Abstract

The design and implementation of a prototype time-of-flight optical ranging system based on the time-correlated single-photon-counting technique are described. The sensor is characterized in terms of its longitudinal and transverse spatial resolution, single-point measurement time, and long-term stability. The system has been operated at stand-off distances of 0.5–5 m, has a depth repeatability of <30 μm, and has a lateral spatial resolution of <500 μm.

© 1998 Optical Society of America

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