Abstract

Error compensation in optical monitoring was demonstrated many years ago for narrow bandpass and edge filters. It is shown here that the compensation effects can apply to a broader range of more general coatings. This is illustrated with a very broadband antireflection coating design of 20 layers and a ramp design of 13 layers. The choice of monitoring wavelength and monitoring strategy are important, and suggestions are made concerning those choices. The results are derived from and demonstrated by computer simulations of the monitoring processes. The importance of monitoring directly on only one part and with one wavelength throughout the process in order to obtain the benefits of error compensation is emphasized.

© 2009 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (19)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription