Abstract

We report on the effect of organic molecular contamination on single shot laser induced damage density at the wavelength of 351nm, with a 3ns pulse length. Specific contamination experiments were made with dioctylphthalate (DOP) in liquid or gaseous phase, on the surface of fused silica polished samples, bare or solgel coated. Systematic laser induced damage was observed only in the case of liquid phase contamination. Different chemical and morphological characterization methods were used to identify and understand the damage process. We demonstrate that the contaminant morphology, rather than its physicochemical nature, can be responsible for the decrease of laser induced damage threshold of optics.

© 2009 Optical Society of America

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  4. H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
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2008

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

2007

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

C. Y. Sheng, “Effect of laser-induced damage on optical windows in the presence of adhesives under simulated thermal-vacuum conditions,” Proc. SPIE 6403, 1-12 (2007).

2006

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

2004

K. Awazu, “Ablation and compaction of amorphous SiO2 irradiated with ArF excimer laser,” J. Non-Cryst. Solids 337, 241-253 (2004).
[CrossRef]

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

C. Scurlock, “A phenomenological study of contamination enhanced laser induced damage in sealed lasers,” Proc. SPIE 5647, 86-91 (2004).
[CrossRef]

2003

A. E. Duisterwinkel and A. T. G. M. Bastein, “Feasibility of UV cleaning of 157 nm reticles,” Microelectron. Eng. 67-68, 3-9 (2003).
[CrossRef]

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

L. Bruel, “Environmental effects on optical component aging,” Proc. SPIE 4932, 158-169 (2003).
[CrossRef]

2002

R. Chow, R. Bickel, and J. Ertel, “Cleanliness validation of NIF small optics,” Proc. SPIE 4774, 19-24 (2002).
[CrossRef]

2001

D. M. Price, “Vapor pressure determination by thermogravimetry,” Thermochim. Acta 367-368, 253-262 (2001).
[CrossRef]

2000

R. R. Kunz and V. Libermann, “Experimentation and modelling of organic photocontamination on lithographic optics,” J. Vac. Sci. Technol. B 18, 1306-1313 (2000).
[CrossRef]

1999

1996

F. E. Hovis, B. A. Shepherd, C. T. Radcliffe, and H. A. Maliborski, “Contamination damage in pulsed 1 μm lasers,” Proc SPIE 2714, 707-716 (1996).
[CrossRef]

M. L. André, “Status of the LMJ project,” Proc. SPIE 3047, 38-42 (1996).

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

1995

B. C. Stuart, M. D. Feit, and A. M. Rubenchik, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Adolf, A.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Andre, M.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

André, M. L.

M. L. André, “Status of the LMJ project,” Proc. SPIE 3047, 38-42 (1996).

Awazu, K.

K. Awazu, “Ablation and compaction of amorphous SiO2 irradiated with ArF excimer laser,” J. Non-Cryst. Solids 337, 241-253 (2004).
[CrossRef]

Bastein, A. T. G. M.

A. E. Duisterwinkel and A. T. G. M. Bastein, “Feasibility of UV cleaning of 157 nm reticles,” Microelectron. Eng. 67-68, 3-9 (2003).
[CrossRef]

Becker, S.

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

Belleville, P. F.

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

Bercegol, H.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Bickel, R.

R. Chow, R. Bickel, and J. Ertel, “Cleanliness validation of NIF small optics,” Proc. SPIE 4774, 19-24 (2002).
[CrossRef]

Bien-Aime, K.

I. Tovena-Pecault, K. Bien-Aime, and A. Pereira, “Organic molecular contamination in prototype of the future Laser MegaJoule,” presented at Pharmatech, Cork, Ireland, 16-18 September 2008.

Boscheron, A.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

Bouchut, P.

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

Bouillet, S.

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Bruel, L.

