Abstract

Multilayer coatings with three layers were designed to yield an increase in normal-incidence reflectance in the extreme ultraviolet over that of the available single-layer coatings. Multilayer coatings based on Al, MgF2, and either SiC or B4C were demonstrated to have higher reflectance than single layers of SiC and B4C in the spectral region from 57.9 nm to the H Lyman-α line (121.6 nm) and above. The increase in reflectance was higher at wavelengths close to 121.6 nm. Reflectance degraded slightly over time in the same way as for single layers. After a few months, multilayer coatings maintained higher reflectance than their single-layer counterparts.

© 1999 Optical Society of America

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References

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1996

D. Schwarcz, R. A. M. Keski-Kuha, “Dual ion beam sputtering of carbides for EUV reflectance,” Proc. Mater. Res. Soc. Symp. 396, 503–508 (1996).
[CrossRef]

1994

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

G. M. Blumenstock, R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962–5963 (1994).
[CrossRef] [PubMed]

1991

1988

1981

1977

1974

1971

1970

1967

M. W. Williams, R. A. MacRae, E. T. Arakawa, “Optical properties of magnesium fluoride in the vacuum ultraviolet,” J. Appl. Phys. 38, 1701–1705 (1967).
[CrossRef]

L. Marton, J. Toots, “Optical properties of germanium in the far ultraviolet,” Phys. Rev. 160, 602–606 (1967).
[CrossRef]

Arakawa, E. T.

M. W. Williams, R. A. MacRae, E. T. Arakawa, “Optical properties of magnesium fluoride in the vacuum ultraviolet,” J. Appl. Phys. 38, 1701–1705 (1967).
[CrossRef]

Blumenstock, G. M.

G. M. Blumenstock, R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962–5963 (1994).
[CrossRef] [PubMed]

G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995).
[CrossRef]

Brandt, G. B.

Chakrabarti, S.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

Choyke, W. J.

Edelstein, J.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

J. Edelstein, “Reflection/suppression coatings for 900–1200 Å radiation,” in X-Ray/EUV Optics for Astronomy and Microscopy, R. B. Hoover, ed., Proc. SPIE1160, 19–25 (1989).
[CrossRef]

Ginter, M. L.

G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995).
[CrossRef]

Girouard, F. E.

Gum, J. S.

Hass, G.

Herzig, H.

Hunter, W. R.

Keski-Kuha, R. A. M.

D. Schwarcz, R. A. M. Keski-Kuha, “Dual ion beam sputtering of carbides for EUV reflectance,” Proc. Mater. Res. Soc. Symp. 396, 503–508 (1996).
[CrossRef]

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

G. M. Blumenstock, R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962–5963 (1994).
[CrossRef] [PubMed]

R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, A. R. Toft, “Normal incidence reflectance of ion beam deposited SiC films in the EUV,” Appl. Opt. 27, 2815–2816 (1988).
[CrossRef] [PubMed]

J. I. Larruquert, R. A. M. Keski-Kuha, “Multilayer coatings for narrowband imaging in the extreme ultraviolet,” in EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, O. H. Siegmund, M. A. Gummin, eds., Proc. SPIE3114, 608–616 (1997).
[CrossRef]

G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995).
[CrossRef]

Koch, E. E.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, , (Fachinformationszentrum Energie Physik Mathematik Karlsruhe, Germany, 1981).

Kortright, J. B.

Krafka, C.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, , (Fachinformationszentrum Energie Physik Mathematik Karlsruhe, Germany, 1981).

Larruquert, J. I.

J. I. Larruquert, R. A. M. Keski-Kuha, “Multilayer coatings for narrowband imaging in the extreme ultraviolet,” in EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, O. H. Siegmund, M. A. Gummin, eds., Proc. SPIE3114, 608–616 (1997).
[CrossRef]

Lynch, D. W.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, , (Fachinformationszentrum Energie Physik Mathematik Karlsruhe, Germany, 1981).

MacRae, R. A.

M. W. Williams, R. A. MacRae, E. T. Arakawa, “Optical properties of magnesium fluoride in the vacuum ultraviolet,” J. Appl. Phys. 38, 1701–1705 (1967).
[CrossRef]

Marton, L.

