Abstract
Thin-film microlens arrays with high fill factors have been
fabricated in a one-step process by shading a vapor beam in a
vacuum-deposition apparatus with metallic meshes placed at defined
distances to the substrate surface. To generate three-dimensional
mask structures with the necessary depth profiles, microgalvanic
technology has been applied. Profiles and optical properties of the
microlenses have been studied theoretically and
experimentally.
© 1999 Optical Society of America
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