Buried channel optical waveguides were fabricated from fluorinated polyimides. They operated in single mode and showed an optical loss of less than 0.3 and 0.7 dB/cm for TE and TM polarizations, respectively, at a wavelength of 1.3 μm. Moreover, these waveguides had high heat and moisture resistance; the optical loss did not significantly change after heating at 380 °C for 1 h or after exposure to 85% relative humidity at 85 °C for over 200 h.
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