L. Marton, J. Toots, “Optical properties of germanium in the far ultraviolet,” Phys. Rev. 160, 602–606 (1967).
[CrossRef]

Osantowski, J. F.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1991), Vol. 2.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, Orlando, Fla., 1985).

Partlow, W. D.

Powell, C. J.

Schwarcz, D.

D. Schwarcz, R. A. M. Keski-Kuha, “Dual ion beam sputtering of carbides for EUV reflectance,” Proc. Mater. Res. Soc. Symp. 396, 503–508 (1996).
[CrossRef]

Seely, J. F.

Supertzi, E. P.

Threat, F. T.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

Toft, A. R.

Toots, J.

L. Marton, J. Toots, “Optical properties of germanium in the far ultraviolet,” Phys. Rev. 160, 602–606 (1967).
[CrossRef]

Truong, V. V.

Venskytis, F. J.

Weaver, J. H.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, , (Fachinformationszentrum Energie Physik Mathematik Karlsruhe, Germany, 1981).

Williams, M. W.

M. W. Williams, R. A. MacRae, E. T. Arakawa, “Optical properties of magnesium fluoride in the vacuum ultraviolet,” J. Appl. Phys. 38, 1701–1705 (1967).
[CrossRef]

Windt, D. L.

Appl. Opt.

J. Appl. Phys.

M. W. Williams, R. A. MacRae, E. T. Arakawa, “Optical properties of magnesium fluoride in the vacuum ultraviolet,” J. Appl. Phys. 38, 1701–1705 (1967).
[CrossRef]

J. Opt. Soc. Am.

Opt. Eng.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

Phys. Rev.

L. Marton, J. Toots, “Optical properties of germanium in the far ultraviolet,” Phys. Rev. 160, 602–606 (1967).
[CrossRef]

Proc. Mater. Res. Soc. Symp.

D. Schwarcz, R. A. M. Keski-Kuha, “Dual ion beam sputtering of carbides for EUV reflectance,” Proc. Mater. Res. Soc. Symp. 396, 503–508 (1996).
[CrossRef]

Other

J. Edelstein, “Reflection/suppression coatings for 900–1200 Å radiation,” in X-Ray/EUV Optics for Astronomy and Microscopy, R. B. Hoover, ed., Proc. SPIE1160, 19–25 (1989).
[CrossRef]

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Optical Properties of Metals, , (Fachinformationszentrum Energie Physik Mathematik Karlsruhe, Germany, 1981).

E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1991), Vol. 2.

J. I. Larruquert, R. A. M. Keski-Kuha, “Multilayer coatings for narrowband imaging in the extreme ultraviolet,” in EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, O. H. Siegmund, M. A. Gummin, eds., Proc. SPIE3114, 608–616 (1997).
[CrossRef]

E. D. Palik, Handbook of Optical Constants of Solids (Academic, Orlando, Fla., 1985).

G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

Near-normal reflectance in the EUV of fresh multilayer coatings of Al/MgF2/SiC and Al/MgF2/B4C compared with single-layer coatings of SiC and B4C.

Fig. 2
Fig. 2

Reflectance of aged multilayer coatings for several angles of incidence: (a) Al/MgF2/SiC multilayer coating, (b) Al/MgF2/B4C multilayer coating.

Fig. 3
Fig. 3

Reflectance at 92 nm of aged Al/MgF2/SiC and Al/MgF2/B4C multilayer coatings as a function of the angle of incidence.

Fig. 4
Fig. 4

Semilogarithmic plot of the near-normal reflectance from the EUV to the near IR of aged multilayer coatings of Al/MgF2/SiC and Al/MgF2/B4C compared with single-layer coatings of SiC and B4C.

Fig. 5
Fig. 5

Near-normal reflectance in the EUV of aged multilayer coatings of Al/MgF2/SiC and Al/MgF2/B4C compared with single-layer coatings of SiC and B4C.

Tables (2)

Tables Icon

Table 1 Calculated Normal-Incidence Reflectance of Multilayer Coatings Optimized for Highest Reflectance at 91.2 nm

Tables Icon

Table 2 Optical Constants of Various Materials Used in Multilayer Coating Design

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