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Atomic hydrogen in the plume of a dc-arcjet plasma is monitored by use of two-photon excited laser-induced fluorescence (LIF) during the deposition of diamond film. The effluent of a dc-arc discharge in hydrogen and argon forms a luminous plume as it flows through a converging–diverging nozzle into a reactor. When a trace of methane (<2%) is added to the flow in the diverging part of the nozzle, diamond thin film grows on a water-cooled molybdenum substrate from the reactive mixture. LIF of atomic hydrogen in the arcjet plume is excited to the 3S and 3D levels with two photons near 205 nm, and the subsequent fluorescence is observed at Balmer-α near 656 nm. Spatially resolved LIF measurements of atomic hydrogen are made as a function of the ratio of hydrogen to argon feedstock gas, methane addition, and reactor pressure. At lower reactor pressures, time-resolved LIF measurements are used to verify our collisional quenching correction algorithm. The quenching rate coefficients for collisions with the major species in the arcjet (Ar, H, and H2) do not change with gas temperature variations in the plume (T < 2300 K). Corrections of the LIF intensity measurements for the spatial variation of collisional quenching are important to determine relative distributions of the atomic hydrogen concentration. The relative atomic hydrogen concentrations measured here are calibrated with an earlier calorimetric determination of the feedstock hydrogen dissociation to provide quantitative hydrogen-atom concentration distributions.
© 2005 Optical Society of America
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