Abstract

Using a Lorentz–Drude model, we determine optical constants in the range from 300 to 1000 nm for CdIn2O4 thin films deposited by rf reactive sputtering from the measurement of transmission and reflection. We discuss the effect of deposition conditions including substrate temperature and oxygen concentration in a reactive atmosphere and postdeposition heat treatment on optical constants, absorption properties, and the bandgap of thin films. It can be found that changes in optical constants and bandgap are in good agreement with those of the carrier concentration. Therefore an optical constant could be related to the film’s inherent properties, such as the energy gap and carrier concentration, and might be regarded as a useful probe for monitoring in situ the film process. A study of Urbach tails reveals that the effect of substrate temperature on the characteristic photon energy is negligible.

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Amorphous In2Ga2ZnO7 films with adjustable structural, electrical and optical properties deposited by magnetron sputtering

Xianjie Zhou, Jiwen Xu, Ling Yang, Xiaosheng Tang, Qiuping Wei, and Zhiming Yu
Opt. Mater. Express 5(7) 1628-1634 (2015)

Reduction of the bulk absorption coefficient in silicon optics for high-energy lasers through defect engineering

William A. Goodman and Mark S. Goorsky
Appl. Opt. 34(18) 3367-3373 (1995)

Optically defined plasmonic waveguides in crystalline semiconductors at optical frequencies

Herman M. K. Wong and Amr S. Helmy
J. Opt. Soc. Am. B 30(4) 1000-1007 (2013)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription