Abstract

Chromatic confocal spectral interferomertry (CCSI) is a novel scheme for topography measurements that combines the techniques of spectral interferometry and chromatic confocal microscopy. This hybrid method allows for white-light interferometric detection with a high NA in a single-shot manner. To the best of our knowledge, CCSI is the first interferometric method that utilizes a confocally filtered and chromatically dispersed focus for detection and simultaneously allows for retrieval of the depth position of reflecting or scattering objects utilizing the phase (modulation frequency) of the interferometric signals acquired. With the chromatically dispersed focus, the depth range of the sensor is decoupled from the NA of the microscope objective.

© 2006 Optical Society of America

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