L. Bruel, “Environmental effects on optical component aging,” Proc. SPIE 4932, 158-169 (2003).
[CrossRef]

Bruneau, J. L.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Burkhart, S. C.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Cavailler, C.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Chow, R.

R. Chow, R. Bickel, and J. Ertel, “Cleanliness validation of NIF small optics,” Proc. SPIE 4774, 19-24 (2002).
[CrossRef]

Courchinoux, R.

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Coutard, J.-G.

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

Di Nicola, J. M.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Dijonneau, C. S.

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

Di-Nicola, J.-M.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

Donval, T.

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Duisterwinkel, A. E.

A. E. Duisterwinkel and A. T. G. M. Bastein, “Feasibility of UV cleaning of 157 nm reticles,” Microelectron. Eng. 67-68, 3-9 (2003).
[CrossRef]

Ertel, J.

R. Chow, R. Bickel, and J. Ertel, “Cleanliness validation of NIF small optics,” Proc. SPIE 4774, 19-24 (2002).
[CrossRef]

Feit, M. D.

B. C. Stuart, M. D. Feit, and A. M. Rubenchik, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Ferriera, J. L.

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

Fleurot, N. A.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Floch, H. G.

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

Guerain,, J. R.

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

Haupt, D. L.

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

Haynam, C. A.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Hovis, F. E.

F. E. Hovis, B. A. Shepherd, C. T. Radcliffe, and H. A. Maliborski, “Contamination damage in pulsed 1 μm lasers,” Proc SPIE 2714, 707-716 (1996).
[CrossRef]

Hutcheon, D.

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

Josse, M.

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Journot, E.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

Kamimura, T.

Kamisugi, N.

Kinney, J. H.

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

Kovacs, F.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Kunz, R. R.

R. R. Kunz and V. Libermann, “Experimentation and modelling of organic photocontamination on lithographic optics,” J. Vac. Sci. Technol. B 18, 1306-1313 (2000).
[CrossRef]

Kuzuu, N.

Lamaignère, L.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Le Garrec, B.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Leidinger, J. P.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Libermann, V.

R. R. Kunz and V. Libermann, “Experimentation and modelling of organic photocontamination on lithographic optics,” J. Vac. Sci. Technol. B 18, 1306-1313 (2000).
[CrossRef]

Lindsey, E. F.

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

Maliborski, H. A.

F. E. Hovis, B. A. Shepherd, C. T. Radcliffe, and H. A. Maliborski, “Contamination damage in pulsed 1 μm lasers,” Proc SPIE 2714, 707-716 (1996).
[CrossRef]

Manes, K. R.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Marshall, C. D.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Murray, J. E.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Néauport, J.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

Novaro, M.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Pegon, P. M.

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

Pereira, A.

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

I. Tovena-Pecault, K. Bien-Aime, and A. Pereira, “Organic molecular contamination in prototype of the future Laser MegaJoule,” presented at Pharmatech, Cork, Ireland, 16-18 September 2008.

Philippe, P.

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

Poncetta, J.-C.

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Price, D. M.

D. M. Price, “Vapor pressure determination by thermogravimetry,” Thermochim. Acta 367-368, 253-262 (2001).
[CrossRef]

Radcliffe, C. T.

F. E. Hovis, B. A. Shepherd, C. T. Radcliffe, and H. A. Maliborski, “Contamination damage in pulsed 1 μm lasers,” Proc SPIE 2714, 707-716 (1996).
[CrossRef]

Ravel, G.

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

Razé, G.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

Rubenchik, A. M.

B. C. Stuart, M. D. Feit, and A. M. Rubenchik, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Scurlock, C.

C. Scurlock, “A phenomenological study of contamination enhanced laser induced damage in sealed lasers,” Proc. SPIE 5647, 86-91 (2004).
[CrossRef]

Sheng, C. Y.

C. Y. Sheng, “Effect of laser-induced damage on optical windows in the presence of adhesives under simulated thermal-vacuum conditions,” Proc. SPIE 6403, 1-12 (2007).

