Abstract

Straight and S-bend rib waveguide structures with a novel design have been fabricated and characterized on a silicon-on-insulator (SOI) platform. For a typical straight rib waveguide, the single-mode waveguide at λ1550nm has been verified by measuring the near-field output with an IR camera, and a nearly polarization-independent mode size is found to be 10μm×4.5μm. The waveguide loss has been estimated from low-finesse Fabry–Perot transmission characteristics, and a typical value of 0.5dB/cm is obtained. It is also shown experimentally that the bending radius of an asymmetrically etched S-bend waveguide can be ten times smaller than that of conventional symmetrically etched S-bend waveguides for similar optical losses. These bend waveguides (bending radii of 1500μm) are found to be low loss (<2.5dB) and nearly polarization independent.

© 2009 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. G. Rickman, G. T. Reed and F. Namarvar, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol. 12, 1771-1776 (1994).
    [CrossRef]
  2. R. A. Soref, “Silicon-based optoelectronics,” Proc. IEEE 81, 1687-1706 (1993).
    [CrossRef]
  3. C. A. Barrios, V. R. Almeida, R. Panepucci and M. Lipson, “Electrooptic modulation of silicon-on-insulator submicrometer-size waveguide devices,” J. Lightwave Technol. 21, 2332-2339 (2003).
    [CrossRef]
  4. Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
    [CrossRef]
  5. B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
    [CrossRef]
  6. K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
    [CrossRef]
  7. O. Boyraz and B. Jalai, “Demonstration of a silicon Raman laser,” Opt. Express 12, 5269-5273 (2004).
    [CrossRef] [PubMed]
  8. T. Yin, R. Cohen, M. M. Morse, G. Sarid, Y. Chetrit, D. Rubin, and M. J. Paniccia, “31 GHz Ge n-i-p waveguide photodetectors on silicon-on-insulator substrate,” Opt. Express 15, 13965-13971 (2007).
    [CrossRef] [PubMed]
  9. S. P. Poggosian, L. Vescan, and A. Vonsovici, “The single mode condition for semiconductor rib waveguide with large cross section,” J. Lightwave Technol. 16, 1851-1853(1998).
    [CrossRef]
  10. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
    [CrossRef]
  11. P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Integrated optical directional couplers in silicon-on-insulator,” Electron. Lett. 31, 2097-2098 (1995).
    [CrossRef]
  12. A. G. Rickman and G. T. Reed, “Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctions,” IEE Proc. Optoelectron. 141, 391-393(1994).
    [CrossRef]
  13. D. Dai and S. He, “Analysis of characteristics of bent waveguide,” J. Opt. Soc. Am. A 21, 113-121 (2004).
    [CrossRef]
  14. G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
    [CrossRef]
  15. B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
    [CrossRef]
  16. R. K. Navalakhe, N. Dasgupta, and B. K. Das, “Design of low-loss compact 90° bend optical waveguide for photonic circuit applications in SOI platform,” in Proceedings of the Third International Conference on Industrial and Information Systems (IEEE, 2008).
  17. G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
    [CrossRef]
  18. H. Deng, D. O. Yevick, C. Brooks, and P. E. Jessop, “Design rules for slanted angle polarization rotators,” J. Lightwave Technol. 23, 432-445 (2005).
    [CrossRef]

2007

2006

B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
[CrossRef]

2005

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

H. Deng, D. O. Yevick, C. Brooks, and P. E. Jessop, “Design rules for slanted angle polarization rotators,” J. Lightwave Technol. 23, 432-445 (2005).
[CrossRef]

2004

D. Dai and S. He, “Analysis of characteristics of bent waveguide,” J. Opt. Soc. Am. A 21, 113-121 (2004).
[CrossRef]

O. Boyraz and B. Jalai, “Demonstration of a silicon Raman laser,” Opt. Express 12, 5269-5273 (2004).
[CrossRef] [PubMed]

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

2003

1998

1995

P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Integrated optical directional couplers in silicon-on-insulator,” Electron. Lett. 31, 2097-2098 (1995).
[CrossRef]

1994

A. G. Rickman and G. T. Reed, “Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctions,” IEE Proc. Optoelectron. 141, 391-393(1994).
[CrossRef]

A. G. Rickman, G. T. Reed and F. Namarvar, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol. 12, 1771-1776 (1994).
[CrossRef]

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

1993

R. A. Soref, “Silicon-based optoelectronics,” Proc. IEEE 81, 1687-1706 (1993).
[CrossRef]

Wang, W.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Almeida, V. R.

