Abstract

In sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detection of sinusoidal phase-modulation amplitude Z b of the interference signal that is produced by sinusoidal scanning of the wavelength of a light source. A light source with a large scanning width of wavelength is created by use of a superluminescent laser diode for the error in the measured value obtained by Z b to be smaller than half of the central wavelength. In this situation the measured value can be combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. A sinusoidal wavelength-scanning interferometer with the light source measures an OPD over a few tens of micrometers with a high accuracy of a few nanometers.

© 2000 Optical Society of America

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References

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  1. P. de Groot, S. Kishner, “Synthetic wavelength stabilization for two-color laser-diode interferometry,” Appl. Opt. 30, 4026–4033 (1991).
    [CrossRef] [PubMed]
  2. R. Onodera, Y. Ishii, “Two-wavelength laser-diode interferometer with fractional fringe rechniques,” Appl. Opt. 34, 4740–4746 (1995).
    [CrossRef] [PubMed]
  3. H. Kikuta, K. Iwata, R. Nagata, “Distance measurement by the wavelength shift of laser diode light,” Appl. Opt. 25, 2976–2980 (1986).
    [CrossRef] [PubMed]
  4. O. Sasaki, T. Yoshida, T. Suzuki, “Double sinusoidal phase-modulating laser diode interferometer for distance measurement,” Appl. Opt. 30, 3617–3621 (1991).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  6. F. Lexer, C. K. Hitzenberger, A. F. Fercher, M. Kulhavy, “Wavelength-tuning interferometry of intraocular distances,” Appl. Opt. 36, 6548–6553 (1997).
    [CrossRef]
  7. T. Li, R. G. May, A. Wang, R. O. Claus, “Optical scanning extrinsic Fabry–Perot interferometer for absolute microdisplacement measurement,” Appl. Opt. 36, 8859–8861 (1997).
    [CrossRef]
  8. X. Dai, K. Seta, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol. 9, 1013–1035 (1998).
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
  14. O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
    [CrossRef]
  15. K. Tsuji, O. Sasaki, T. Suzuki, “Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot etalone for step-profile measurement,” Opt. Rev. 6, 62–67 (1999).
    [CrossRef]
  16. O. Sasaki, H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986).
    [CrossRef] [PubMed]

1999 (1)

K. Tsuji, O. Sasaki, T. Suzuki, “Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot etalone for step-profile measurement,” Opt. Rev. 6, 62–67 (1999).
[CrossRef]

1998 (1)

X. Dai, K. Seta, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol. 9, 1013–1035 (1998).

1997 (5)

1996 (1)

P. Sandoz, G. Tribillon, H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[CrossRef]

1995 (2)

U. Schnell, E. Zimmermann, R. Dandliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).
[CrossRef]

R. Onodera, Y. Ishii, “Two-wavelength laser-diode interferometer with fractional fringe rechniques,” Appl. Opt. 34, 4740–4746 (1995).
[CrossRef] [PubMed]

1994 (1)

1991 (2)

1986 (2)

Claus, R. O.

T. Li, R. G. May, A. Wang, R. O. Claus, “Optical scanning extrinsic Fabry–Perot interferometer for absolute microdisplacement measurement,” Appl. Opt. 36, 8859–8861 (1997).
[CrossRef]

Dai, X.

X. Dai, K. Seta, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol. 9, 1013–1035 (1998).

Dandliker, R.

U. Schnell, E. Zimmermann, R. Dandliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).
[CrossRef]

de Groot, P.

Docchio, F.

Fercher, A. F.

Funabe, T.

Hitzenberger, C. K.

Ishii, Y.

Ito, H.

Iwata, K.

Kikuta, H.

Kishner, S.

Kulhavy, M.

Kuwahara, T.

O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
[CrossRef]

Kuwamura, S.

Lexer, F.

Li, T.

T. Li, R. G. May, A. Wang, R. O. Claus, “Optical scanning extrinsic Fabry–Perot interferometer for absolute microdisplacement measurement,” Appl. Opt. 36, 8859–8861 (1997).
[CrossRef]

May, R. G.

T. Li, R. G. May, A. Wang, R. O. Claus, “Optical scanning extrinsic Fabry–Perot interferometer for absolute microdisplacement measurement,” Appl. Opt. 36, 8859–8861 (1997).
[CrossRef]

Minoni, U.

Nagata, R.

Okazaki, H.

Onodera, R.

Perrin, H.

P. Sandoz, G. Tribillon, H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[CrossRef]

Rovati, L.

Sandoz, P.

P. Sandoz, G. Tribillon, H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[CrossRef]

Sasaki, O.

K. Tsuji, O. Sasaki, T. Suzuki, “Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot etalone for step-profile measurement,” Opt. Rev. 6, 62–67 (1999).
[CrossRef]

O. Sasaki, T. Yoshida, T. Suzuki, “Double sinusoidal phase-modulating laser diode interferometer for distance measurement,” Appl. Opt. 30, 3617–3621 (1991).
[CrossRef] [PubMed]

O. Sasaki, H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986).
[CrossRef] [PubMed]

O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
[CrossRef]

Sato, S.

O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
[CrossRef]

Schnell, U.

U. Schnell, E. Zimmermann, R. Dandliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).
[CrossRef]

Schwider, J.

