Abstract
We describe an instrument for the measurement of surface flatness, parallelism, and size (thickness) of plane-parallel parts in a single measurement to 1σ gauge capability of 0.02, 0.03, and 0.06 µm, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.
© 2002 Optical Society of America
Full Article | PDF ArticleMore Like This
Juntao Zhang, Bo Pan, Huan Liu, Xu Zhu, Renke Kang, Dongxing Du, and Jiang Guo
Appl. Opt. 61(17) 4993-5001 (2022)
Hyug-Gyo Rhee and Seung-Woo Kim
Appl. Opt. 41(28) 5921-5928 (2002)
Yang Zhao, Greg Schmidt, Duncan T. Moore, and Jonathan D. Ellis
Appl. Opt. 54(25) 7693-7700 (2015)