Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Two-dimensional thickness measurements based on internal reflection ellipsometry

Not Accessible

Your library or personal account may give you access

Abstract

An imaging ellipsometer technique on internal reflection geometry that can measure the thickness distribution of a thin film possessing an assumed refractive index is described. Because a prism is used for the internal reflection geometry, it was theoretically predicted that angular derivation from the normal incidence on the prism surface affects only the Ψ value by a factor of 0.97 at maximum. Measurements were carried out for an optical system of silica substrate–TiO2 layer–silica layer–protein film–air, with a thin-film array of dried protein as the sample film. Thickness of the protein films was two-dimensionally estimated only from the measured map of the Δ value by use of the simulated relationship between the thickness and the Δ value. The thickness map obtained was coincident on the whole with the results according to a mechanical scanning. The detection limit was approximately ±0.2 nm. These findings validate the optical effect of a high-index additional layer to improve the sensitivity and precision of thickness measurements of the sample film on transparent substrates.

© 2005 Optical Society of America

Full Article  |  PDF Article
More Like This
Thickness measurements on transparent substrates based on reflection ellipsometry. I. Optical effects of high-refractive-index additional layers

Soichi Otsuki, Koji Ohta, Kaoru Tamada, and Shin-ichi Wakida
Appl. Opt. 44(28) 5910-5918 (2005)

Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry

Yao Shan, Guohang Hu, Liyuan Gu, Hongbo He, Aijun Zeng, Yuanan Zhao, and Anna Sytchkova
Appl. Opt. 56(28) 7898-7904 (2017)

Total internal reflection ellipsometry: principles and applications

Hans Arwin, Michal Poksinski, and Knut Johansen
Appl. Opt. 43(15) 3028-3036 (2004)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved