Abstract

A technique for correction of optical surfaces has recently been reported. The technique involves oscillating an optical surface back and forth behind a multiaperture mask to deposit a spatially varying dielectric layer onto the optic to create the desired surface profile. Details are reported of a modified mask design that inherently smooths the deposited layer used for these corrections. Results are also reported with regard to a recent correction that resulted in a thickness uniformity of better than λ∕2000 rms over a working aperture of 37.5 mm.

© 2007 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Deterministic control of thin film thickness in physical vapor deposition systems using a multi-aperture mask

John Arkwright, Ian Underhill, Nathan Pereira, and Mark Gross
Opt. Express 13(7) 2731-2741 (2005)

Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching

Holger Hartung, Ernst-Berhard Kley, Andreas Tünnermann, Thomas Gischkat, Frank Schrempel, and Werner Wesch
Opt. Lett. 33(20) 2320-2322 (2008)

Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography

Regina Soufli, Russell M. Hudyma, Eberhard Spiller, Eric M. Gullikson, Mark A. Schmidt, Jeff C. Robinson, Sherry L. Baker, Christopher C. Walton, and John S. Taylor
Appl. Opt. 46(18) 3736-3746 (2007)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription