Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Characterization of nanostructured GaSb: comparison between large-area optical and local direct microscopic techniques

Not Accessible

Your library or personal account may give you access

Abstract

Low energy ion-beam sputtering of GaSb results in self-organized nanostructures with the potential of structuring large surface areas. Characterization of such nanostructures by optical methods is studied and compared to direct (local) microscopic methods. The samples consist of densely packed GaSb cones on bulk GaSb, approximately 30, 50, and 300nm in height, prepared by sputtering at normal incidence. The optical properties are studied by spectroscopic ellipsometry, in the range 0.66.5eV, and with Mueller matrix ellipsometry in the visible range, 1.462.88eV. The optical measurements are compared to direct topography measurements obtained by scanning electron microscopy, high resolution transmission electron microscopy, and atomic force microscopy. Good agreement is achieved between the two classes of methods when the experimental optical response of the short cones (<55nm) is inverted with respect to topological surface information, via a graded anisotropic effective medium model. The main topological parameter measured was the average cone height. Optical methods are shown to represent a valuable characterization tool of nanostructured surfaces, in particular when a large coverage area is desirable. Because of the fast and nondestructive properties of optical techniques, they may readily be adapted to in situ configurations.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Real-time in situ Mueller matrix ellipsometry of GaSb nanopillars: observation of anisotropic local alignment

Ingar Stian Nerbø, Sebastien Le Roy, Martin Foldyna, Elin Søndergård, and Morten Kildemo
Opt. Express 19(13) 12551-12561 (2011)

Vacuum ultraviolet optical properties of GaSb determined by synchrotron rotating analyzer ellipsometry: applications in nanopillars and plasmonics

Nathan Hale, Victoria M. Bjelland, Christoph Cobet, Norbert Esser, and Morten Kildemo
Opt. Mater. Express 13(5) 1440-1456 (2023)

Anisotropic plasmonic Cu nanoparticles in sol-gel oxide nanopillars studied by spectroscopic Mueller matrix ellipsometry

Z. Ghadyani, M. Kildemo, L. M. S. Aas, Y. Cohin, and E. Søndergård
Opt. Express 21(25) 30796-30811 (2013)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved