Abstract

The grating diffraction method for direct strain measurement is reviewed. Two systems which use this method are presented.

© 1999 Optical Society of America

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References

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  1. J.F. Bell, “Determination of dynamic plastic strain through the use of diffraction gratings,” J. of Appl. Phys., 27,1109–13 (1956).
    [CrossRef]
  2. J.C. Moulder, J. F. Cardenas-Garcia, “Two-dimensional strain analysis using a video optical diffractometer,” Experimental Technique, September/October, 11–16 (1993).
    [CrossRef]
  3. P.J. Sevenhuijsen, J.S. Sirkis, F. Bremand, “Current trends in obtaining deformation data from grids,” Experimental Technique, May/June, 22–26 (1993).
    [CrossRef]
  4. F. Bremand, J.C. Dupre, A. Lagarde, “Non-contact and non-disturbing local strain measurement methods, I. Principle,” Europeon Journal of Mechanics, A/Solids, 11(3), 349–66 (1992).
  5. Y.W. Qin, Y.Y. Wang, Y.Y. Hung, “Grating strain method,” SPIE Proceedings, 955,Industrial Laser Interferometry, 63–68 (1988).
    [CrossRef]
  6. A. Asundi, “Developments in the moiré interferemetric strain sensor.” SPIE Proceedings, 1163,Holographic interferometry and speckle metrology, 63–68 (1989).
  7. A. Asundi, “Moiré interferometric strain sensor,” Final Report for Project on Moiré Interferometry strain sensor, submitted to committee on research & conference Grants, University of Hong Kong, 1996.
  8. Y. Ma, M. Kurita, “Strain measurement using high-frequency diffraction grating,” Japan Society of Mechanical Engineers, international Journal Series A: Solid Mechanics and Materials Engineering, 36, No. 3, 309–13, (1993).
  9. M. Born, E. Wolf, “Principles of optics, electromagnetic theory of propagation, interference and diffraction of light,” 6th ed. Pergamon Press (1983).

1993 (3)

J.C. Moulder, J. F. Cardenas-Garcia, “Two-dimensional strain analysis using a video optical diffractometer,” Experimental Technique, September/October, 11–16 (1993).
[CrossRef]

P.J. Sevenhuijsen, J.S. Sirkis, F. Bremand, “Current trends in obtaining deformation data from grids,” Experimental Technique, May/June, 22–26 (1993).
[CrossRef]

Y. Ma, M. Kurita, “Strain measurement using high-frequency diffraction grating,” Japan Society of Mechanical Engineers, international Journal Series A: Solid Mechanics and Materials Engineering, 36, No. 3, 309–13, (1993).

1992 (1)

F. Bremand, J.C. Dupre, A. Lagarde, “Non-contact and non-disturbing local strain measurement methods, I. Principle,” Europeon Journal of Mechanics, A/Solids, 11(3), 349–66 (1992).

1989 (1)

A. Asundi, “Developments in the moiré interferemetric strain sensor.” SPIE Proceedings, 1163,Holographic interferometry and speckle metrology, 63–68 (1989).

1956 (1)

J.F. Bell, “Determination of dynamic plastic strain through the use of diffraction gratings,” J. of Appl. Phys., 27,1109–13 (1956).
[CrossRef]

Asundi, A.

A. Asundi, “Developments in the moiré interferemetric strain sensor.” SPIE Proceedings, 1163,Holographic interferometry and speckle metrology, 63–68 (1989).

A. Asundi, “Moiré interferometric strain sensor,” Final Report for Project on Moiré Interferometry strain sensor, submitted to committee on research & conference Grants, University of Hong Kong, 1996.

Bell, J.F.

J.F. Bell, “Determination of dynamic plastic strain through the use of diffraction gratings,” J. of Appl. Phys., 27,1109–13 (1956).
[CrossRef]

Born, M.

M. Born, E. Wolf, “Principles of optics, electromagnetic theory of propagation, interference and diffraction of light,” 6th ed. Pergamon Press (1983).

Bremand, F.

P.J. Sevenhuijsen, J.S. Sirkis, F. Bremand, “Current trends in obtaining deformation data from grids,” Experimental Technique, May/June, 22–26 (1993).
[CrossRef]

F. Bremand, J.C. Dupre, A. Lagarde, “Non-contact and non-disturbing local strain measurement methods, I. Principle,” Europeon Journal of Mechanics, A/Solids, 11(3), 349–66 (1992).

Cardenas-Garcia, J. F.

J.C. Moulder, J. F. Cardenas-Garcia, “Two-dimensional strain analysis using a video optical diffractometer,” Experimental Technique, September/October, 11–16 (1993).
[CrossRef]

Dupre, J.C.

F. Bremand, J.C. Dupre, A. Lagarde, “Non-contact and non-disturbing local strain measurement methods, I. Principle,” Europeon Journal of Mechanics, A/Solids, 11(3), 349–66 (1992).

Hung, Y.Y.

