Abstract

Chalcogenide coatings are investigated to obtain either optical components for spectral applications or optochemical sensors in the mid-infrared. The deposition of Ge15Sb20S65 and Te20As30Se50 chalcogenide glasses is performed by two physical techniques: electron-beam and pulsed-laser deposition. The quality of the film is analyzed by scanning electron microscopy, atomic force microscopy, and energy dispersive spectroscopy to characterize the morphology, topography, and chemical composition. The optical properties and optical constants are also determined. A CF4 dry etching is performed on these films to obtain a channeled optical waveguide. For a passband filter made by electron-beam deposition, cryolite as a low-refractive-index material and chalcogenide glasses as high-refractive-index materials are used to favor a large refractive-index contrast. A shift of a centered wavelength of a photosensitive passband filter is controlled by illumination time.

© 2008 Optical Society of America

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    [CrossRef] [PubMed]
  5. J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, "Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor," Opt. Express 15, 2307-2314 (2007).
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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  38. K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).
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    [CrossRef] [PubMed]
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    [CrossRef]

2007 (3)

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

J. Hu, V. Tarasov, A. Agarwal, L. Kimerling, N. Carlie, L. Petit, and K. Richardson, "Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor," Opt. Express 15, 2307-2314 (2007).
[CrossRef] [PubMed]

2006 (7)

L. Abel-Tiberini, F. Lemarquis, and M. Lequime, "Dedicated spectrophotometer for localized transmittance and reflectance measurements," Appl. Opt. 45, 1386-1391 (2006).
[CrossRef] [PubMed]

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
[CrossRef]

V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
[CrossRef]

N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
[CrossRef] [PubMed]

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
[CrossRef] [PubMed]

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

2005 (3)

J. Lumeau, M. Lequime, C. Amra, N. Kaiser, and H. A. Macleod, "Laser trimming of thin-film filters," Proc. SPIE 5963, 60-69 (2005).

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, and A. Pradel, "Selenide and telluride thick films for mid and thermal infrared applications," J. Optoelectron. Adv. Mater. 7, 2625-2634 (2005).

S. Ramachandran and S. G. Bishop, "Photoinduced integrated-optic devices in rapid thermally annealed chalcogenide glasses," IEEE J. Sel. Top. Quantum Electron. 11, 260-270 (2005).
[CrossRef]

2004 (3)

D. A. Turnbull, J. S. Sanghera, V. Nguyen, and I. D. Aggarwal, "Fabrication of waveguides in sputtered films of GeAsSe glass via photodarkening with above bandgap light," Mater. Lett. 58, 51-54 (2004).
[CrossRef]

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

Y. L. Ruan, W. T. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, "Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching," Opt. Express 12, 5140-5145 (2004).
[CrossRef] [PubMed]

2003 (2)

J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
[CrossRef]

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

2002 (1)

A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Top. Quantum Electron. 8, 1381-1388 (2002).
[CrossRef]

2000 (2)

A. Mendoza-Galvan, E. Garcia-Garcia, Y. V. Vorobiev, and J. Gonzalez-Hernandez, "Structural, optical and electrical characterization of amorphous SeTe thin film alloys," Microelectron. Eng. 51-52, 677-687 (2000).
[CrossRef]

M. A. Popescu, Noncrystalline Chalcogenides (Kluwer, 2000).

1999 (1)

1998 (1)

I. P. Kotsalas, D. Papadimitriou, C. Raptis, M. Vlcek, and M. Frumar, "Raman study of photostructural changes in amorphous GexSb0.4-xS0.6," J. Non-Cryst. Solids 226, 85-91 (1998).
[CrossRef]

1997 (1)

T. K. Sudoh, Y. Nakano, and K. Tada, "Wavelength trimming by external light irradiation-post-fabrication lasing wavelength adjustment for multiple-wavelength distributed-feedback laser arrays," IEEE J. Sel. Top. Quantum Electron. 3, 577-583 (1997).
[CrossRef]

1996 (2)

C. Deumié, R. Richier, P. Dumas, and C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
[CrossRef] [PubMed]

T. Usuki, K. Saitoh, M. Endo, and O. Uemura, "Short-range order of amorphous and liquid As-Te-I system," J. Non-Cryst. Solids 205-207, 184-188 (1996).
[CrossRef]

1993 (1)

P. J. S. Ewen, A. Zekak, C. W. Slinger, G. Dale, D. A. Pain, and A. E. Owen, "Diffractive infrared optical-elements in chalcogenide glasses," J. Non-Cryst. Solids 166, 1247-1250 (1993).
[CrossRef]

1990 (1)

S. R. Elliott, Physics of Amorphous Materials (Longman, 1990).

1989 (2)

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

1987 (1)

S. Sugai, "Stochastic random network model in ge and Si chalcogenide glasses," Phys. Rev. B 35, 1345-1361 (1987).
[CrossRef]

1985 (1)

B. Bovard, F. J. Van Milligen, M. J. Messerly, S. J. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
[CrossRef] [PubMed]

1983 (1)

I. Watanabe, S. Noguchi, and T. Shimizu, "Study on local structure in amorphous Sb-S films by Raman scattering," J. Non-Cryst. Solids 58, 35-40 (1983).
[CrossRef]

1982 (1)

1981 (1)

M. Frumar, H. Ticha, M. Vlcek, J. Klikorka, and L. Tichy, "Photostructural changes in some ternary Ge-Sb-S chalcogenide layers," Czech. J. Physics 31, 441-446 (1981).
[CrossRef]

1980 (1)

T. Mori, S. Onari, and T. Arai, "Raman scattering in amorphous As-Se system," Jpn. J. Appl. Phys. 19, 1027-1031 (1980).
[CrossRef]

1978 (1)

B. Vidal, A. Fornier, and E. Pelletier, "Optical monitoring of nonquarterwave multilayer filters," Appl. Opt. 17, 1038-1047 (1978).

1977 (1)

H. A. Macleod and E. Pelletier, "Error compensation mechanisms in some thin-film monitoring system," J. Mod. Opt. 24, 907-930 (1977).

1974 (1)

G. Lucovsky, F. L. Galeener, R. C. Keezer, R. H. Geils, and H. A. Six, "Structural interpretation of the infrared and Raman spectroscopy of glasses in the alloy system Ge1-xSx," Phys. Rev. B 10, 5134-5146 (1974).
[CrossRef]

1973 (1)

1970 (1)

J. Schottomiller, M. Tabak, G. Lukovsky, and A. Ward, "The effects of valency on transport properties in vitreous binary alloys of selenium," J. Non-Cryst. Solids 4, 80-96 (1970).
[CrossRef]

1969 (1)

P. K. Tien, R. Ulrich, and R. J. Martin, "Modes of propagating light waves in thin deposited semiconductor films,"Appl. Phys. Lett. 14, 291-294 (1969).
[CrossRef]

1968 (1)

A. T. Ward, "Raman spectroscopy of sulfur, sulfur-selenium, and sulfur-arsenic mixtures," J. Phys. Chem. 72, 4133-4139 (1968).
[CrossRef]

Abel-Tiberini, L.

Adam, J. L.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
[CrossRef]

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

Agarwal, A.

Aggarwal, I. D.

D. A. Turnbull, J. S. Sanghera, V. Nguyen, and I. D. Aggarwal, "Fabrication of waveguides in sputtered films of GeAsSe glass via photodarkening with above bandgap light," Mater. Lett. 58, 51-54 (2004).
[CrossRef]

Albrand, G.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Allen, P. J.

N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
[CrossRef] [PubMed]

Allen, T. H.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Amra, C.

J. Lumeau, M. Lequime, C. Amra, N. Kaiser, and H. A. Macleod, "Laser trimming of thin-film filters," Proc. SPIE 5963, 60-69 (2005).

C. Deumié, R. Richier, P. Dumas, and C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
[CrossRef] [PubMed]

Anheier, N. C.

N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
[CrossRef] [PubMed]

Anne, M. L.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Arai, T.

T. Mori, S. Onari, and T. Arai, "Raman scattering in amorphous As-Se system," Jpn. J. Appl. Phys. 19, 1027-1031 (1980).
[CrossRef]

Baker, N. J.

N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
[CrossRef] [PubMed]

Baumann, T.

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

Bennett, J. M.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Bishop, S. G.

S. Ramachandran and S. G. Bishop, "Photoinduced integrated-optic devices in rapid thermally annealed chalcogenide glasses," IEEE J. Sel. Top. Quantum Electron. 11, 260-270 (2005).
[CrossRef]

Bonhomme, E.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

Borgogno, J. P.

Borgogno, J.-P.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Bosc, D.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Boussard-Pledel, C.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
[CrossRef]

Boussard-Plédel, C.

