Abstract

MoRu–Be multilayer coatings were applied to two diffraction gratings for the purpose of enhancing their normal-incidence efficiency in the 11.1–12.0-nm wavelength range. The grating substrates were replicas of a holographic master grating that had a blazed groove profile with 2400 grooves/mm and a 2-m radius of curvature. The relatively low average microroughness (0.8 nm) of the grating surfaces contributed to the relatively high groove efficiency of the grating substrates and the reflectance of the MoRu–Be multilayer coatings. The peak efficiency, measured with synchrotron radiation, was 10.4% in the second diffraction order at a wavelength of 11.37 nm.

© 2001 Optical Society of America

MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength

C. Montcalm, S. Bajt, and J. F. Seely
Opt. Lett. 26(3) 125-127 (2001)

Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm

Benjawan Sae-Lao, Saša Bajt, Claude Montcalm, and John F. Seely
Appl. Opt. 41(13) 2394-2400 (2002)

Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength

John F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, and A. V. Vinogradov
Appl. Opt. 41(10) 1846-1851 (2002)

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter
Appl. Opt. 36(31) 8206-8213 (1997)

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)