Abstract

A grazing-incidence interferometer for the testing of technical surfaces for macroscopic surface deviations is described. Computer-generated holograms serve as beam splitters and references for the workpieces tested. The sensitivity of the interferometer depends on the period of the computer-generated holograms. The method is demonstrated at a rod object of convex profile. Using phase-stepping techniques, the grazing-incidence interferometer provides fast measurements of the entire mantle surface of the test sample with submicrometer precision.

© 1999 Optical Society of America

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