Abstract

A multilayer laminar-type holographic grating having an average groove density of 2400lines/mm is designed and fabricated for use with a soft-x-ray flat-field spectrograph covering the 0.700.75  nm region. A varied-line-spaced groove pattern is generated by the use of an aspheric wavefront recording system, and laminar-type grooves are formed by a reactive ion-etching method. Mo/SiO2 multilayers optimized for the emission lines of Hf-M, Si-K, and W-M are deposited on one of the three designated areas on the grating surface in tandem. The measured first-order diffraction efficiencies at the respective centers of the areas are 18%–20%. The flat-field spectrograph equipped with the grating indicates a spectral linewidth of 814  eV for the emission spectra generated from electron-impact x-ray sources.

© 2007 Optical Society of America

Full Article  |  PDF Article
Related Articles
Comparison of mechanically ruled versus holographically varied line-spacing gratings for a soft-x-ray flat-field spectrograph

Takashi Yamazaki, Eric Gullikson, Noboru Miyata, Masato Koike, Yoshihisa Harada, Stanley Mrowka, Ulf Kleineberg, James H. Underwood, Mihiro M. Yanagihara, and Kazuo Sano
Appl. Opt. 38(19) 4001-4003 (1999)

Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region

Masahiko Ishino, Philip A. Heimann, Hiroyuki Sasai, Masatoshi Hatayama, Hisataka Takenaka, Kazuo Sano, Eric M. Gullikson, and Masato Koike
Appl. Opt. 45(26) 6741-6745 (2006)

A 10,000 groove/mm multilayer coated grating for EUV spectroscopy

D.L. Voronov, E.H. Anderson, R. Cambie, S. Cabrini, S.D. Dhuey, L.I. Goray, E.M. Gullikson, F. Salmassi, T. Warwick, V.V. Yashchuk, and H.A. Padmore
Opt. Express 19(7) 6320-6325 (2011)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription