Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Microstructure-related properties at 193 nm of MgF2 and GdF3 films deposited by a resistive-heating boat

Not Accessible

Your library or personal account may give you access

Abstract

MgF2 and GdF3 materials, used for a single-layer coating at 193  nm, are deposited by a resistive-heating boat at specific substrate temperatures. Optical characteristics (transmittance, refractive index, extinction coefficient, and optical loss) and microstructures (morphology and crystalline structure) are investigated and discussed. Furthermore, MgF2 is used as a low-index material, and GdF3 is used as a high-index material for multilayer coatings. Reflectance, stress, and the laser-induced damage threshold (LIDT) are studied. It is shown that MgF2 and GdF3 thin films, deposited on the substrate at a temperature of 300°C, obtain good quality thin films with high transmittance and little optical loss at 193  nm. For multilayer coatings, the stress mainly comes from MgF2, and the absorption comes from GdF3. Among those coatings, the sixteen-layer design, sub/(1.4L 0.6H)8∕air, shows the largest LIDT.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Microstructure of magnesium fluoride films deposited by boat evaporation at 193 nm

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 45(28) 7319-7324 (2006)

Fluoride antireflection coatings deposited at 193 nm

Ming-Chung Liu, Cheng-Chung Lee, Bo-Huei Liao, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 47(13) C214-C218 (2008)

Characterization of AlF3 thin films at 193 nm by thermal evaporation

Cheng-Chung Lee, Ming-Chung Liu, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 44(34) 7333-7338 (2005)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved