Abstract

We investigate the influence of the binding layer on the reflectance of a Au film in vacuum ultraviolet (VUV) wavelength region theoretically and experimentally. The reflectance of Au films on quartz glass substrates with an ∼2 nm binding layer of Ti, Cr, and Ir are estimated and fabricated. Their reflectance in the 115140nm wavelength region are measured continuously by the reflectometer located in the National Synchroton Radiation Laboratory. The testing results show that the addition of the binding layer indeed greatly enhances the interfacial adhesion of the Au layer to the quartz glass substrate, but it also exerts a considerably adverse impact on the reflectance of the Au layer in VUV wavelength region. In near normal incidence, the reflectance of the Au layer with a 2nm thick binding layer is less than 20%, 5% lower than those without the binding layer. The material used for the binding layer has little impact on the reflectance if this layer is thin enough.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |

  1. E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).
  2. W. C. Walke, O. P. Rustgi, and G. L. Weissler, "Optical and photoelectric properties of thin metallic films in the vacuum ultraviolet," J. Opt. Soc. Am. 49, 471-475 (1959).
    [CrossRef]
  3. L. R. Canfield, G. Hass, and W. R. Hunter, "The optical properties of evaporated gold in the vacuum ultraviolet from 300 A to 2000 A," J. Phys. (Paris) 25, 124 (1964).
    [CrossRef]
  4. D. L. Windt, W. C. Cash, Jr., M. Scott, P. Arendt, B. Newnam, R. F. Fisher, and A. B. Swartzlander, "Optical constants for thin films of Ti, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Ir, Os, Pt, and Au from 24 A to 1216 A," Appl. Opt. 27, 246-278 (1988).
    [CrossRef] [PubMed]
  5. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge, 1999), pp. 735-790.
  6. S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, "Study of reflectance of Au films in the vacuum ultraviolet," Acta Opt. Sin. 27, 7 (2007) (in Chinese).

2007

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, "Study of reflectance of Au films in the vacuum ultraviolet," Acta Opt. Sin. 27, 7 (2007) (in Chinese).

1988

1964

L. R. Canfield, G. Hass, and W. R. Hunter, "The optical properties of evaporated gold in the vacuum ultraviolet from 300 A to 2000 A," J. Phys. (Paris) 25, 124 (1964).
[CrossRef]

1959

Acta Opt. Sin.

S. Y. Gan, X. D. Xu, Y. L. Hong, Y. Liu, and S. J. Fu, "Study of reflectance of Au films in the vacuum ultraviolet," Acta Opt. Sin. 27, 7 (2007) (in Chinese).

Appl. Opt.

J. Opt. Soc. Am.

J. Phys. (Paris)

L. R. Canfield, G. Hass, and W. R. Hunter, "The optical properties of evaporated gold in the vacuum ultraviolet from 300 A to 2000 A," J. Phys. (Paris) 25, 124 (1964).
[CrossRef]

Other

M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge, 1999), pp. 735-790.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1985).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

Model of dual absorbing layers on an absorbing substrate.

Fig. 2
Fig. 2

Calculated reflectance of a 20 nm Au film with a Cr binding layer of different thicknesses from 2 to 20 nm .

Fig. 3
Fig. 3

Comparison of Au reflectance with and without a Cr binding layer.

Fig. 4
Fig. 4

Reflectance comparison of a Au layer with different binding layers at various incident wavelengths.

Fig. 5
Fig. 5

Tested reflectance (E) of a 21 nm Au layer with and without an Ir and Ti binding layer, accompanied with the calculated results (C).

Fig. 6
Fig. 6

Tested reflectance (E) of a 31 nm Au layer with and without a Cr binding layer, accompanied with the calculated results (C).

Equations (36)

Equations on this page are rendered with MathJax. Learn more.

115 140 nm
2 nm
5 %
1132 ° C
10 2 Pa
20 nm
20 nm
120 nm
200 nm
20 nm
2 nm
120 nm
120 nm
( > 20 nm )
20 nm
2 nm
70 nm
0.5 nm
2 nm
Ar +
2.3 × 10 2 Pa
140 nm
21 nm
125 nm
31 nm
25 %
20 %
31 nm
31 nm
31 nm
2 nm
115 140 nm
20 nm
20 nm
21 nm
31 nm

Metrics