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

Bovard, B.

B. Bovard, F. J. Van Milligen, M. J. Messerly, S. J. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
[CrossRef] [PubMed]

Broquin, J. E.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, and A. Pradel, "Selenide and telluride thick films for mid and thermal infrared applications," J. Optoelectron. Adv. Mater. 7, 2625-2634 (2005).

Bureau, B.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
[CrossRef]

Burns, D.

K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

Camy, P.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Carlie, N.

Carniglia, C. K.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Chardon, A. M.

A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Top. Quantum Electron. 8, 1381-1388 (2002).
[CrossRef]

Charrier, J.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Choi, D. Y.

N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
[CrossRef] [PubMed]

Colas, F.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Compere, C.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Dale, G.

P. J. S. Ewen, A. Zekak, C. W. Slinger, G. Dale, D. A. Pain, and A. E. Owen, "Diffractive infrared optical-elements in chalcogenide glasses," J. Non-Cryst. Solids 166, 1247-1250 (1993).
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de Sterke, C. M.

N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
[CrossRef] [PubMed]

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C. Deumié, R. Richier, P. Dumas, and C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
[CrossRef] [PubMed]

Ding, Y. J.

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

Doualan, J. L.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Dumas, P.

C. Deumié, R. Richier, P. Dumas, and C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
[CrossRef] [PubMed]

Duverger, C.

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
[CrossRef]

Edgell, J.

K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

Eggleton, B. J.

V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
[CrossRef]

N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
[CrossRef] [PubMed]

Elliott, S. R.

S. R. Elliott, Physics of Amorphous Materials (Longman, 1990).

Endo, M.

T. Usuki, K. Saitoh, M. Endo, and O. Uemura, "Short-range order of amorphous and liquid As-Te-I system," J. Non-Cryst. Solids 205-207, 184-188 (1996).
[CrossRef]

Ewen, P. J. S.

P. J. S. Ewen, A. Zekak, C. W. Slinger, G. Dale, D. A. Pain, and A. E. Owen, "Diffractive infrared optical-elements in chalcogenide glasses," J. Non-Cryst. Solids 166, 1247-1250 (1993).
[CrossRef]

Fornier, A.

B. Vidal, A. Fornier, and E. Pelletier, "Optical monitoring of nonquarterwave multilayer filters," Appl. Opt. 17, 1038-1047 (1978).

Frumar, M.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
[CrossRef]

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

I. P. Kotsalas, D. Papadimitriou, C. Raptis, M. Vlcek, and M. Frumar, "Raman study of photostructural changes in amorphous GexSb0.4-xS0.6," J. Non-Cryst. Solids 226, 85-91 (1998).
[CrossRef]

M. Frumar, H. Ticha, M. Vlcek, J. Klikorka, and L. Tichy, "Photostructural changes in some ternary Ge-Sb-S chalcogenide layers," Czech. J. Physics 31, 441-446 (1981).
[CrossRef]

Frumarov, B.

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

Frumarova, B.

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

Fu, L. B.

V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
[CrossRef]

Galeener, F. L.

G. Lucovsky, F. L. Galeener, R. C. Keezer, R. H. Geils, and H. A. Six, "Structural interpretation of the infrared and Raman spectroscopy of glasses in the alloy system Ge1-xSx," Phys. Rev. B 10, 5134-5146 (1974).
[CrossRef]

Galstyan, T. V.

Ganjoo, A.

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

Garcia-Garcia, E.

A. Mendoza-Galvan, E. Garcia-Garcia, Y. V. Vorobiev, and J. Gonzalez-Hernandez, "Structural, optical and electrical characterization of amorphous SeTe thin film alloys," Microelectron. Eng. 51-52, 677-687 (2000).
[CrossRef]

Geils, R. H.

G. Lucovsky, F. L. Galeener, R. C. Keezer, R. H. Geils, and H. A. Six, "Structural interpretation of the infrared and Raman spectroscopy of glasses in the alloy system Ge1-xSx," Phys. Rev. B 10, 5134-5146 (1974).
[CrossRef]

Gonzalez-Hernandez, J.

A. Mendoza-Galvan, E. Garcia-Garcia, Y. V. Vorobiev, and J. Gonzalez-Hernandez, "Structural, optical and electrical characterization of amorphous SeTe thin film alloys," Microelectron. Eng. 51-52, 677-687 (2000).
[CrossRef]

Guenther, K. H.

