Abstract

Linear laser encoders have been widely used for precision positioning control of a linear stage. We develop a five-degrees-of-freedom (5-DOF) laser linear encoder to simultaneously measure the position, straightness, pitch, roll, and yaw errors along one moving axis. This study integrates the circular polarized interferometric technique with the three-dimensional diffracted ray-tracing method to develop a novel laser encoder with 5-DOF. The phases encoded within the +1 and −1 order diffraction lights reflected from the diffraction grating are decoded by the circular polarized interferometric technique to measure the linear displacement when the diffraction grating moves. The three-dimensional diffracted ray tracing of the +1- and −1-order diffraction lights induced by the motion errors of the moved grating were analyzed to calculate the other motion errors based on the detection of light spots on two quadrant photodiode detectors. The period of the grating is 0.83 μm and the experimental results show that the measurement accuracy was better than ±0.3 μm/±41 μm for straightness, ±1 arc sec⁡/±215 arc sec for angular error components, and ±160 nm/2 mm for linear displacement.

© 2009 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  15. J. A. Terrence, Applied Numerical Methods for Engineers (Wiley, 1993).
  16. R. M. Murray, Z. Li, and S. S. Sastry, A Mathematical Introduction to Robotic Manipulation (CRC Press, 2000).

2008 (1)

L. M. Sanchez-Brea and T. Morlanes “Metrological errors in optical encoders,” Meas. Sci. Technol. 19, 115104(2008).
[CrossRef]

2007 (1)

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

2005 (1)

2004 (1)

2000 (2)

D. Crespo, J. Alonso, and E. Bernabeu, “Reflection optical encoders as three-grating moiré systems,” Appl. Opt. 39, 3805-3813 (2000).
[CrossRef]

D. Crespo, T. Morlanes, and E. Bernabeu, “Optical encoder based on the Lau effect,” Opt. Eng. 39, 817-824 (2000).
[CrossRef]

1995 (2)

J.-D. Lin and H. B. Kuo, “Development of a new optical scale system by the diffractive phase interference method,” Meas. Sci. Technol. 6, 293-296 (1995).
[CrossRef]

V. Greco, G. Molesini, and F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729-3734 (1995).
[CrossRef]

1981 (1)

Alonso, J.

Bernabeu, E.

D. Crespo, J. Alonso, and E. Bernabeu, “Reflection optical encoders as three-grating moiré systems,” Appl. Opt. 39, 3805-3813 (2000).
[CrossRef]

D. Crespo, T. Morlanes, and E. Bernabeu, “Optical encoder based on the Lau effect,” Opt. Eng. 39, 817-824 (2000).
[CrossRef]

Chang, Y. C.

Chen, J. Y.

Chen, S. J.

Crespo, D.

D. Crespo, J. Alonso, and E. Bernabeu, “Reflection optical encoders as three-grating moiré systems,” Appl. Opt. 39, 3805-3813 (2000).
[CrossRef]

D. Crespo, T. Morlanes, and E. Bernabeu, “Optical encoder based on the Lau effect,” Opt. Eng. 39, 817-824 (2000).
[CrossRef]

Fang, T. H.

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

Gonda, S.

Greco, V.

V. Greco, G. Molesini, and F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729-3734 (1995).
[CrossRef]

Heydemann, P. L. M.

Huang, H. L.

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

Huang, Q.

Jywe, W. Y.

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

Keem, T.

Kuo, H. B.

J.-D. Lin and H. B. Kuo, “Development of a new optical scale system by the diffractive phase interference method,” Meas. Sci. Technol. 6, 293-296 (1995).
[CrossRef]

Kurosawa, T.

Lee, C. K.

Li, Z.

R. M. Murray, Z. Li, and S. S. Sastry, A Mathematical Introduction to Robotic Manipulation (CRC Press, 2000).

Lin, J.-D.

J.-D. Lin and H. B. Kuo, “Development of a new optical scale system by the diffractive phase interference method,” Meas. Sci. Technol. 6, 293-296 (1995).
[CrossRef]

Liu, C. H.

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

Misumi, I.

Molesini, G.

V. Greco, G. Molesini, and F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729-3734 (1995).
[CrossRef]

Morlanes, T.

L. M. Sanchez-Brea and T. Morlanes “Metrological errors in optical encoders,” Meas. Sci. Technol. 19, 115104(2008).
[CrossRef]

D. Crespo, T. Morlanes, and E. Bernabeu, “Optical encoder based on the Lau effect,” Opt. Eng. 39, 817-824 (2000).
[CrossRef]

Murray, R. M.

R. M. Murray, Z. Li, and S. S. Sastry, A Mathematical Introduction to Robotic Manipulation (CRC Press, 2000).

Quercioli, F.

V. Greco, G. Molesini, and F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729-3734 (1995).
[CrossRef]

Sanchez-Brea, L. M.

L. M. Sanchez-Brea and T. Morlanes “Metrological errors in optical encoders,” Meas. Sci. Technol. 19, 115104(2008).
[CrossRef]

Sastry, S. S.

R. M. Murray, Z. Li, and S. S. Sastry, A Mathematical Introduction to Robotic Manipulation (CRC Press, 2000).

Terrence, J. A.

J. A. Terrence, Applied Numerical Methods for Engineers (Wiley, 1993).

Wang, M. S.

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

Wang, Y. F.

Wu, C. C.

Wu, J. W. J.

Yu, L. B.

Appl. Opt. (4)

Meas. Sci. Technol. (2)

J.-D. Lin and H. B. Kuo, “Development of a new optical scale system by the diffractive phase interference method,” Meas. Sci. Technol. 6, 293-296 (1995).
[CrossRef]

L. M. Sanchez-Brea and T. Morlanes “Metrological errors in optical encoders,” Meas. Sci. Technol. 19, 115104(2008).
[CrossRef]

Opt. Eng. (1)

D. Crespo, T. Morlanes, and E. Bernabeu, “Optical encoder based on the Lau effect,” Opt. Eng. 39, 817-824 (2000).
[CrossRef]

Rev. Sci. Instrum. (2)

H. L. Huang, C. H. Liu, W. Y. Jywe, M. S. Wang, and T. H. Fang, “Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage,” Rev. Sci. Instrum. 78, 066103 (2007).
[CrossRef]

V. Greco, G. Molesini, and F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729-3734 (1995).
[CrossRef]

Other (7)

J. A. Terrence, Applied Numerical Methods for Engineers (Wiley, 1993).

R. M. Murray, Z. Li, and S. S. Sastry, A Mathematical Introduction to Robotic Manipulation (CRC Press, 2000).

Hewlett Packard Co., “Optics and laser heads for laser interferometer positioning systems,” product overview (2000).

Catalog, SIOS Messtechnik Gmbh (2003).

http://www.renishaw.com.

Catalog, Heidenhain, http://www.heidenhain.com/main.html.

http://www.sonysms.com.

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