Abstract

Thin-film interference has been observed in the transmittance of a filter consisting of 263.5-nm-thick magnesium with a 32.2-nm-thick aluminum layer on each side. The transmittance, measured by synchrotron radiation, has an oscillatory behavior in the 25–70-nm wavelength range. On the basis of the calculation of the transmittance, the oscillatory behavior results from interference associated with the relatively transmissive magnesium and aluminum layers and the reflection from the oxidized aluminum surface layers. The bandpass performance of magnesium and aluminum layers deposited on a silicon photodiode detector is presented.

© 2002 Optical Society of America

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  1. J. A. R. Samson, “Filters and window materials,” in Techniques of Vacuum Ultraviolet Spectroscopy (Pied, Lincoln, Neb., 1967), pp. 180–208.
  2. J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
    [CrossRef]
  3. W. R. Hunter, “Measurement of optical properties of materials in the vacuum ultraviolet spectral region,” Appl. Opt. 21, 2103–2114 (1982).
    [CrossRef] [PubMed]
  4. W. R. Hunter, D. W. Angel, R. Tousey, “Thin films and their uses for the extreme ultraviolet,” Appl. Opt. 4, 891–898 (1965).
    [CrossRef]
  5. Luxel Corporation, P.O. Box 1879, Friday Harbor, Wash. 98250; www.luxel.com .
  6. J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
    [CrossRef]
  7. W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods Phys. Res. A 246, 465–468 (1986).
    [CrossRef]
  8. J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, A. V. Vinogradov, “Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength,” Appl. Opt. 41, 1846–1851 (2002).
    [CrossRef] [PubMed]
  9. R. F. Potter, “Basic parameters for measuring optical properties,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 11–16.
    [CrossRef]
  10. F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
    [CrossRef]
  11. W. J. Tropf, M. E. Thomas, “Aluminum oxide (Al2O3) revisited,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 653–682.
  12. D. Y. Smith, E. Shiles, M. Inokuti, “The optical properties of metallic aluminum,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 369–406.
    [CrossRef]
  13. D. W. Lynch, W. R. Hunter, “Introduction to the data for several metals,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 233–239.
  14. B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993); updated optical constants were obtained from the Internet site cindy.lbl.gov/optical_constants .
    [CrossRef]
  15. P. H. Berning, “Theory and calculations of optical thin films,” in Physics of Thin Films, G. Haas, ed. (Academic, New York, 1963), Vol. 1, pp. 69–121.
  16. J. H. Apfel, “Electric fields in multilayers at oblique incidence,” Appl. Opt. 15, 2339–2343 (1976).
    [CrossRef] [PubMed]
  17. J. F. Seely, “Responsivity model for a silicon photodiode in the extreme ultraviolet,” in Instrumentation for UV/EUV Astronomy and Solar Missions, S. Fineschi, C. Korendyke, O. Siegmund, B. Woodgate, eds., Proc. SPIE4139, 1–7 (2000).
    [CrossRef]
  18. H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
    [CrossRef]
  19. H. R. Philipp, “Silicon dioxide (SiO2) (glass),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 749–763.
    [CrossRef]
  20. D. F. Edwards, “Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 547–569.
    [CrossRef]
  21. R. Vest, Electron and Optical Physics Division, National Institute of Standards and Technology, Gaithersburg, Md. 20899 (personal communication, 1999).
  22. A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
    [CrossRef]

2002 (1)

1997 (1)

H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
[CrossRef]

1993 (1)

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993); updated optical constants were obtained from the Internet site cindy.lbl.gov/optical_constants .
[CrossRef]

1990 (1)

F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
[CrossRef]

1989 (1)

J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

1986 (1)

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods Phys. Res. A 246, 465–468 (1986).
[CrossRef]

1982 (1)

1976 (1)

1965 (1)

Angel, D. W.

Apfel, J. H.

Artioukov, I. A.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Berning, P. H.

P. H. Berning, “Theory and calculations of optical thin films,” in Physics of Thin Films, G. Haas, ed. (Academic, New York, 1963), Vol. 1, pp. 69–121.

Davis, J. C.

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993); updated optical constants were obtained from the Internet site cindy.lbl.gov/optical_constants .
[CrossRef]

Edwards, D. F.

D. F. Edwards, “Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 547–569.
[CrossRef]

Funsten, H. O.

H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
[CrossRef]

Gullikson, E. M.

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993); updated optical constants were obtained from the Internet site cindy.lbl.gov/optical_constants .
[CrossRef]

Hanser, F.

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

Henke, B. L.

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993); updated optical constants were obtained from the Internet site cindy.lbl.gov/optical_constants .
[CrossRef]

Holland, G.

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

Hunter, W. R.

J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods Phys. Res. A 246, 465–468 (1986).
[CrossRef]

W. R. Hunter, “Measurement of optical properties of materials in the vacuum ultraviolet spectral region,” Appl. Opt. 21, 2103–2114 (1982).
[CrossRef] [PubMed]

W. R. Hunter, D. W. Angel, R. Tousey, “Thin films and their uses for the extreme ultraviolet,” Appl. Opt. 4, 891–898 (1965).
[CrossRef]

D. W. Lynch, W. R. Hunter, “Introduction to the data for several metals,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 233–239.

Inokuti, M.

D. Y. Smith, E. Shiles, M. Inokuti, “The optical properties of metallic aluminum,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 369–406.
[CrossRef]

Kondratenko, V.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Kondratenko, V. V.

Korde, R.

H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
[CrossRef]

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

Lindblom, J. F.

F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
[CrossRef]

Lynch, D. W.

D. W. Lynch, W. R. Hunter, “Introduction to the data for several metals,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 233–239.

Penkov, O.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Pershin, Y. P.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Pershin, Yu. P.

Philipp, H. R.

H. R. Philipp, “Silicon dioxide (SiO2) (glass),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 749–763.
[CrossRef]

Potter, R. F.

R. F. Potter, “Basic parameters for measuring optical properties,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 11–16.
[CrossRef]

Powell, F. R.

F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
[CrossRef]

Powell, S. F.

F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
[CrossRef]

Rife, J.

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

Rife, J. C.

J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods Phys. Res. A 246, 465–468 (1986).
[CrossRef]

Ritzau, S. M.

H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
[CrossRef]

Sadeghi, H. R.

J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

Samson, J. A. R.

J. A. R. Samson, “Filters and window materials,” in Techniques of Vacuum Ultraviolet Spectroscopy (Pied, Lincoln, Neb., 1967), pp. 180–208.

Seely, J. F.

J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, A. V. Vinogradov, “Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength,” Appl. Opt. 41, 1846–1851 (2002).
[CrossRef] [PubMed]

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

J. F. Seely, “Responsivity model for a silicon photodiode in the extreme ultraviolet,” in Instrumentation for UV/EUV Astronomy and Solar Missions, S. Fineschi, C. Korendyke, O. Siegmund, B. Woodgate, eds., Proc. SPIE4139, 1–7 (2000).
[CrossRef]

Shiles, E.

D. Y. Smith, E. Shiles, M. Inokuti, “The optical properties of metallic aluminum,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 369–406.
[CrossRef]

Smith, D. Y.

D. Y. Smith, E. Shiles, M. Inokuti, “The optical properties of metallic aluminum,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 369–406.
[CrossRef]

Suszcynsky, D. M.

H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
[CrossRef]

Thomas, M. E.

W. J. Tropf, M. E. Thomas, “Aluminum oxide (Al2O3) revisited,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 653–682.

Tousey, R.

Tropf, W. J.

W. J. Tropf, M. E. Thomas, “Aluminum oxide (Al2O3) revisited,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 653–682.

Uspenskii, Y. A.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Uspenskii, Yu. A.

Vedder, P. W.

F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
[CrossRef]

Vest, R.

R. Vest, Electron and Optical Physics Division, National Institute of Standards and Technology, Gaithersburg, Md. 20899 (personal communication, 1999).

Vinogradov, A. V.

J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, A. V. Vinogradov, “Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength,” Appl. Opt. 41, 1846–1851 (2002).
[CrossRef] [PubMed]

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Voronov, D. L.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Weaver, J.

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

Wise, J.

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

Zubaryev, E.

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

Appl. Opt. (4)

At. Data Nucl. Data Tables (1)

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993); updated optical constants were obtained from the Internet site cindy.lbl.gov/optical_constants .
[CrossRef]

IEEE Trans. Nucl. Sci. (1)

H. O. Funsten, D. M. Suszcynsky, S. M. Ritzau, R. Korde, “Response of 100% internal quantum efficiency silicon photodiodes to 200 eV-40 keV electrons,” IEEE Trans. Nucl. Sci. 44, 2561–2565 (1997).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. A (1)

W. R. Hunter, J. C. Rife, “An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiation,” Nucl. Instrum. Methods Phys. Res. A 246, 465–468 (1986).
[CrossRef]

Opt. Eng. (1)

F. R. Powell, P. W. Vedder, J. F. Lindblom, S. F. Powell, “Thin film filter performance for extreme ultraviolet and x-ray applications,” Opt. Eng. 29, 614–624 (1990).
[CrossRef]

Rev. Sci. Instrum. (1)

J. C. Rife, H. R. Sadeghi, W. R. Hunter, “Upgrades and recent performance of the grating/crystal monochromator,” Rev. Sci. Instrum. 60, 2064–2067 (1989).
[CrossRef]

Other (13)

R. F. Potter, “Basic parameters for measuring optical properties,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 11–16.
[CrossRef]

P. H. Berning, “Theory and calculations of optical thin films,” in Physics of Thin Films, G. Haas, ed. (Academic, New York, 1963), Vol. 1, pp. 69–121.

Luxel Corporation, P.O. Box 1879, Friday Harbor, Wash. 98250; www.luxel.com .

W. J. Tropf, M. E. Thomas, “Aluminum oxide (Al2O3) revisited,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 653–682.

D. Y. Smith, E. Shiles, M. Inokuti, “The optical properties of metallic aluminum,” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 369–406.
[CrossRef]

D. W. Lynch, W. R. Hunter, “Introduction to the data for several metals,” in Handbook of Optical Constants of Solids III, E. D. Palik, ed. (Academic, San Diego, Calif., 1998), pp. 233–239.

H. R. Philipp, “Silicon dioxide (SiO2) (glass),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 749–763.
[CrossRef]

D. F. Edwards, “Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, San Diego, Calif., 1985), pp. 547–569.
[CrossRef]

R. Vest, Electron and Optical Physics Division, National Institute of Standards and Technology, Gaithersburg, Md. 20899 (personal communication, 1999).

A. V. Vinogradov, Y. P. Pershin, E. Zubaryev, D. L. Voronov, O. Penkov, V. Kondratenko, Y. A. Uspenskii, I. A. Artioukov, J. F. Seely, “Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors,” in Soft X-Ray Lasers and Applications IV, E. Fill, J. Rocca, eds., Proc. SPIE4505, 230–235 (2001).
[CrossRef]

J. A. R. Samson, “Filters and window materials,” in Techniques of Vacuum Ultraviolet Spectroscopy (Pied, Lincoln, Neb., 1967), pp. 180–208.

J. F. Seely, R. Korde, F. Hanser, J. Wise, G. Holland, J. Weaver, J. Rife, “Characterization of silicon photodiode detectors with multilayer filter coatings for 17-150 Å,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. Woodgate, R. Kimble, eds., Proc. SPIE3764, 103–109 (1999).
[CrossRef]

J. F. Seely, “Responsivity model for a silicon photodiode in the extreme ultraviolet,” in Instrumentation for UV/EUV Astronomy and Solar Missions, S. Fineschi, C. Korendyke, O. Siegmund, B. Woodgate, eds., Proc. SPIE4139, 1–7 (2000).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Detector current generated by the synchrotron radiation beam passing through the Al-Mg-Al beamline filter (curve 1) and the Sn beamline filter (curve 2).

Fig. 2
Fig. 2

Measured transmittances of (a) the Al-Mg-Al filter and (b) the Ti filter.

Fig. 3
Fig. 3

Comparison of the measured transmittance (data points) and the calculated transmittance (curve) of the Al-Mg-Al filter.

Fig. 4
Fig. 4

(a) Calculated absorptance A, transmittance T, and reflectance R of the Al-Mg-Al filter. (b) The calculated values as functions of the Mg thickness and for 50-nm wavelength incident radiation.

Fig. 5
Fig. 5

Calculated volumetric absorption (in units of µm-1) of the Al-Mg-Al filter as a function of the incident wavelength and the depth into the filter layers: 1, Al2O3; 2, Al; 3, Mg; 4, Al; and 5, Al2O3.

Fig. 6
Fig. 6

Calculated absorptance of the Al-Mg-Al filter layers: 1, Al2O2; 2, Al; 3, Mg; 4, Al; and 5, Al2O3.

Fig. 7
Fig. 7

Measured responsivity of the uncoated silicon photodiode (data points), the calculated responsivity of the uncoated photodiode (curve 1), and the calculated responsivity of the Al-Mg-Al coated photodiode (curve 2).

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