Abstract

Soft-x-ray Bragg reflection from two Ru/B4C multilayers with 10 and 63 periods was used for inde pendent determination of both real and imaginary parts of the refractive index n=1δ+iβ close to the boron K edge (188eV). Prior to soft x-ray measurements, the structural parameters of the multilayers were determined by x-ray reflectometry using hard x rays. For the 63-period sample, the optical properties based on the predictions made for elemental boron major deviations were found close to the K edge of boron for the 10-period sample explained by chemical bonding of boron to B4C and various boron oxides.

© 2009 Optical Society of America

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