K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Guin, J. P.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Henrio, F.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Hewak, D. W.

A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Top. Quantum Electron. 8, 1381-1388 (2002).
[CrossRef]

Ho, N.

N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
[CrossRef] [PubMed]

Hrdlicka, M.

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

Hu, J.

Irudayaraj, J.

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

Jacquier, B.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Jain, H.

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

Jarvis, R.

Jedelsky, J.

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
[CrossRef]

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

Jouan, T.

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

Jurdyc, A.-M.

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Kaiser, N.

J. Lumeau, M. Lequime, C. Amra, N. Kaiser, and H. A. Macleod, "Laser trimming of thin-film filters," Proc. SPIE 5963, 60-69 (2005).

Keezer, R. C.

G. Lucovsky, F. L. Galeener, R. C. Keezer, R. H. Geils, and H. A. Six, "Structural interpretation of the infrared and Raman spectroscopy of glasses in the alloy system Ge1-xSx," Phys. Rev. B 10, 5134-5146 (1974).
[CrossRef]

Keirsse, J.

J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
[CrossRef]

Kern, P.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, and A. Pradel, "Selenide and telluride thick films for mid and thermal infrared applications," J. Optoelectron. Adv. Mater. 7, 2625-2634 (2005).

Kimerling, L.

Klikorka, J.

M. Frumar, H. Ticha, M. Vlcek, J. Klikorka, and L. Tichy, "Photostructural changes in some ternary Ge-Sb-S chalcogenide layers," Czech. J. Physics 31, 441-446 (1981).
[CrossRef]

Kotsalas, I. P.

I. P. Kotsalas, D. Papadimitriou, C. Raptis, M. Vlcek, and M. Frumar, "Raman study of photostructural changes in amorphous GexSb0.4-xS0.6," J. Non-Cryst. Solids 226, 85-91 (1998).
[CrossRef]

Krishnaswami, K.

N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
[CrossRef] [PubMed]

Labadie, L.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, and A. Pradel, "Selenide and telluride thick films for mid and thermal infrared applications," J. Optoelectron. Adv. Mater. 7, 2625-2634 (2005).

LaRochelle, S.

Lazarides, B.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
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N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
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J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
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V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
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N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
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J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
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J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
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J. Lumeau, M. Lequime, C. Amra, N. Kaiser, and H. A. Macleod, "Laser trimming of thin-film filters," Proc. SPIE 5963, 60-69 (2005).

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V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
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N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
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Y. L. Ruan, W. T. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, "Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching," Opt. Express 12, 5140-5145 (2004).
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J. Lumeau, M. Lequime, C. Amra, N. Kaiser, and H. A. Macleod, "Laser trimming of thin-film filters," Proc. SPIE 5963, 60-69 (2005).

B. Bovard, F. J. Van Milligen, M. J. Messerly, S. J. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
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A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Top. Quantum Electron. 8, 1381-1388 (2002).
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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
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V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
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K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

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N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
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T. K. Sudoh, Y. Nakano, and K. Tada, "Wavelength trimming by external light irradiation-post-fabrication lasing wavelength adjustment for multiple-wavelength distributed-feedback laser arrays," IEEE J. Sel. Top. Quantum Electron. 3, 577-583 (1997).
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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
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M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
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D. A. Turnbull, J. S. Sanghera, V. Nguyen, and I. D. Aggarwal, "Fabrication of waveguides in sputtered films of GeAsSe glass via photodarkening with above bandgap light," Mater. Lett. 58, 51-54 (2004).
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N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
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V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
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Ruan, Y. L.

V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
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Y. L. Ruan, W. T. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, "Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching," Opt. Express 12, 5140-5145 (2004).
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A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
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[CrossRef]

Saxe, S. J.

