Abstract

We present a unified two-step analytical inversion of reflectometric and ellipsometric data of absorbing media. Instead of a direct determination of the optical constants n, κ from reflectometric or ellipsometric measurements, we first calculate the real and the imaginary part η, γ of the normal component of the wave vector in the absorbing medium. New and simple analytical formulas are obtained for η and γ in terms of ρs, ρp or tan ψ, δ, respectively, where ρs, ρp and tan ψ, δ are the measured reflectometric and ellipsometric parameters of the absorbing medium. The optical constants are then easily determined analytically again from η, γ. We use the new formulas to compare the sensitivity with experimental errors due to the inversion of reflectometric and ellipsometric data.

© 2000 Optical Society of America

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