	$11.96 \pm 0.70$	$1.93 \pm 0.47$	1

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Tables (6)

Applied Optics