Abstract

We present the characterizations performed at the Institut Fresnel for the Measurement Problem of the Optical Interference Coatings 2004 Topical Meeting. A single layer coated on a fused-silica substrate of unknown composition and parameters is analyzed in terms of optogeometrical parameters, uniformity, and scattering. We determine the refractive index and the average thickness of the coating, then provide the localized determination of the thickness with a 2mm spatial resolution. Topography measurements include atomic force microscopy and angle-resolved scattering measurements. These results are completed thanks to a Taylor Hobson noncontact 3D surface profiler.

© 2006 Optical Society of America

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References

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  1. J. P. Borgogno, B. Lazaridès, and P. Roche, 'An improved method for the determination of the extinction coefficient of thin film materials,' Thin Solid Films 101, 209-220 (1983).
    [CrossRef]
  2. L. Abel-Tiberini, F. Lemarquis, and M. Lequime, 'Dedicated spectrophotometer for localized transmittance and reflectance measurements,' (in this issue).
  3. C. Deumié, R. Richier, P. Dumas, and C. Amra, 'Multiscale roughness in optical multilayers: atomic force microscopy and light scattering,' Appl. Opt. 35, 5583-5594 (1996).
    [CrossRef] [PubMed]
  4. Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
    [CrossRef]
  5. C. Amra, D. Torricini, and P. Roche, 'Multiwavelength (0.45-10.6 µm) angle-resolved scatterometer or how to extend the optical window,' Appl. Opt. 32, 5462-5474 (1993).
    [CrossRef] [PubMed]
  6. C. Amra, 'Light scattering from multilayer optics. I. Tools of investigation,' J. Opt. Soc. Am. A 11, 197-210 (1994).
    [CrossRef]
  7. C. Amra, P. Roche, and E. Pelletier, 'Interface roughness cross-correlation laws deduced from scattering diagram measurements on optical multilayers: effect of the material grain size,' J. Opt. Soc. Am. B 4, 1087-1093 (1987).
    [CrossRef]
  8. D. S. Kassam, A. Duparré, K. Hehl, P. Bussemer, and J. Neubert, 'Light scattering from the volume of optical thin films: theory and experiment,' Appl. Opt. 31, 1304-1313 (1992).
    [CrossRef] [PubMed]
  9. M. Elson, J. P. Rahn, and J. M. Bennett, 'Light scattering from multilayer optics: comparison of theory and experiment,' Appl. Opt. 19, 669-679 (1980).
    [CrossRef] [PubMed]
  10. S. Jackobs, A. Duparre, and H. Truckenbrodt, 'AFM and light scattering measurement of thin films for applications in the UV spectral region,' Int. J. Mach. Tools Manuf. 35, 147-153 (1997).

1997 (1)

S. Jackobs, A. Duparre, and H. Truckenbrodt, 'AFM and light scattering measurement of thin films for applications in the UV spectral region,' Int. J. Mach. Tools Manuf. 35, 147-153 (1997).

1996 (1)

1994 (1)

1993 (2)

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

C. Amra, D. Torricini, and P. Roche, 'Multiwavelength (0.45-10.6 µm) angle-resolved scatterometer or how to extend the optical window,' Appl. Opt. 32, 5462-5474 (1993).
[CrossRef] [PubMed]

1992 (1)

1987 (1)

1983 (1)

J. P. Borgogno, B. Lazaridès, and P. Roche, 'An improved method for the determination of the extinction coefficient of thin film materials,' Thin Solid Films 101, 209-220 (1983).
[CrossRef]

1980 (1)

Abel-Tiberini, L.

L. Abel-Tiberini, F. Lemarquis, and M. Lequime, 'Dedicated spectrophotometer for localized transmittance and reflectance measurements,' (in this issue).

Amra, C.

André, E.

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Bennett, J. M.

Borgogno, J. P.

J. P. Borgogno, B. Lazaridès, and P. Roche, 'An improved method for the determination of the extinction coefficient of thin film materials,' Thin Solid Films 101, 209-220 (1983).
[CrossRef]

Bouffakhreddine, B.

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Bussemer, P.

Deumié, C.

Dumas, P.

Dumas, Ph.

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Duparre, A.

S. Jackobs, A. Duparre, and H. Truckenbrodt, 'AFM and light scattering measurement of thin films for applications in the UV spectral region,' Int. J. Mach. Tools Manuf. 35, 147-153 (1997).

Duparré, A.

Elson, M.

Galindo, R.

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Hehl, K.

Jackobs, S.

S. Jackobs, A. Duparre, and H. Truckenbrodt, 'AFM and light scattering measurement of thin films for applications in the UV spectral region,' Int. J. Mach. Tools Manuf. 35, 147-153 (1997).

Kassam, D. S.

Lazaridès, B.

J. P. Borgogno, B. Lazaridès, and P. Roche, 'An improved method for the determination of the extinction coefficient of thin film materials,' Thin Solid Films 101, 209-220 (1983).
[CrossRef]

Lemarquis, F.

L. Abel-Tiberini, F. Lemarquis, and M. Lequime, 'Dedicated spectrophotometer for localized transmittance and reflectance measurements,' (in this issue).

Lequime, M.

L. Abel-Tiberini, F. Lemarquis, and M. Lequime, 'Dedicated spectrophotometer for localized transmittance and reflectance measurements,' (in this issue).

Neubert, J.

Pelletier, E.

Rahn, J. P.

Richier, R.

Roche, P.

Salvan, F.

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Torricini, D.

Truckenbrodt, H.

S. Jackobs, A. Duparre, and H. Truckenbrodt, 'AFM and light scattering measurement of thin films for applications in the UV spectral region,' Int. J. Mach. Tools Manuf. 35, 147-153 (1997).

Vatel, O.

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Appl. Opt. (4)

Europhys. Lett. (1)

Ph. Dumas, B. Bouffakhreddine, C. Amra, O. Vatel, E. André, R. Galindo, and F. Salvan, 'Cross-characterization of surface microroughness using near field microscopies and optical techniques,' Europhys. Lett. 22, 717-722 (1993).
[CrossRef]

Int. J. Mach. Tools Manuf. (1)

S. Jackobs, A. Duparre, and H. Truckenbrodt, 'AFM and light scattering measurement of thin films for applications in the UV spectral region,' Int. J. Mach. Tools Manuf. 35, 147-153 (1997).

J. Opt. Soc. Am. A (1)

J. Opt. Soc. Am. B (1)

Thin Solid Films (1)

J. P. Borgogno, B. Lazaridès, and P. Roche, 'An improved method for the determination of the extinction coefficient of thin film materials,' Thin Solid Films 101, 209-220 (1983).
[CrossRef]

Other (1)

L. Abel-Tiberini, F. Lemarquis, and M. Lequime, 'Dedicated spectrophotometer for localized transmittance and reflectance measurements,' (in this issue).

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Figures (15)

Fig. 1
Fig. 1

Reflectance (gray curve) and transmittance (black curve) as a function of wavelength corresponding to a semi-infinite substrate (without backside reflectance).

Fig. 2
Fig. 2

Refractive index determination by M1 (light gray curves), M2 (gray curves), and M3 (black curves).

Fig. 3
Fig. 3

Fit between experimental and theoretical (M3) reflectance (gray) and transmittance (black). Crosses, experimental values; curves, theoretical values.

Fig. 4
Fig. 4

Spatial distribution of the thickness of the coating.

Fig. 5
Fig. 5

AFM measurements of face 1.

Fig. 6
Fig. 6

Sections of some dust on the surface.

Fig. 7
Fig. 7

AFM measurements of face 1: 3D views.

Fig. 8
Fig. 8

AFM measurements of face 2.

Fig. 9
Fig. 9

Roughness spectra obtained from AFM measurements of face 1.

Fig. 10
Fig. 10

Roughness spectra obtained from AFM measurements of face 2.

Fig. 11
Fig. 11

Angular scattering measurements on the OIC sample. BRDF, bidirectional reflectance distribution function.

Fig. 12
Fig. 12

Roughness spectrum deduced from AFM and 633 nm ARS measurements.

Fig. 13
Fig. 13

OIC3 sample surface profile (coated face).

Fig. 14
Fig. 14

OIC3 sample surface profile (rear face).

Fig. 15
Fig. 15

Comparison of roughness spectra deduced from different methods.

Tables (1)

Tables Icon

Table 1 Comparison between Three Index Determination Methods

Equations (4)

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n ( λ ) = a 0 + a 2 / λ 2 + a 3 / λ 3 + a 4 / λ 4 + a 5 / λ 5 ,
k ( λ ) = b 1 / λ b 2 .
D = 1 2 N data i = 1 N data [ T exp ( λ i ) T fitted ( λ i ) 100 ] 2 + [ R exp ( λ i ) R fitted ( λ i ) 100 ] 2 ,
γ ( σ ) = 4 π 2 S h ^ ( σ ) 2 = ( 2 π L ) 2 h ^ ( σ ) 2 .

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