Abstract

A novel scheme for the integration of diffractive optical elements onto silicon is presented. The processing is made in reverse order, meaning that the process of structuring the optical elements on the wafer precedes the silicon microstructuring. The first processing step on the wafer is the hot embossing of the optical microstructures into an amorphous fluorocarbon polymer spin coated on the wafer. The cured polymer forms a highly stable material with excellent optical properties. The remaining silicon processing is thus performed with the diffractive optical elements already in place. Two different diffractive structures were used in the development of the method—a (Fresnel) lens with a rather low f-number and a diffractive element producing a fan-out of a large number of paraxial beams.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques

Jorge Albero, Lukasz Nieradko, Christophe Gorecki, Heidi Ottevaere, Virginia Gomez, Hugo Thienpont, Juha Pietarinen, Birgit Päivänranta, and Nicolas Passilly
Opt. Express 17(8) 6283-6292 (2009)

Flexible, fast, and low-cost production process for polymer based diffractive optics

Maik Rahlves, Maher Rezem, Kristian Boroz, Sebastian Schlangen, Eduard Reithmeier, and Bernhard Roth
Opt. Express 23(3) 3614-3622 (2015)

Rapid, direct fabrication of antireflection-coated microlens arrays by photoembossing

Ko Hermans, Shabnam Zaker Hamidi, Anne B. Spoelstra, Cees W. M. Bastiaansen, and Dirk J. Broer
Appl. Opt. 47(35) 6512-6517 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription