Abstract

Ion-beam sputtering deposition has been used in two ways, as granular multilayers and as cosputtered film, to elaborate Ag-Si3N4 nanocermets. Multilayer deposition creates slightly oblate clusters, and cosputtering produces two cluster families: elongated clusters within the Si3N4 matrix and larger ones at the film surface. The transmittance spectra of these nanocermets are characterized by a surface plasmon resonance. In the reported research the position of this resonance is related to the morphological properties of silver nanoclusters, which are studied by transmission-electron microscopy, grazing-incidence small-angle x-ray scattering, and atomic-force microscopy.

© 2003 Optical Society of America

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