Abstract

The m-lines technique is used to measure the refractive indices and thicknesses of layers embedded in a multilayer stack. The multilayer considered is deposited by ion plating. Its formula is silica–4HL–4HL–6H–air, where H and L denote Ta2O5 and SiO2λ/4 layers, respectively, with λ = 514.5 nm. Measurements indicate that the refractive index of Ta2O5 is 5 × 10-3 greater when the layer is close to air than when the layer is inside the coating and that the Ta2O5 is slightly more birefringent.

© 1999 Optical Society of America

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