Seta, K.

X. Dai, K. Seta, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol. 9, 1013–1035 (1998).

Suzuki, T.

K. Tsuji, O. Sasaki, T. Suzuki, “Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot etalone for step-profile measurement,” Opt. Rev. 6, 62–67 (1999).
[CrossRef]

O. Sasaki, T. Yoshida, T. Suzuki, “Double sinusoidal phase-modulating laser diode interferometer for distance measurement,” Appl. Opt. 30, 3617–3621 (1991).
[CrossRef] [PubMed]

O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
[CrossRef]

Tanno, N.

Tribillon, G.

P. Sandoz, G. Tribillon, H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[CrossRef]

Tsuji, K.

K. Tsuji, O. Sasaki, T. Suzuki, “Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot etalone for step-profile measurement,” Opt. Rev. 6, 62–67 (1999).
[CrossRef]

O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
[CrossRef]

Wang, A.

T. Li, R. G. May, A. Wang, R. O. Claus, “Optical scanning extrinsic Fabry–Perot interferometer for absolute microdisplacement measurement,” Appl. Opt. 36, 8859–8861 (1997).
[CrossRef]

Yamaguchi, I.

Yoshida, T.

Zhou, L.

Zimmermann, E.

U. Schnell, E. Zimmermann, R. Dandliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).
[CrossRef]

Appl. Opt. (9)

P. de Groot, S. Kishner, “Synthetic wavelength stabilization for two-color laser-diode interferometry,” Appl. Opt. 30, 4026–4033 (1991).
[CrossRef] [PubMed]

R. Onodera, Y. Ishii, “Two-wavelength laser-diode interferometer with fractional fringe rechniques,” Appl. Opt. 34, 4740–4746 (1995).
[CrossRef] [PubMed]

H. Kikuta, K. Iwata, R. Nagata, “Distance measurement by the wavelength shift of laser diode light,” Appl. Opt. 25, 2976–2980 (1986).
[CrossRef] [PubMed]

O. Sasaki, T. Yoshida, T. Suzuki, “Double sinusoidal phase-modulating laser diode interferometer for distance measurement,” Appl. Opt. 30, 3617–3621 (1991).
[CrossRef] [PubMed]

S. Kuwamura, I. Yamaguchi, “Wavelength scanning profilometry for real-time surface shape measurement,” Appl. Opt. 36, 4473–4482 (1997).
[CrossRef] [PubMed]

F. Lexer, C. K. Hitzenberger, A. F. Fercher, M. Kulhavy, “Wavelength-tuning interferometry of intraocular distances,” Appl. Opt. 36, 6548–6553 (1997).
[CrossRef]

T. Li, R. G. May, A. Wang, R. O. Claus, “Optical scanning extrinsic Fabry–Perot interferometer for absolute microdisplacement measurement,” Appl. Opt. 36, 8859–8861 (1997).
[CrossRef]

T. Funabe, N. Tanno, H. Ito, “Multimode-laser reflectometer with a multichannel wavelength detector and its application,” Appl. Opt. 36, 8919–8928 (1997).
[CrossRef]

O. Sasaki, H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement,” Appl. Opt. 25, 3137–3140 (1986).
[CrossRef] [PubMed]

J. Mod. Opt. (1)

P. Sandoz, G. Tribillon, H. Perrin, “High-resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white-light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[CrossRef]

Meas. Sci. Technol. (1)

X. Dai, K. Seta, “High-accuracy absolute distance measurement by means of wavelength scanning heterodyne interferometry,” Meas. Sci. Technol. 9, 1013–1035 (1998).

Opt. Lett. (2)

Opt. Rev. (1)

K. Tsuji, O. Sasaki, T. Suzuki, “Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot etalone for step-profile measurement,” Opt. Rev. 6, 62–67 (1999).
[CrossRef]

Pure Appl. Opt. (1)

U. Schnell, E. Zimmermann, R. Dandliker, “Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry,” Pure Appl. Opt. 4, 643–651 (1995).
[CrossRef]

Other (1)

O. Sasaki, K. Tsuji, S. Sato, T. Kuwahara, T. Suzuki, “Sinusoidal wavelength-scanning interferometers,” in Laser Interferometry IX: Techniques and Analysis, M. Kujawinska, G. M. Brown, M. Takeda eds., Proc. SPIE3478, 37–44 (1998).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

SWS–SLD interferometer for step-profile measurement.

Fig. 2
Fig. 2

Continuous spectrum of a SLD and its filtering.

Fig. 3
Fig. 3

Values of Z b measured for different values of change ΔL in OPD.

Fig. 4
Fig. 4

Variations of Z b with time.

Fig. 5
Fig. 5

Measured result of step profile.

Tables (1)

Tables Icon

Table 1 Measured Values

Equations (9)

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λt=λ0+Δλt=λ0+b cosωbt.
Ψt=2πL/λt=-2πΔλt/λ02L+2π/λ0L,
St=Mt+MtV cosZc cos ωct+Zb cos ωbt+α,
Zc=4πa/λ0,Zb=2πb/λ02L,
α=-2π/λ0L.
ϕt=Zb cos ωbt+α.
L=mλ0+Lα,
mc=Lz-Lα/λ0.
LZ=DZ+ZbD,

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