Abstract

${\text{TiO}}_{\text{2}}{\text{―Ta}}_2{\text{O}}_5$ composite films were prepared by a radio frequency ion-beam sputtering deposition process, and the refractive indices and extinction coefficients of the composite films were found to be between those of the ${\text{TiO}}_{\text{2}}$ and ${\text{Ta}}_2{\text{O}}_5$ films. The structure of the as-deposited films was amorphous, and the surface roughness was approximately $0.1\text{\hspace{0.17em} nm}$. The residual stress of the composite films was less than that of pure ${\text{TiO}}_{\text{2}}$ film. The structure of the composite films after annealing was amorphous, with low surface roughness and slightly increased residual stress. The film containing 6.3% ${\text{TiO}}_{\text{2}}$ displayed better properties than either the pure ${\text{TiO}}_{\text{2}}$ or the pure ${\text{Ta}}_2{\text{O}}_5$ film.

© 2006 Optical Society of America

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