Shepherd, B. A.

F. E. Hovis, B. A. Shepherd, C. T. Radcliffe, and H. A. Maliborski, “Contamination damage in pulsed 1 μm lasers,” Proc SPIE 2714, 707-716 (1996).
[CrossRef]

Spaeth, M. L.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Speck, D. R.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Starostina, N.

P. West and N. Starostina, “AFM image artefacts” (LOT-Oriel Gruppe Europa).

Stuart, B. C.

B. C. Stuart, M. D. Feit, and A. M. Rubenchik, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Sutton, S. B.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Tovena, I.

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

Tovena-Pecault, I.

I. Tovena-Pecault, K. Bien-Aime, and A. Pereira, “Organic molecular contamination in prototype of the future Laser MegaJoule,” presented at Pharmatech, Cork, Ireland, 16-18 September 2008.

Van Wonterghem, B. M.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

Wegner, P. J.

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

West, P.

P. West and N. Starostina, “AFM image artefacts” (LOT-Oriel Gruppe Europa).

Wong, Joe

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

Yoshida, H.

Yoshida, K.

Appl. Opt.

J. Non-Cryst. Solids

Joe Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3± w (355 nm) laser pulses,” J. Non-Cryst. Solids 352, 255-272(2006).
[CrossRef]

K. Awazu, “Ablation and compaction of amorphous SiO2 irradiated with ArF excimer laser,” J. Non-Cryst. Solids 337, 241-253 (2004).
[CrossRef]

J. Phys. Conf. Ser.

H. Bercegol, A. Boscheron, J.-M. Di-Nicola, E. Journot, L. Lamaignère, J. Néauport, and G. Razé, “Laser damage phenomena relevant to the design and operation of an ICF laser driver,” J. Phys. Conf. Ser. 112, 032013 (2008).
[CrossRef]

J. Vac. Sci. Technol. B

R. R. Kunz and V. Libermann, “Experimentation and modelling of organic photocontamination on lithographic optics,” J. Vac. Sci. Technol. B 18, 1306-1313 (2000).
[CrossRef]

Microelectron. Eng.

A. E. Duisterwinkel and A. T. G. M. Bastein, “Feasibility of UV cleaning of 157 nm reticles,” Microelectron. Eng. 67-68, 3-9 (2003).
[CrossRef]

Phys. Rev. Lett.

B. C. Stuart, M. D. Feit, and A. M. Rubenchik, “Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses,” Phys. Rev. Lett. 74, 2248 (1995).
[CrossRef] [PubMed]

Proc SPIE

A. Pereira, J.-G. Coutard, S. Becker, I. Tovena, P. Bouchut, and G. Ravel, “Impact of organics contamination on 1064 nm laser induced damage threshold of dielectric mirrors,” Proc SPIE 6403, 6403-0I-1 (2006).

F. E. Hovis, B. A. Shepherd, C. T. Radcliffe, and H. A. Maliborski, “Contamination damage in pulsed 1 μm lasers,” Proc SPIE 2714, 707-716 (1996).
[CrossRef]

Proc. SPIE

C. Scurlock, “A phenomenological study of contamination enhanced laser induced damage in sealed lasers,” Proc. SPIE 5647, 86-91 (2004).
[CrossRef]

C. Y. Sheng, “Effect of laser-induced damage on optical windows in the presence of adhesives under simulated thermal-vacuum conditions,” Proc. SPIE 6403, 1-12 (2007).