B. Bovard, F. J. Van Milligen, M. J. Messerly, S. J. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
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J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
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J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
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J. Schottomiller, M. Tabak, G. Lukovsky, and A. Ward, "The effects of valency on transport properties in vitreous binary alloys of selenium," J. Non-Cryst. Solids 4, 80-96 (1970).
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A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Top. Quantum Electron. 8, 1381-1388 (2002).
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I. Watanabe, S. Noguchi, and T. Shimizu, "Study on local structure in amorphous Sb-S films by Raman scattering," J. Non-Cryst. Solids 58, 35-40 (1983).
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V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
[CrossRef]

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J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
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G. Lucovsky, F. L. Galeener, R. C. Keezer, R. H. Geils, and H. A. Six, "Structural interpretation of the infrared and Raman spectroscopy of glasses in the alloy system Ge1-xSx," Phys. Rev. B 10, 5134-5146 (1974).
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P. J. S. Ewen, A. Zekak, C. W. Slinger, G. Dale, D. A. Pain, and A. E. Owen, "Diffractive infrared optical-elements in chalcogenide glasses," J. Non-Cryst. Solids 166, 1247-1250 (1993).
[CrossRef]

Song, R.

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

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K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
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T. K. Sudoh, Y. Nakano, and K. Tada, "Wavelength trimming by external light irradiation-post-fabrication lasing wavelength adjustment for multiple-wavelength distributed-feedback laser arrays," IEEE J. Sel. Top. Quantum Electron. 3, 577-583 (1997).
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T. K. Sudoh, Y. Nakano, and K. Tada, "Wavelength trimming by external light irradiation-post-fabrication lasing wavelength adjustment for multiple-wavelength distributed-feedback laser arrays," IEEE J. Sel. Top. Quantum Electron. 3, 577-583 (1997).
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V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
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[CrossRef]

Tichy, L.

M. Frumar, H. Ticha, M. Vlcek, J. Klikorka, and L. Tichy, "Photostructural changes in some ternary Ge-Sb-S chalcogenide layers," Czech. J. Physics 31, 441-446 (1981).
[CrossRef]

Tien, P. K.

P. K. Tien, R. Ulrich, and R. J. Martin, "Modes of propagating light waves in thin deposited semiconductor films,"Appl. Phys. Lett. 14, 291-294 (1969).
[CrossRef]

Torge, R.

Turlin, B.

J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
[CrossRef]

Turnbull, D. A.

D. A. Turnbull, J. S. Sanghera, V. Nguyen, and I. D. Aggarwal, "Fabrication of waveguides in sputtered films of GeAsSe glass via photodarkening with above bandgap light," Mater. Lett. 58, 51-54 (2004).
[CrossRef]

Tuttle-Hart, T.

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Uemura, O.

T. Usuki, K. Saitoh, M. Endo, and O. Uemura, "Short-range order of amorphous and liquid As-Te-I system," J. Non-Cryst. Solids 205-207, 184-188 (1996).
[CrossRef]

Ulrich, R.

R. Ulrich and R. Torge, "Measurement of thin film parameters with a prism coupler," Appl. Opt. 12, 2901-2908 (1973).
[CrossRef] [PubMed]

P. K. Tien, R. Ulrich, and R. J. Martin, "Modes of propagating light waves in thin deposited semiconductor films,"Appl. Phys. Lett. 14, 291-294 (1969).
[CrossRef]

Usuki, T.

T. Usuki, K. Saitoh, M. Endo, and O. Uemura, "Short-range order of amorphous and liquid As-Te-I system," J. Non-Cryst. Solids 205-207, 184-188 (1996).
[CrossRef]

Van Milligen, F. J.

B. Bovard, F. J. Van Milligen, M. J. Messerly, S. J. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
[CrossRef] [PubMed]

Vidal, B.

B. Vidal, A. Fornier, and E. Pelletier, "Optical monitoring of nonquarterwave multilayer filters," Appl. Opt. 17, 1038-1047 (1978).

Vigreux-Bercovici, C.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, and A. Pradel, "Selenide and telluride thick films for mid and thermal infrared applications," J. Optoelectron. Adv. Mater. 7, 2625-2634 (2005).

Villeneuve, A.

Vlcek, M.

I. P. Kotsalas, D. Papadimitriou, C. Raptis, M. Vlcek, and M. Frumar, "Raman study of photostructural changes in amorphous GexSb0.4-xS0.6," J. Non-Cryst. Solids 226, 85-91 (1998).
[CrossRef]

M. Frumar, H. Ticha, M. Vlcek, J. Klikorka, and L. Tichy, "Photostructural changes in some ternary Ge-Sb-S chalcogenide layers," Czech. J. Physics 31, 441-446 (1981).
[CrossRef]

Vorobiev, Y. V.

A. Mendoza-Galvan, E. Garcia-Garcia, Y. V. Vorobiev, and J. Gonzalez-Hernandez, "Structural, optical and electrical characterization of amorphous SeTe thin film alloys," Microelectron. Eng. 51-52, 677-687 (2000).
[CrossRef]

Wagner, T.