Baets, R.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Barrios, C. A.

Beckx, S.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bienstman, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Bogaerts, W.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Boyraz, O.

Brooks, C.

Cao, G. B.

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

Chen, R. T.

B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
[CrossRef]

Chen, Y.

B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
[CrossRef]

Cheng, B. W.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Chetrit, Y.

Cohen, R.

Dai, D.

Dai, L. J.

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

Das, B. K.

R. K. Navalakhe, N. Dasgupta, and B. K. Das, “Design of low-loss compact 90° bend optical waveguide for photonic circuit applications in SOI platform,” in Proceedings of the Third International Conference on Industrial and Information Systems (IEEE, 2008).

Dasgupta, N.

R. K. Navalakhe, N. Dasgupta, and B. K. Das, “Design of low-loss compact 90° bend optical waveguide for photonic circuit applications in SOI platform,” in Proceedings of the Third International Conference on Industrial and Information Systems (IEEE, 2008).

Deng, H.

Dumon, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

He, S.

Howley, B.

B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
[CrossRef]

Jalai, B.

Jalali, B.

P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Integrated optical directional couplers in silicon-on-insulator,” Electron. Lett. 31, 2097-2098 (1995).
[CrossRef]

Jessop, P. E.

Jia, K.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Jiang, X.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Jiang, Y. J.

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

Knights, A. P.

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
[CrossRef]

Li, G. Z.

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

Lipson, M.

Liu, B.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Liu, E. K.

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

Liu, Y. L.

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

Luo, J. S.

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

Luo, L. P.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Luyssaert, B.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Mao, R. W.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Morse, M. M.

Namarvar, F.

A. G. Rickman, G. T. Reed and F. Namarvar, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol. 12, 1771-1776 (1994).
[CrossRef]

Navalakhe, R. K.

R. K. Navalakhe, N. Dasgupta, and B. K. Das, “Design of low-loss compact 90° bend optical waveguide for photonic circuit applications in SOI platform,” in Proceedings of the Third International Conference on Industrial and Information Systems (IEEE, 2008).

Panepucci, R.

Paniccia, M. J.

Poggosian, S. P.

Reed, G. T.

A. G. Rickman and G. T. Reed, “Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctions,” IEE Proc. Optoelectron. 141, 391-393(1994).
[CrossRef]

A. G. Rickman, G. T. Reed and F. Namarvar, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol. 12, 1771-1776 (1994).
[CrossRef]

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
[CrossRef]

Rickman, A. G.

A. G. Rickman, G. T. Reed and F. Namarvar, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol. 12, 1771-1776 (1994).
[CrossRef]

A. G. Rickman and G. T. Reed, “Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctions,” IEE Proc. Optoelectron. 141, 391-393(1994).
[CrossRef]

Rubin, D.

Sarid, G.

Shi, W. H.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Soref, R. A.

R. A. Soref, “Silicon-based optoelectronics,” Proc. IEEE 81, 1687-1706 (1993).
[CrossRef]

Taillaert, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Tang, Y.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Trinh, P. D.

P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Integrated optical directional couplers in silicon-on-insulator,” Electron. Lett. 31, 2097-2098 (1995).
[CrossRef]

Van Campenhout, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Van Thourhout, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Vescan, L.

Vonsovici, A.

Wang, M.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Wang, Q. M.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Wang, X.

B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
[CrossRef]

Wang, Y.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Wiaux, V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Wouters, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

Wu, Y.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Yang, H.

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

Yang, J.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Yang, Y.

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

Yegnanarayanan, S.

P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Integrated optical directional couplers in silicon-on-insulator,” Electron. Lett. 31, 2097-2098 (1995).
[CrossRef]

Yevick, D. O.

Yin, T.

Yu, J. Z.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Zhang, F.

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

Zhang, S. L.

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

Zhao, L.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Zuo, Y. H.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Electron. Lett.

Y. L. Liu, E. K. Liu, S. L. Zhang, G. Z. Li, and J. S. Luo, “Silicon 1×2 digital optical switch using plasma dispersion,” Electron. Lett. 30, 130-131 (1994).
[CrossRef]

P. D. Trinh, S. Yegnanarayanan, and B. Jalali, “Integrated optical directional couplers in silicon-on-insulator,” Electron. Lett. 31, 2097-2098 (1995).
[CrossRef]

IEE Proc. Optoelectron.