L. Bruel, “Environmental effects on optical component aging,” Proc. SPIE 4932, 158-169 (2003).
[CrossRef]

R. Chow, R. Bickel, and J. Ertel, “Cleanliness validation of NIF small optics,” Proc. SPIE 4774, 19-24 (2002).
[CrossRef]

M. L. André, “Status of the LMJ project,” Proc. SPIE 3047, 38-42 (1996).

B. M. Van Wonterghem, S. C. Burkhart, C. A. Haynam, K. R. Manes, C. D. Marshall, J. E. Murray, M. L. Spaeth, D. R. Speck, S. B. Sutton, and P. J. Wegner, “National Ignition Facility commissioning and performance,” Proc. SPIE 5341, 55-65 (2004).
[CrossRef]

N. A. Fleurot, A. Adolf, M. Andre, J. L. Bruneau, C. Cavailler, M. Novaro, P. Philippe, F. Kovacs, B. Le Garrec, J. M. Di Nicola, and J. P. Leidinger, “The Ligne d'Integration Laser (LIL): construction status and first 1-w light early results,” Proc. SPIE 4948, 418-424 (2003).
[CrossRef]

H. G. Floch, P. F. Belleville, P. M. Pegon, C. S. Dijonneau, and J. R. Guerain, “Sol gel optical thin films for an advanced megajoule-class Nd:glass-laser ICF driver,” Proc. SPIE 2714, 521-536 (1996).
[CrossRef]

Rev. Sci. Instrum.

L. Lamaignère, S. Bouillet, R. Courchinoux, T. Donval, M. Josse, J.-C. Poncetta, and H. Bercegol, “An accurate, repeatable, and well characterized measurement of laser damage density of optical materials,” Rev. Sci. Instrum. 78, 103105 (2007).
[CrossRef] [PubMed]

Thermochim. Acta

D. M. Price, “Vapor pressure determination by thermogravimetry,” Thermochim. Acta 367-368, 253-262 (2001).
[CrossRef]

Other

P. West and N. Starostina, “AFM image artefacts” (LOT-Oriel Gruppe Europa).

I. Tovena-Pecault, K. Bien-Aime, and A. Pereira, “Organic molecular contamination in prototype of the future Laser MegaJoule,” presented at Pharmatech, Cork, Ireland, 16-18 September 2008.

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Figures (11)

Fig. 1
Fig. 1

Daily measures of phthalates in the FCS environment, and comparison of DOP measured partial pressure with vapor pressure.

Fig. 2
Fig. 2

AFM observation of a sample (a) before and (b) after DOP contamination in gaseous phase.

Fig. 3
Fig. 3

Comparison of laser damage density between a reference sample and a sample contaminated by DOP in gaseous phase.

Fig. 4
Fig. 4

Typical image of a DOP droplet on fused polished silica optics measured with a Lasertec 1LM21WD optical profilometer (top view and side view superposed—x and y scales are different).

Fig. 5
Fig. 5

Laser irradiation configurations: (a) droplets placed on input surface, (b) droplets placed on output surface.

Fig. 6
Fig. 6

Polished fused silica polluted by spin coating and raster scan irradiated with droplets on the output surface. A Leica DMLM optical microscope was used.

Fig. 7
Fig. 7

Confocal microscopy image of a damage generated by droplet on silica.

Fig. 8
Fig. 8

Raman spectrum of a liquid phase contamination sample before and after laser irradiation.

Fig. 9
Fig. 9

Typical morphology of bulk damage after polishing: (a) top view, (b) side view.

Fig. 10
Fig. 10

Line profile of the Si2p photoemission peak on a damage site.

Fig. 11
Fig. 11

Cross section of fluence profile of laser beam propagated after a 17.5 μm radius and 3.3 μm thick droplet with a paraxial focus of 150.6 μm at the damage position 121.6 μm .

Tables (2)

Tables Icon

Table 1 Experimental Parameters of Gas Chromatograph Coupled with Mass Spectrometer Analysis

Tables Icon

Table 2 Estimated Surfacic Contamination

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

Δ T = α F C p ρ ,
A ( ρ ) = 2 i k π z e i k ρ 2 2 z 0 R A ( r ) e i Φ e i k r 2 2 z J 0 ( k r ρ z ) r d r ,
Φ = k ( r 2 2 f Δ ) .

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