Abstract

The accuracy and the measurement range of surface profilometry by wavelength scanning interferometry applied to diffusely reflecting surfaces are investigated. The influences of surface roughness and the imaging system in the interferometer are theoretically analyzed by derivation of the autocorrelation function of interferograms arising from wavelength scanning. By using a dye laser with a tuning range of 4.2 nm to a yield resolution of 39.1 μm, we have observed interferograms and their Fourier transforms and autocorrelations to study effects of defocusing and the size ratio of speckle to the CCD pixel for a plane diffuse object positioned normal to the incident beam.

© 1998 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (25)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription