Abstract

We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston’s law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.

© 2002 Optical Society of America

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References

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  1. J. M. Bennett, “Comparison of techniques for measuring the roughness of optical surfaces,” Opt. Eng. 24, 380–387 (1985).
    [CrossRef]
  2. J. C. Lambropoulos, “Fracture and material removal mechanisms from rough grinding to polishing,” in Optical Fabrication and Testing, Vol. 12 of OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 16–18.
  3. F. W. Preston, “The theory and design of plate glass polishing machines,” J. Soc. Glass Technol. 11, 214–256 (1927).
  4. R. M. van der Bijl, O. W. Fähnle, H. van Brug, J. J. M. Braat, “In-process monitoring of grinding and polishing of optical surfaces,” Appl. Opt. 39, 3300–3303 (2000).
    [CrossRef]

2000 (1)

1985 (1)

J. M. Bennett, “Comparison of techniques for measuring the roughness of optical surfaces,” Opt. Eng. 24, 380–387 (1985).
[CrossRef]

1927 (1)

F. W. Preston, “The theory and design of plate glass polishing machines,” J. Soc. Glass Technol. 11, 214–256 (1927).

Bennett, J. M.

J. M. Bennett, “Comparison of techniques for measuring the roughness of optical surfaces,” Opt. Eng. 24, 380–387 (1985).
[CrossRef]

Braat, J. J. M.

Fähnle, O. W.

Lambropoulos, J. C.

J. C. Lambropoulos, “Fracture and material removal mechanisms from rough grinding to polishing,” in Optical Fabrication and Testing, Vol. 12 of OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 16–18.

Preston, F. W.

F. W. Preston, “The theory and design of plate glass polishing machines,” J. Soc. Glass Technol. 11, 214–256 (1927).

van Brug, H.

van der Bijl, R. M.

Appl. Opt. (1)

J. Soc. Glass Technol. (1)

F. W. Preston, “The theory and design of plate glass polishing machines,” J. Soc. Glass Technol. 11, 214–256 (1927).

Opt. Eng. (1)

J. M. Bennett, “Comparison of techniques for measuring the roughness of optical surfaces,” Opt. Eng. 24, 380–387 (1985).
[CrossRef]

Other (1)

J. C. Lambropoulos, “Fracture and material removal mechanisms from rough grinding to polishing,” in Optical Fabrication and Testing, Vol. 12 of OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1998), pp. 16–18.

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Figures (3)

Fig. 1
Fig. 1

Overview of the iTIRM setup.

Fig. 2
Fig. 2

Ductile-to-brittle transition monitored with iTIRM. The normalized intensity (corrected for laser fluctuations) is plotted against time.

Fig. 3
Fig. 3

Monitoring of two identical polishing processes that differ in the applied load (1 and 4 kg). iTIRM output: intensity at the detector versus time with the Nomarski images of the surface at the beginning of the process (284-nm rms roughness), halfway through the process (121-nm rms roughness), and at the eventually reached surface roughness of 1-nm rms.

Equations (2)

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Δt=tF-tB.
ΘI=IF/IB.

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