Abstract
With a small double-mirror setup, we used grazing-x-ray interferometry to study nanometric steps. These one-dimensional steps were microfabricated upon the surface of one of the two mirrors; the other mirror provided the reference wave. Two geometries were studied. In the longitudinal case in which the x rays are parallel to the step edges, it is straightforward to determine the step size. In the transverse case, one deals with Fourier holography, and a reconstruction process for a phase object had been demonstrated for the case of a single step.
© 2000 Optical Society of America
Full Article | PDF ArticleMore Like This
Valeriy V. Yashchuk, Eric M. Gullikson, Malcolm R. Howells, Steve C. Irick, Alastair A. MacDowell, Wayne R. McKinney, Farhad Salmassi, Tony Warwick, James P. Metz, and Thomas W. Tonnessen
Appl. Opt. 45(20) 4833-4842 (2006)
D. L. Windt, W. K. Waskiewicz, and J. E. Griffith
Appl. Opt. 33(10) 2025-2031 (1994)
Dan Stutman, Michael Finkenthal, and Nicolae Moldovan
Appl. Opt. 49(25) 4677-4686 (2010)