A. G. Rickman and G. T. Reed, “Silicon-on-insulator optical rib waveguides: loss, mode characteristics, bends and y-junctions,” IEE Proc. Optoelectron. 141, 391-393(1994).
[CrossRef]

IEEE Photon. Technol. Lett.

G. B. Cao, L. J. Dai, Y. J. Jiang, H. Yang and F. Zhang, “Compact integrated star coupler on silicon-on-insulator,” IEEE Photon. Technol. Lett. 17, 2616-2618 (2005).
[CrossRef]

K. Jia, W. Wang, Y. Tang, Y. Yang, J. Yang, X. Jiang, Y. Wu, M. Wang, and Y. Wang, “Silicon-on-insulator-based optical demultiplexer employing turning-mirror -integrated arrayed-waveguide grating,” IEEE Photon. Technol. Lett. 17, 378-380(2005).
[CrossRef]

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, “Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography,” IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
[CrossRef]

J. Appl. Phys.

B. Howley, X. Wang, R. T. Chen, and Y. Chen, “Experimental evaluation of curved polymer waveguides with air trenches and offsets,” J. Appl. Phys. 100, 023114 (2006).
[CrossRef]

J. Lightwave Technol.

J. Opt. Soc. Am. A

Opt. Commun.

B. Liu, Y. H. Zuo, B. W. Cheng, R. W. Mao, L. Zhao, W. H. Shi, L. P. Luo, J. Z. Yu, and Q. M. Wang, “Thermally tunable optical filter with crystalline silicon cavity,” Opt. Commun. 244, 167-170 (2005).
[CrossRef]

Opt. Express

Proc. IEEE

R. A. Soref, “Silicon-based optoelectronics,” Proc. IEEE 81, 1687-1706 (1993).
[CrossRef]

Other

R. K. Navalakhe, N. Dasgupta, and B. K. Das, “Design of low-loss compact 90° bend optical waveguide for photonic circuit applications in SOI platform,” in Proceedings of the Third International Conference on Industrial and Information Systems (IEEE, 2008).

G. T. Reed and A. P. Knights, Silicon Photonics: an Introduction (Wiley, 2004).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (10)

Fig. 1
Fig. 1

Cross section of a conventional SOI LCRW structure.

Fig. 2
Fig. 2

Top view of an S-bend structure with an L-shaped cross section in the bend regions. A, B, and C are transition points between the cross sections.

Fig. 3
Fig. 3

Total transition loss (TE polarization) as a function of bending radius for the structure proposed by Cao et al. [14] and our proposed structure.

Fig. 4
Fig. 4

SEM pictures of different samples showing sidewalls prepared by RIE with the different combinations tabulated in Table 1: (a) sample 1, (b) sample 2, (c) sample 3, (d) sample 4, (e) sample 1 after oxidation, and (f) rib waveguide fabricated by optimization (see text for details).

Fig. 5
Fig. 5

Processing steps for fabrication of the asymmetrically etched rib waveguide structure (without an outer slab region).

Fig. 6
Fig. 6

SEM image of a fabricated asymmetrically etched S-bend optical waveguide. The Si device layer is completely removed in the dark regions.

Fig. 7
Fig. 7

Waveguide characterization setup: PC, polarization controller; FC, fiber connector; L. focusing and collimating lens; DUT, device under test; PD, photodetector.

Fig. 8
Fig. 8

Guided mode profiles for three different waveguide widths (W = 2.5, 5.5, and 9.0 µm; H = 5 μm ; h = 4 μm ) obtained by measuring the transmitted near-field image with an IR CCD camera (TE polarization, λ 1550 nm ).

Fig. 9
Fig. 9

Waveguide loss at λ 1550 nm of straight rib waveguides before and after oxidation (a) TE polarized and (b) TM polarized.

Fig. 10
Fig. 10

Experimental bending loss results for an S-bend waveguide at λ 1550 nm : (a)  h = 3 μm and (b)  h = 3.75 μm .

Tables (1)

Tables Icon

Table 1 Parameters Used for RIE Optimization

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

W H 0.3 + r 1 r 2 , r = h H 0.5 ,

Metrics