Y.W. Qin, Y.Y. Wang, Y.Y. Hung, “Grating strain method,” SPIE Proceedings, 955,Industrial Laser Interferometry, 63–68 (1988).
[CrossRef]

Kurita, M.

Y. Ma, M. Kurita, “Strain measurement using high-frequency diffraction grating,” Japan Society of Mechanical Engineers, international Journal Series A: Solid Mechanics and Materials Engineering, 36, No. 3, 309–13, (1993).

Lagarde, A.

F. Bremand, J.C. Dupre, A. Lagarde, “Non-contact and non-disturbing local strain measurement methods, I. Principle,” Europeon Journal of Mechanics, A/Solids, 11(3), 349–66 (1992).

Ma, Y.

Y. Ma, M. Kurita, “Strain measurement using high-frequency diffraction grating,” Japan Society of Mechanical Engineers, international Journal Series A: Solid Mechanics and Materials Engineering, 36, No. 3, 309–13, (1993).

Moulder, J.C.

J.C. Moulder, J. F. Cardenas-Garcia, “Two-dimensional strain analysis using a video optical diffractometer,” Experimental Technique, September/October, 11–16 (1993).
[CrossRef]

Qin, Y.W.

Y.W. Qin, Y.Y. Wang, Y.Y. Hung, “Grating strain method,” SPIE Proceedings, 955,Industrial Laser Interferometry, 63–68 (1988).
[CrossRef]

Sevenhuijsen, P.J.

P.J. Sevenhuijsen, J.S. Sirkis, F. Bremand, “Current trends in obtaining deformation data from grids,” Experimental Technique, May/June, 22–26 (1993).
[CrossRef]

Sirkis, J.S.

P.J. Sevenhuijsen, J.S. Sirkis, F. Bremand, “Current trends in obtaining deformation data from grids,” Experimental Technique, May/June, 22–26 (1993).
[CrossRef]

Wang, Y.Y.

Y.W. Qin, Y.Y. Wang, Y.Y. Hung, “Grating strain method,” SPIE Proceedings, 955,Industrial Laser Interferometry, 63–68 (1988).
[CrossRef]

Wolf, E.

M. Born, E. Wolf, “Principles of optics, electromagnetic theory of propagation, interference and diffraction of light,” 6th ed. Pergamon Press (1983).

Europeon Journal of Mechanics, A/Solids (1)

F. Bremand, J.C. Dupre, A. Lagarde, “Non-contact and non-disturbing local strain measurement methods, I. Principle,” Europeon Journal of Mechanics, A/Solids, 11(3), 349–66 (1992).

Experimental Technique (2)

J.C. Moulder, J. F. Cardenas-Garcia, “Two-dimensional strain analysis using a video optical diffractometer,” Experimental Technique, September/October, 11–16 (1993).
[CrossRef]

P.J. Sevenhuijsen, J.S. Sirkis, F. Bremand, “Current trends in obtaining deformation data from grids,” Experimental Technique, May/June, 22–26 (1993).
[CrossRef]

J. of Appl. Phys. (1)

J.F. Bell, “Determination of dynamic plastic strain through the use of diffraction gratings,” J. of Appl. Phys., 27,1109–13 (1956).
[CrossRef]

Japan Society of Mechanical Engineers, international Journal Series A: Solid Mechanics and Materials Engineering (1)

Y. Ma, M. Kurita, “Strain measurement using high-frequency diffraction grating,” Japan Society of Mechanical Engineers, international Journal Series A: Solid Mechanics and Materials Engineering, 36, No. 3, 309–13, (1993).

SPIE Proceedings (1)

A. Asundi, “Developments in the moiré interferemetric strain sensor.” SPIE Proceedings, 1163,Holographic interferometry and speckle metrology, 63–68 (1989).

Other (3)

A. Asundi, “Moiré interferometric strain sensor,” Final Report for Project on Moiré Interferometry strain sensor, submitted to committee on research & conference Grants, University of Hong Kong, 1996.

M. Born, E. Wolf, “Principles of optics, electromagnetic theory of propagation, interference and diffraction of light,” 6th ed. Pergamon Press (1983).

Y.W. Qin, Y.Y. Wang, Y.Y. Hung, “Grating strain method,” SPIE Proceedings, 955,Industrial Laser Interferometry, 63–68 (1988).
[CrossRef]

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Figures (5)

Figure 1
Figure 1

Sketch of two-dimensional grating diffraction. Grating is illuminated by a collimated beam, diffraction spots are formed in a screen.

Figure 2
Figure 2

Sketch of optical microscope system and principle.

Figure 3
Figure 3

Diffraction patterns of an 80 1/mm cross grating before and after loading. The white line serves as a reference.

Figure 4
Figure 4

Grating diffraction system with PSD sensors.

Figure 5
Figure 5

Sensor interface and an example of test result on electronic packaging. The curve displayed represents thermal strain distribution of an electronic chip.

Equations (2)

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P sin θ n = n λ n = 0 ,   ± 1 ,   ± 2 ,  
χ χ = P * - P P = X n * - X n X n   cos θ n

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