Abstract

A method is presented for position and displacement measurements of the six degrees of freedom by use of a patterned surface element observed by a static interferometric vision system. The surface element is made of a regular pattern of circular holes etched on a chromium layer deposited onto a flat glass plate. The in-plane coordinates (x, y, θz) are reconstructed with a subpixel resolution by a vision method based on phase measurements. The out-of-plane coordinates (z, θx, θy) are reconstructed by phase-shifting interferometry. Resolutions achieved by the proposed method are in the range of microradians for the measurement of angles and of nanometers for the position and displacement.

© 2005 Optical Society of America

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