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

Ward, A.

J. Schottomiller, M. Tabak, G. Lukovsky, and A. Ward, "The effects of valency on transport properties in vitreous binary alloys of selenium," J. Non-Cryst. Solids 4, 80-96 (1970).
[CrossRef]

Ward, A. T.

A. T. Ward, "Raman spectroscopy of sulfur, sulfur-selenium, and sulfur-arsenic mixtures," J. Phys. Chem. 72, 4133-4139 (1968).
[CrossRef]

Watanabe, I.

I. Watanabe, S. Noguchi, and T. Shimizu, "Study on local structure in amorphous Sb-S films by Raman scattering," J. Non-Cryst. Solids 58, 35-40 (1983).
[CrossRef]

Windham, D.

K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

Yu, C.

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

Zekak, A.

P. J. S. Ewen, A. Zekak, C. W. Slinger, G. Dale, D. A. Pain, and A. E. Owen, "Diffractive infrared optical-elements in chalcogenide glasses," J. Non-Cryst. Solids 166, 1247-1250 (1993).
[CrossRef]

J. Phys. Chem. (1)

A. T. Ward, "Raman spectroscopy of sulfur, sulfur-selenium, and sulfur-arsenic mixtures," J. Phys. Chem. 72, 4133-4139 (1968).
[CrossRef]

Appl. Opt. (3)

C. Deumié, R. Richier, P. Dumas, and C. Amra, "Multiscale roughness in optical multilayers: atomic force microscopy and light scattering," Appl. Opt. 35, 5583-5594 (1996).
[CrossRef] [PubMed]

B. Bovard, F. J. Van Milligen, M. J. Messerly, S. J. Saxe, and H. A. Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985).
[CrossRef] [PubMed]

J. M. Bennett, E. Pelletier, G. Albrand, J.-P. Borgogno, B. Lazarides, C. K. Carniglia, R. A. Schmell, T. H. Allen, T. Tuttle-Hart, K. H. Guenther, and C. Saxer, "Comparison of the properties of titanium dioxide films prepared by various techniques," Appl. Opt. 28, 3303-3317 (1989).
[CrossRef] [PubMed]

Appl. Opt. (3)

Appl. Phys. Lett. (2)

P. K. Tien, R. Ulrich, and R. J. Martin, "Modes of propagating light waves in thin deposited semiconductor films,"Appl. Phys. Lett. 14, 291-294 (1969).
[CrossRef]

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J. E. Broquin, L. Labadie, and P. Kern, "Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate," Appl. Phys. Lett. 90, 011110 (2007).
[CrossRef]

Czech. J. Physics (1)

M. Frumar, H. Ticha, M. Vlcek, J. Klikorka, and L. Tichy, "Photostructural changes in some ternary Ge-Sb-S chalcogenide layers," Czech. J. Physics 31, 441-446 (1981).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (4)

S. Ramachandran and S. G. Bishop, "Photoinduced integrated-optic devices in rapid thermally annealed chalcogenide glasses," IEEE J. Sel. Top. Quantum Electron. 11, 260-270 (2005).
[CrossRef]

A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Top. Quantum Electron. 8, 1381-1388 (2002).
[CrossRef]

V. G. Ta'eed, M. Shokooh-Saremi, L. B. Fu, I. C. M. Littler, D. J. Moss, M. Rochette, B. J. Eggleton, Y. L. Ruan, and B. Luther-Davies, "Self-phase modulation-based integrated optical regeneration in chalcogenide waveguides," IEEE J. Sel. Top. Quantum Electron. 12, 360-370 (2006).
[CrossRef]

T. K. Sudoh, Y. Nakano, and K. Tada, "Wavelength trimming by external light irradiation-post-fabrication lasing wavelength adjustment for multiple-wavelength distributed-feedback laser arrays," IEEE J. Sel. Top. Quantum Electron. 3, 577-583 (1997).
[CrossRef]

J. Mod. Opt. (1)

H. A. Macleod and E. Pelletier, "Error compensation mechanisms in some thin-film monitoring system," J. Mod. Opt. 24, 907-930 (1977).

J. Non-Cryst. Solids (6)

M. Frumar, B. Frumarova, P. Nemec, T. Wagner, J. Jedelsky, and M. Hrdlicka, "Thin chalcogenide films prepared by pulsed laser depositionȔnew amorphous materials applicable in optoelectronics and chemical sensors," J. Non-Cryst. Solids 352, 544-561 (2006).
[CrossRef]

J. Keirsse, C. Boussard-Pledel, O. Loreal, O. Sire, B. Bureau, B. Turlin, P. Leroyer, and J. Lucas, "Chalcogenide glass fibers used as biosensors," J. Non-Cryst. Solids 326, 430-433 (2003).
[CrossRef]

I. P. Kotsalas, D. Papadimitriou, C. Raptis, M. Vlcek, and M. Frumar, "Raman study of photostructural changes in amorphous GexSb0.4-xS0.6," J. Non-Cryst. Solids 226, 85-91 (1998).
[CrossRef]

J. Schottomiller, M. Tabak, G. Lukovsky, and A. Ward, "The effects of valency on transport properties in vitreous binary alloys of selenium," J. Non-Cryst. Solids 4, 80-96 (1970).
[CrossRef]

T. Usuki, K. Saitoh, M. Endo, and O. Uemura, "Short-range order of amorphous and liquid As-Te-I system," J. Non-Cryst. Solids 205-207, 184-188 (1996).
[CrossRef]

P. J. S. Ewen, A. Zekak, C. W. Slinger, G. Dale, D. A. Pain, and A. E. Owen, "Diffractive infrared optical-elements in chalcogenide glasses," J. Non-Cryst. Solids 166, 1247-1250 (1993).
[CrossRef]

J. Lightwave Technol. (1)

J. Non-Cryst. Solids (1)

M. Frumar, J. Jedelsky, B. Frumarov, T. Wagner, and M. Hrdlicka, "Optically and thermally induced changes of structure, linear and non-linear optical properties of chalcogenides thin films," J. Non-Cryst. Solids 326 & 327, 399-404 (2003).
[CrossRef]

J. Non-Cryst. Solids (2)

I. Watanabe, S. Noguchi, and T. Shimizu, "Study on local structure in amorphous Sb-S films by Raman scattering," J. Non-Cryst. Solids 58, 35-40 (1983).
[CrossRef]

A. Ganjoo, H. Jain, C. Yu, R. Song, J. V. Ryan, J. Irudayaraj, Y. J. Ding, and C. G. Pantano, "Planar chalcogenide glass waveguides for IR evanescent wave sensors," J. Non-Cryst. Solids 352, 584-588 (2006).
[CrossRef]

J. Optoelectron. Adv. Mater. (1)

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, and A. Pradel, "Selenide and telluride thick films for mid and thermal infrared applications," J. Optoelectron. Adv. Mater. 7, 2625-2634 (2005).

J. Vac. Sci. Technol. (1)

K. H. Guenther, B. Loo, D. Burns, J. Edgell, D. Windham, and K. H. Müller, "Microstructure analysis of thin films deposited by reactive evaporation and reactive ion plating," J. Vac. Sci. Technol. A7, 1436-1445 (1989).

Jpn. J. Appl. Phys. (1)

T. Mori, S. Onari, and T. Arai, "Raman scattering in amorphous As-Se system," Jpn. J. Appl. Phys. 19, 1027-1031 (1980).
[CrossRef]

Mater. Lett. (1)

D. A. Turnbull, J. S. Sanghera, V. Nguyen, and I. D. Aggarwal, "Fabrication of waveguides in sputtered films of GeAsSe glass via photodarkening with above bandgap light," Mater. Lett. 58, 51-54 (2004).
[CrossRef]

Microelectron. Eng. (1)

A. Mendoza-Galvan, E. Garcia-Garcia, Y. V. Vorobiev, and J. Gonzalez-Hernandez, "Structural, optical and electrical characterization of amorphous SeTe thin film alloys," Microelectron. Eng. 51-52, 677-687 (2000).
[CrossRef]

Opt. Express (1)

N. J. Baker, H. W. Lee, I. C. M. Littler, C. M. de Sterke, B. J. Eggleton, D. Y. Choi, S. Madden, and B. Luther-Davies, "Sampled Bragg gratings in chalcogenide (As2S3) rib-waveguides," Opt. Express 14, 9451-9459 (2006).
[CrossRef] [PubMed]

Opt. Lett. (1)

N. Ho, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier, "Single-mode low-loss chalcogenide glass waveguides for the mid-infrared," Opt. Lett. 31, 1860-1862 (2006).
[CrossRef] [PubMed]

Opt. Mater. (1)

V. Nazabal, P. Nemec, J. Jedelsky, C. Duverger, J. Le Person, J. L. Adam, and M. Frumar, "Dysprosium doped amorphous chalcogenide films prepared by pulsed laser deposition," Opt. Mater. 29, 273-278 (2006).
[CrossRef]

Opt. Express (2)

Phys. Rev. B (2)

G. Lucovsky, F. L. Galeener, R. C. Keezer, R. H. Geils, and H. A. Six, "Structural interpretation of the infrared and Raman spectroscopy of glasses in the alloy system Ge1-xSx," Phys. Rev. B 10, 5134-5146 (1974).
[CrossRef]

S. Sugai, "Stochastic random network model in ge and Si chalcogenide glasses," Phys. Rev. B 35, 1345-1361 (1987).
[CrossRef]

Proc. SPIE (2)

J. Lumeau, M. Lequime, C. Amra, N. Kaiser, and H. A. Macleod, "Laser trimming of thin-film filters," Proc. SPIE 5963, 60-69 (2005).

M. L. Anne, V. Nazabal, V. Moizan, C. Boussard-Pledel, B. Bureau, J. L. Adam, P. Nemec, M. Frumar, A. Moreac, H. Lhermite, P. Camy, J. L. Doualan, J. P. Guin, J. Le Person, F. Colas, C. Compere, M. Lehaitre, F. Henrio, D. Bosc, J. Charrier, A.-M. Jurdyc, and B. Jacquier, "Chalcogenide waveguide for IR optical range," Proc. SPIE 6475, 647508 (2007).
[CrossRef]

Sens. Actuators B. Chem. (1)

K. Michel, B. Bureau, C. Boussard-Plédel, T. Jouan, J. L. Adam, K. Staubmann, and T. Baumann, "Monitoring of pollutant in waste water by infrared spectroscopy using chalcogenide glass optical fibers," Sens. Actuators B. Chem. 101, 252-259 (2004).
[CrossRef]

Other (3)

S. R. Elliott, Physics of Amorphous Materials (Longman, 1990).

B. Vidal, A. Fornier, and E. Pelletier, "Optical monitoring of nonquarterwave multilayer filters," Appl. Opt. 17, 1038-1047 (1978).

M. A. Popescu, Noncrystalline Chalcogenides (Kluwer, 2000).

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Figures (12)

Fig. 1
Fig. 1

Transmission of TAS and 2S1G bulk.

Fig. 2
Fig. 2

Transmission of (a) 2S1G and (b) EBD films obtained by PLD or EBD for several thicknesses deposited on silica substrates.

Fig. 3
Fig. 3

Refractive index dispersion curves of 2S1G and TAS EBD films obtained by VASE ellipsometry and spectrophotometry.

Fig. 4
Fig. 4

M-lines with Si prism-coupling configuration at 1540 n m for 2S1G PLD and EBD films and indices of refraction of 2S1G PLD and EBD films and TAS EBD film.

Fig. 5
Fig. 5

Raman scattering spectra of (a) 2S1G and (b) TAS bulk glass and EBD and PLD films.

Fig. 6
Fig. 6

AFM picture of 2S1G PLD and EBD films on fused-silica substrate (mapping of 2 μ m × 2 μ m ).

Fig. 7
Fig. 7

SEM images of 2S1G and TAS films deposited by EBD and PLD on silicon substrate.

Fig. 8
Fig. 8

Experimental and theoretical transmittance of a TAS∕cryolite passband in the spectral range of a tunable laser ( 1520 1570 n m ) .

Fig. 9
Fig. 9

Transmittance of a passband in the spectral range of a tunable laser ( 1520 1570 n m ) .

Fig. 10
Fig. 10

SEM image of a cross-section passband filter: Silica – ( C h - L ) 3 – 6Ch – ( L - C h ) 3 – Air.

Fig. 11
Fig. 11

Local illumination effect on the centered wavelength for a passband filter: Silica – ( C h - L ) 3 – 6Ch – ( L - C h ) 3 – Air.

Fig. 12
Fig. 12

SEM image showing rib waveguide of TAS deposited by EBD made by CF4 dry etching.

Tables (1)

Tables Icon

Table 1 Chemical Composition by EDS of 2S1G and TAS Bulk Glass and PLD and EBD Films

Metrics